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A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a v

A combined pumping system comprising a getter pump and an ion pump is described. The getter pump and the ion pump are mounted in series on a same flange and are respectively arranged on opposite sides thereof so that both getter and ion pumps conductance are maximized towards gas flux sources in a vacuum chamber in order to improve the vacuum level of the system.

대표청구항 ▼

1. A combined pumping system, comprising a getter pump and an ion pump mounted in series and respectively arranged on opposite sides of a same flange, the ion pump connected to a flange hole of the flange by a duct, wherein the flange is suitable to directly mount the combined pumping system to a wa

1. A combined pumping system, comprising a getter pump and an ion pump mounted in series and respectively arranged on opposite sides of a same flange, the ion pump connected to a flange hole of the flange by a duct, wherein the flange is suitable to directly mount the combined pumping system to a wall of a vacuum chamber and the getter pump is external to the duct connecting the ion pump to the flange hole. 2. The system according to claim 1, wherein a volume of the getter pump intercepts an axis of symmetry of the flange hole. 3. The system according to claim 1, wherein said pumps are mounted axially parallel to each other and to an axis of symmetry of the flange hole. 4. The system according to claim 1, wherein said pumps are coaxially mounted with respect to each other. 5. The system according to claim 1, wherein the getter pump further comprises a plurality of discs made of a non-evaporable getter material stacked on one or more supports. 6. The system according to claim 5, wherein said getter material discs are arranged inside a metal structure coupled to the flange hole of the flange through a second duct suitable to connect the getter pump with the ion pump. 7. The system according to the claim 6, wherein said second duct is provided with walls having a plurality of side apertures suitable to directly connect the vacuum chamber to the ion pump. 8. The system according to claim 7, wherein in the second duct the plurality of side apertures are provided such that a ratio between an area of the apertures and an overall lateral area is larger than 0.2. 9. The system according to claim 7, wherein in the second duct the plurality of side apertures are provided such that a ratio between an area of the apertures and an overall lateral area is larger than 0.4. 10. The system according to the claim 6, wherein said second duct has a cage-like structure. 11. The system according to claim 5, wherein said getter material discs are arranged inside a metal structure coupled to the flange hole of the flange, the metal structure laterally opened and suitable to support the the getter pump.