Laser beam positioning systems for material processing and methods for using such systems
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B23K-026/06
G02B-026/10
출원번호
US-0841450
(2007-08-20)
등록번호
US-8294062
(2012-10-23)
발명자
/ 주소
Sukhman, Yefim P.
Noto, Stefano J.
Kaufman, Cheryl
출원인 / 주소
Universal Laser Systems, Inc.
대리인 / 주소
Perkins Coie LLP
인용정보
피인용 횟수 :
2인용 특허 :
34
초록▼
Laser beam positioning systems for material processing and methods for using such systems are disclosed herein. One embodiment of a laser-based material processing system, for example, can include (a) a radiation source configured to produce a laser beam and direct the beam along a beam path, and (b
Laser beam positioning systems for material processing and methods for using such systems are disclosed herein. One embodiment of a laser-based material processing system, for example, can include (a) a radiation source configured to produce a laser beam and direct the beam along a beam path, and (b) a laser beam positioning assembly in the beam path. The laser beam positioning assembly can include a first focusing element, first and second reflective optical elements, and a second focusing element. The first focusing element can focus the laser beam to a first focal point between the first and second reflective optical elements. The first and second reflective optical elements can direct the laser beam toward a material processing area while the laser beam has a decreasing or increasing cross-sectional dimension. The second focusing element can focus the laser beam and direct the beam toward the material processing area.
대표청구항▼
1. A laser-based material processing system, the system comprising: a radiation source configured to produce a laser beam and direct the laser beam along a beam path toward a material processing area; anda laser beam positioning assembly in the beam path, the laser beam positioning assembly includin
1. A laser-based material processing system, the system comprising: a radiation source configured to produce a laser beam and direct the laser beam along a beam path toward a material processing area; anda laser beam positioning assembly in the beam path, the laser beam positioning assembly including— a first focusing element configured to focus the beam along the beam path to a first focal point;a first reflective optical element and a second reflective optical element in the beam path, wherein the first reflective optical element is configured to reflect a converging portion of the beam toward the second reflective optical element, and wherein the first focal point is between the first and second reflective optical elements, and further wherein the second reflective optical element is configured to reflect a diverging portion of the beam toward the material processing area; anda second focusing element in the beam path between the second reflective optical element and the material processing area. 2. The system of claim 1 wherein the first and second reflective optical elements include electrically-driven rotating mirrors. 3. The system of claim 1 wherein the first and second reflective optical elements include rotating galvanometer-driven mirrors that move to change at least one of an X-axis and Y-axis position of the beam relative to the material processing area. 4. The system of claim 1 wherein the second focusing element includes a flat field lens. 5. The system of claim 1 wherein the second focusing element is configured to focus the diverging portion of the beam and produce a second focal point at least proximate to the material processing area. 6. A laser assembly for processing material, the laser assembly comprising: a material processing area;a laser source configured to emit a laser beam directed along a beam path toward the material processing area;a first lens in the beam path and configured to focus the laser beam to a first focal point in the beam path, the first focal point being before the material processing area;a first actuatable mirror and a second actuatable mirror in the beam path, wherein the first mirror is positioned between the first lens and the first focal point and configured to reflect a converging portion of the laser beam toward the second mirror, and wherein the second mirror is between the first focal point and the material processing area and configured to reflect a diverging portion of the laser beam toward the material processing area; anda second lens in the beam path between the second mirror and the material processing area and configured to focus the diverging portion of the laser beam. 7. The assembly of claim 6 wherein: the first mirror includes a first galvanometer-driven mirror; andthe second mirror includes a second galvanometer mirror, and wherein the first and second galvanometer-driven mirrors rotate relative to the beam path and each other to change a position of the laser beam relative to the material processing area. 8. The assembly of claim 6 wherein the first and second mirrors are separated by a distance of from approximately 6 mm to approximately 26 mm. 9. The assembly of claim 6 wherein the first mirror has a generally planar reflective surface, and the second mirror has a generally convex reflective surface. 10. The assembly of claim 6 wherein the first lens has a focal length of from approximately 25 mm to approximately 76 mm. 11. The assembly of claim 6 wherein the second lens comprises a flat field lens. 12. A method for modifying a workpiece, the method comprising: directing a laser beam along a beam path toward a first optical element, the laser beam having a first beam propagation profile along the beam path;focusing the laser beam with the first optical element to change the first beam propagation profile to a second converging beam propagation profile along the beam path;changing a beam path direction from a first direction to a second direction different from the first direction by reflecting the laser beam with a first reflective surface after changing the beam propagation profile from the first beam propagation profile to the second converging beam propagation profile;reflecting the laser beam with a second reflective surface and changing the beam path direction from the second direction to a third direction different from the second direction toward a second optical element; andfocusing the laser beam with the second optical element and directing the beam toward a material processing area. 13. The method of claim 12 wherein focusing the laser beam with the first optical element includes producing a first focal point along the beam path. 14. The method of claim 13 wherein following the first focal point, the laser beam changes from the second converging beam propagation profile to a third diverging beam propagation profile, and wherein reflecting the laser beam with the second reflective surface includes reflecting the laser beam having the third diverging beam propagation profile. 15. The method of claim 12 wherein reflecting the laser beam with the first and second reflective surfaces includes reflecting the laser beam with galvanometer-driven mirrors configured to rotate relative to each other and the laser beam to change the beam path direction. 16. The method of claim 12, further comprising moving at least one of a first reflective surface and a second reflective surface to vary a position of the laser beam relative to the material processing area. 17. The method of claim 12, further comprising irradiating a portion of a workpiece at least proximate to the material processing area with the laser beam after focusing the laser beam. 18. The method of claim 12, further comprising selecting a target material having an outer surface and an interior volume, and wherein focusing the laser beam with the second optical element includes impinging a focal point on at least one of the outer surface and the interior volume. 19. The method of claim 12 wherein reflecting the laser beam with a first reflective surface includes reflecting the beam with a first reflective surface having a first reflective area dimension of from approximately 1 mm to approximately 6 mm, and wherein reflecting the laser beam with a second reflective surface includes reflecting the beam with a second reflective surface having a second reflective area dimension of from approximately 1 mm to approximately 6 mm. 20. The method of claim 12 wherein reflecting the laser beam with a first reflective surface includes reflecting the beam with a first reflective surface having a reflectivity value of approximately 99% to approximately 99.9%, and wherein reflecting the laser beam with a second reflective surface includes reflecting the beam with a second reflective surface having a reflectivity value of approximately 99% to approximately 99.9%. 21. The method of claim 12 wherein focusing the laser beam with a first optical element includes focusing with a first optical element having a focal length of approximately 25 mm to approximately 76 mm. 22. The method of claim 12 wherein after changing the beam path direction from the first direction to the second direction, and before changing the beam path direction from the second direction to the third direction, the laser beam travels a distance of from approximately 6 mm to approximately 26 mm. 23. A method for processing a workpiece using a laser, the method comprising: directing a laser beam along a beam path toward a material processing area, the beam having an initial beam dimension in a plane generally transverse to the beam path;passing the laser beam through a first optical element, wherein the first optical element focuses the beam to a focal point along the beam path, and wherein the focused beam has (a) a decreasing beam dimension as the beam progresses along the beam path toward the focal point, and (b) an increasing beam dimension as the beam progresses along the beam path following the focal point;impinging the beam having the decreasing or the increasing beam dimension on a first reflective element along the beam path and guiding the laser beam toward a second reflective element;directing the beam along the beam path from the first reflective element to the second reflective element;reflecting the laser beam toward a second optical element with the second reflective element before the beam expands to a dimension equal to or greater than the initial dimension; andpassing the laser beam through the second optical element and toward the material processing area. 24. The method of claim 23 wherein the second optical element focuses the laser beam at least proximate to a surface of a material being processed. 25. The method of claim 23 wherein: impinging the beam on a first reflective element includes impinging the beam having a first beam dimension less than the initial beam dimension; andreflecting the laser beam toward a second reflective element includes reflecting the beam having a second beam dimension less than the initial beam dimension, and wherein the first beam dimension is generally the same as the second beam dimension. 26. The method of claim 23 wherein: impinging the beam on a first reflective element includes impinging the beam having a first beam dimension less than the initial beam dimension; andreflecting the laser beam toward a second reflective element includes reflecting the beam having a second beam dimension less than the initial beam dimension, and wherein the first beam dimension is greater than or less than the second beam dimension. 27. The method of claim 23, further comprising changing a reflection angle of at least one of the first and second reflective elements to change a position of the laser beam relative to the material processing area. 28. The method of claim 23 wherein impinging the beam with the first reflective element includes impinging with a first electrically-driven rotating mirror, and wherein reflecting the beam with the second reflective element includes reflecting with a second electrically-driven rotating mirror.
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