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A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of

A bubbler (2) for delivering liquid or solid metalorganic compounds to a reactor site. The bubbler has an inner and outer chamber and has a member (14) positioned between its inlet (6) and outlet (8) that is provided with a plurality of apertures therein. The member (14) is preferably in the form of a perforated disc having a predefined density of apertures therein to provide optimum pick up and flow of carrier gas through the bubbler.

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1. A bubbler comprising a sealable vessel capable of containing a substance, the vessel having a wall with an internal surface,an inlet and an outlet for delivery of a carrier gas into and out of the vessel,a conduit having a base, and wherein the inlet or outlet is connected to the conduit,a member

1. A bubbler comprising a sealable vessel capable of containing a substance, the vessel having a wall with an internal surface,an inlet and an outlet for delivery of a carrier gas into and out of the vessel,a conduit having a base, and wherein the inlet or outlet is connected to the conduit,a member attached to the conduit and positioned between said inlet and said outlet, the member having a perimeter and a plurality of apertures at predefined spaced apart intervals and distributed therein in a range of about 5 to about 25 apertures per square cm, and the member having an upper surface and a lower surface connected by at least one side to thereby define a cavity,wherein the perimeter of the member is in contact with the internal surface of the wall of the vessel around the perimeter of the member, and wherein the lower surface of the member is in contact with a bottom portion of the vessel. 2. The bubbler of claim 1, wherein the vessel is in the form of an elongated cylinder. 3. The bubbler of claim 1, wherein the member is made from a non-porous material. 4. The bubbler of claim 3, wherein the member is made of metal. 5. The bubbler of claim 4, wherein the member is made of stainless steel. 6. The bubbler of claim 1, wherein the member extends transverse to the longitudinal axis of the vessel. 7. The bubbler of claim 1, wherein the member is substantially flat. 8. The bubbler of claim 1, wherein the member extends outwardly from the conduit. 9. The bubbler of claim 8, wherein the member extends from the base of the conduit. 10. The bubbler of claim 8, wherein the member is welded to the conduit. 11. The bubbler of claim 1, wherein the apertures are arranged in a random or irregular pattern. 12. The bubbler of claim 1, wherein the apertures are arranged in a geometric or regular pattern. 13. The bubbler of claim 12, wherein the apertures are arranged in a series of concentric circles. 14. The bubbler of claim 1, wherein the member has a plurality of apertures distributed therein in a range of about 10 to about 20 apertures per square cm. 15. The bubbler of claim 1, wherein each aperture has a diameter of less than about 0.5 mm. 16. The bubbler of claim 15, wherein each aperture has a diameter of about 0.1 to about 0.2 mm. 17. The bubbler of claim 1, wherein the vessel comprises an inner and outer chamber, the inner chamber comprising the conduit. 18. The bubbler of claim 17, wherein the member extends transversely across the inner and outer chambers. 19. The bubbler of claim 17, wherein the inner and outer chambers are cylindrical with the diameter of the inner chamber being approximately one third the diameter of the outer chamber. 20. The bubbler of claim 19, wherein the diameter of the inner chamber is at least about 20 mm. 21. The bubbler of claim 19, wherein the diameter of the outer chamber is at least about 75 mm. 22. The bubbler of claim 17, wherein the inlet is connected to the outer chamber and the outlet is connected to the inner chamber. 23. The bubbler of claim 17, wherein the inner chamber and the outer chamber are both configured to hold at least part of the substance, and wherein the substance is to be carried in the carrier gas. 24. The bubbler of claim 23, wherein the inner chamber and the outer chamber are both configured to hold at least part of the substance so that a ratio of substance in the outer chamber to the inner chamber would be in the range 5 to 7:1. 25. The bubbler of claim 1, wherein the conduit extends into the vessel. 26. The bubbler of claim 1, wherein the bubbler is operable with a forward flow of carrier gas through the bubbler from the inlet to the outlet and with a reverse flow of carrier gas through the bubbler from the outlet to the inlet. 27. The bubbler of claim 1, wherein the plurality of apertures are located in the upper surface of the member. 28. A bubbler comprising a sealable vessel capable of containing a substance, the vessel having an inlet and an outlet for the delivery of a carrier gas into and out of the vessel, the inlet being connected to one of an outer chamber in the vessel and an inner chamber within said outer chamber, the outlet being connected to the other one of the outer chamber and the inner chamber, said inner and outer chambers being in fluid communication, the vessel also having a member positioned between said inlet and said outlet, the member having a plurality of apertures therein, the member having an upper surface and a lower surface connected by at least one side to thereby define a cavity at least partly within the member, the member being in contact with an interior surface of the outer chamber around a perimeter of the member, and the member being in contact with a bottom portion of the outer chamber along the lower surface of the member. 29. The bubbler of claim 28, wherein the inlet is connected to the outer chamber. 30. The bubbler of claim 28, wherein the plurality of apertures are located in the upper surface of the member. 31. The bubbler of claim 28, wherein the apertures are distributed in the member in a range of about 5 and about 25 apertures per square centimeter, and wherein a diameter of each aperture is less than about 0.5 millimeters. 32. A bubbler for transporting a substance by a carrier gas, the bubbler comprising a sealable vessel capable of containing the substance, the sealable vessel comprising: an outer chamber having a wall with an internal surface;an inner chamber disposed at least partly within the outer chamber, the inner chamber and the outer chamber being in fluid communication with each other;an inlet for transporting the carrier gas to the sealable vessel;an outlet for transporting the substance and the carrier gas from the sealable vessel;a perforated disc having a perimeter and the perforated disc oriented generally transverse to a longitudinal axis of the vessel such that the perimeter of the perforated disc is in contact with the inner surface of the wall of the outer chamber around the perimeter of the perforated disc;the perforated disc having a plurality of apertures at predefined spaced apart intervals and distributed therein in a range of about 5 and about 25 apertures per square centimeter, with a diameter of each aperture being less than about 0.5 millimeters;wherein the perforated disc is capable of dispersing the carrier gas in the bubbler;a substantially flat, solid disc connected to the perforated disc by sides thereby defining a cavity, the solid disc being in contact with a bottom portion of the outer chamber. 33. The bubbler of claim 32, wherein the bubbler is capable of transporting a metalorganic compound. 34. The bubbler of claim 32, wherein the inner chamber and the outer chamber of the sealable vessel are substantially concentric with each other about a longitudinal axis. 35. The bubbler of claim 32, wherein the perforated disc is substantially flat and circular in shape.