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특허 상세정보

MyON담기
내보내기 페이스북 공유 카카오톡 공유

On-line chamber cleaning using dry ice blasting

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B24B-001/00    B24C-001/00   
미국특허분류(USC) 451/039; 451/037; 451/057
출원번호 US-0730299 (2007-03-30)
등록번호 US-8292698 (2012-10-23)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Buchanan Ingersoll & Rooney PC
인용정보 피인용 횟수 : 43  인용 특허 : 10
초록

An on-line method of cleaning contaminants from at least one interior surface in plasma chambers comprises blasting one or more interior surfaces of a plasma chamber with dry ice to remove contaminants from the one or more surfaces.

대표
청구항
▼

1. An on-line method of cleaning contaminants from at least one interior chamber surface in plasma chambers, the method comprising: opening a plasma chamber at an on-line site; andblasting one or more interior surfaces of the plasma chamber with dry ice, wherein:the blasting removes contaminants from the one or more surfaces; andthe cleaning is carried out at the on-line site in which the plasma chamber is regularly operated. 2. The method of claim 1, wherein the contaminants comprise polymer deposits. 3. The method of claim 1, wherein the contaminants c...

이 특허에 인용된 특허 (10)

  1. Bishop Phillip W. ; Harrover Alexander J.. Carbon dioxide cleaning process. USP1999126004400.
  2. Becker David Scott ; Hanestad Ronald J. ; Thomes Gregory P. ; Weygand James F. ; Zimmerman Larry D.. Eliminating stiction with the use of cryogenic aerosol. USP2000036036786.
  3. Noorbakhsh,Hamid; Carducci,James D.; Sun,Jennifer Y.; Elizaga,Larry D.. Gas distribution showerhead for semiconductor processing. USP2006016983892.
  4. Takase, Taira; Nagayama, Nobuyuki; Mitsuhashi, Kouji; Nakayama, Hiroyuki. Method of cleaning a plasma processing apparatus. USP2004096790289.
  5. Suzuki, Katsunori. Method of cleaning component in plasma processing chamber and method of producing semiconductor devices. USP2005056897161.
  6. Ahmadi, Goodarz; Lewis, Paul E.; Tannous, Adel George; Makhamreh, Khalid. Methods for cleaning utilizing multi-stage filtered carbon dioxide. USP2005096945853.
  7. Boumerzoug,Mohamed; Tannous,Adel George. Methods for residue removal and corrosion prevention in a post-metal etch process. USP2006117134941.
  8. Tannous,Adel George; Makhamreh,Khalid. Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants. USP2006097101260.
  9. Chen Ching-Hwa (Milpitas CA) Arnett David (Fremont CA) Liu David (San Jose CA). Plasma cleaning method for removing residues in a plasma treatment chamber. USP1994105356478.
  10. Goundar,Kamal Kishore; Kumakura,Tadashi. Two-step formation of etch stop layer. USP2006087091133.

이 특허를 인용한 특허 피인용횟수: 43

  1. Suh, Song-Moon; Guo, Yuanhong; Xuan, Guangchi; Agarwal, Pulkit. Cleaning of chamber components with solid carbon dioxide particles. USP2018039925639.
  2. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108545857.
  3. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108563012.
  4. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108551506.
  5. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013128603494.
  6. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603495.
  7. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603496.
  8. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013108545806.
  9. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014058731842.
  10. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128613937.
  11. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014078788212.
  12. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069056047.
  13. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069050251.
  14. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2013108545856.
  15. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069060931.
  16. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015079072799.
  17. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058721583.
  18. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058725420.
  19. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013108545855.
  20. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069050070.
  21. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069060934.
  22. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058722068.
  23. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015079072688.
  24. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069050317.
  25. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731840.
  26. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069060926.
  27. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014078793075.
  28. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731841.
  29. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2013108551505.
  30. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and array devices thereof. USP2014078784384.
  31. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2014088798932.
  32. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2013108568363.
  33. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2015059040087.
  34. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2014088798933.
  35. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2014108858912.
  36. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen piercing implements and methods for piercing a substrate. USP2014078784385.
  37. Nagai, Takayuki; Sato, Masateru. Ion implantation apparatus and method of cleaning ion implantation apparatus. USP20180710030304.
  38. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Method and system for comparing tissue ablation or abrasion data to data related to administration of a frozen particle composition. USP2014078788211.
  39. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Methods and systems for ablation or abrasion with frozen particles and comparing tissue surface ablation or abrasion data to clinical outcome data. USP2014068762067.
  40. Young, Jeremy R.. Process for the removal of contaminants from sputtering target substrates. USP20181110138545.
  41. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Systems, devices and methods for making or administering frozen particles. USP2013088518031.
  42. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Systems, devices, and methods for making or administering frozen particles. USP2014098849441.
  43. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Systems, devices, and methods for making or administering frozen particles. USP2013078485861.

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