A pressure transducer for high-pressure measurements comprising a housing and a piezoelectric resonator located in the housing, wherein the resonator comprises double rotation cut piezoelectric material configured or designed for vibrating in the fundamental tone of dual modes of the fast and slow t
A pressure transducer for high-pressure measurements comprising a housing and a piezoelectric resonator located in the housing, wherein the resonator comprises double rotation cut piezoelectric material configured or designed for vibrating in the fundamental tone of dual modes of the fast and slow thickness-shear vibrations.
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1. A pressure transducer comprising: a housing, anda piezoelectric solid resonator located in the housing,wherein the resonator comprising double rotation cut piezoelectric quartz material that vibrates in B(1,0,0), the fundamental harmonic of the B-mode of vibration, and C(1,0,0), the fundamental h
1. A pressure transducer comprising: a housing, anda piezoelectric solid resonator located in the housing,wherein the resonator comprising double rotation cut piezoelectric quartz material that vibrates in B(1,0,0), the fundamental harmonic of the B-mode of vibration, and C(1,0,0), the fundamental harmonic of the C-mode of vibration,wherein an aspect ratio (R/t) of the resonator imparts a frequency separation equal to or greater than 24 kHz between B(1,0,0) and C(1,4,0), an anharmonic of the C-mode of vibration, andwherein R is a radius of curvature of the resonator and t is a thickness of the resonator at the center. 2. The transducer according to claim 1, wherein the resonator is an SBTC-cut quartz piezoelectric resonator. 3. The transducer according to claim 1, wherein the resonator comprises a bi-convex resonator located in a radial plane of the housing such that the pressure transducer comprises an axi-symmetrical configuration. 4. The transducer according to claim 1, wherein: the housing is axi-symmetrical;the resonator is located in a radial plane within the housing; andthe peripheral portion is sandwiched between end caps of the housing. 5. The transducer according to claim 4, wherein the end caps are fusion bonded to the peripheral portion of the resonator. 6. The transducer according to claim 4, wherein the end caps are bonded to the peripheral portion of the resonator by metal-metal bonding. 7. The transducer according to claim 4, wherein the end caps are bonded to the peripheral portion of the resonator by glass sealant. 8. The transducer according to claim 4, wherein each end cap comprises at least one of an inner surface and an outer surface that is curved. 9. The transducer according to claim 4, further comprising a respective resonator electrode on an inner surface of each end cap such that the electrodes are not in contact with the resonator. 10. The transducer according to claim 9, wherein: each end cap has at least one aperture with wiring for electrical connection between the inner surface electrodes and corresponding external electrodes on outer surfaces of the end caps; andthe apertures are filled with sealant. 11. The transducer according to claim 1, wherein the resonator is a bi-convex resonator. 12. The transducer according to claim 1, wherein the resonator is a plano-convex resonator. 13. The transducer according to claim 1, wherein the resonator has different radii of curvature along two orthogonal axes thereof. 14. The transducer according to claim 1, wherein: the housing comprises a body section that is cylindrical in shape;at least one end cap at one end of the body section;the resonator is located in a radial plane of the housing within the body section. 15. The transducer according to claim 1, further comprising a pair of end caps at opposite ends of the body section; and each end cap having at least one surface that is hemispherically curved. 16. The transducer according to claim 1, wherein the resonator has different radii of curvature along two orthogonal axes thereof. 17. The transducer according to claim 1, wherein: the housing is axi-symmetrical;the resonator is located in a radial plane within the housing, the resonator comprising a peripheral portion sandwiched between end caps of the housing; andan inner surface of at least one end cap is contoured so as to be adjacent to a surface of the resonator. 18. The transducer according to claim 17, further comprising a bonding layer between the at least one end cap and the peripheral portion of the resonator, wherein the contoured inner surface of the at least one end cap is separated from the surface of the resonator with a constant gap that is equal to the thickness of the bonding layer. 19. The transducer according to claim 17, further comprising a bonding layer between the at least one end cap and the peripheral portion of the resonator, wherein the contoured inner surface of the at least one end cap is separated from the surface of the resonator with a gap that is greater than the thickness of the bonding layer. 20. The transducer according to claim 1, wherein: the housing is axi-symmetrical; andthe resonator is located in a radial plane within the housing, the resonator comprising a peripheral portion sandwiched between end caps of the housing and having a generally H-shape in cross section. 21. The transducer according to claim 1, further comprising: resonator electrodes configured or designed for inducing the fundamental harmonic of the B-mode of vibration and the fundamental harmonic of the C-mode of vibration in the resonator, whereinthe resonator electrodes are configured or designed to maximize the motional capacitance of at least the fundamental tone and to reduce the motional capacitance of unwanted anharmonics under a predetermined level. 22. The transducer according to claim 1, wherein the piezoelectric resonator comprises quartz crystal with a double rotation cut of angles φ(phi)=16.3 degrees, plus or minus 4 degrees, and θ(theta)=−34.5 degrees, plus or minus 4 degrees. 23. The transducer according to claim 1, wherein the piezoelectric resonator comprises quartz crystal with a double rotation cut of angles φ(phi)=1 degree, plus or minus 4 degrees, and θ(theta)=−23 degrees, plus or minus 4 degrees. 24. The transducer according to claim 1, wherein the piezoelectric resonator comprises quartz crystal with a double rotation cut of angles φ(phi)=13 degrees, plus or minus 4 degrees, and θ(theta)=−27.5 degrees, plus or minus 4 degrees. 25. The transducer according to claim 1, wherein the piezoelectric resonator comprises quartz crystal with a double rotation cut of angles φ(phi)=14.2 degrees, plus or minus 4 degrees, and θ(theta)=−degrees, plus or minus 4 degrees. 26. The pressure transducer of claim 1, wherein the frequency separation is equal to or greater than 43 kHz. 27. The pressure transducer of claim 1, wherein the aspect ratio (R/t) of the resonator imparts a frequency separation equal to or greater than 38 kHz between B(1,0,0) and C(1,0,2), an anharmonic of the C-mode of vibration. 28. A method comprising: assembling a pressure transducer comprising a housing and a piezoelectric resonator located in the housing, whereinthe resonator comprises double rotation cut piezoelectric quartz material that vibrates in B(1,0,0), the fundamental harmonic of the B-mode of vibration, and C(1,0,0), the fundamental harmonic of the C-mode of vibration; andselecting an aspect ratio (R/t) of the resonator that imparts a frequency separation equal to or greater than 24 kHz between B(1,0,0) and C(1,4,0), an anharmonic of the C-mode of vibration. 29. The pressure transducer according to claim 28, wherein the selecting an aspect ratio (R/t) of the resonator selects an aspect ratio (R/t) to control a quality factor (Q) defined as stored energy divided by dissipated energy. 30. A tool for pressure measurements comprising: a pressure transducer; anda temperature sensor disposed on or near an outer surface of the pressure transducer,wherein the transducer comprises an axi-symmetrical housing with end caps and a piezoelectric quartz resonator located in a radial plane within the housing,wherein the resonator comprises double rotation cut piezoelectric quartz material that vibrates in B(1,0,0), the fundamental harmonic of the B-mode of vibration, and C(1,0,0), the fundamental harmonic of the C-mode of vibration,wherein an aspect ratio (R/t) of the resonator imparts a frequency separation equal to or greater than 24 kHz between B(1,0,0) and C(1,4,0), an anharmonic of the C-mode of vibration, andwherein R is a radius of curvature of the resonator and t is a thickness of the resonator at the center. 31. A pressure transducer comprising: a housing, anda piezoelectric solid resonator located in the housing,wherein the resonator comprises double rotation cut piezoelectric quartz material that vibrates in B(1,0,0), the fundamental harmonic of the B-mode of vibration, and C(1,0,0), the fundamental harmonic of the C-mode of vibration,wherein an aspect ratio (R/t) of the resonator imparts a frequency separation equal to or greater than 38 kHz between B(1,0,0) and C(1,0,2), an anharmonic of the C-mode of vibration, andwherein R is a radius of curvature of the resonator and t is a thickness of the resonator at its center. 32. The pressure transducer of claim 31, wherein the frequency separation is equal to or greater than 55 kHz.
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이 특허에 인용된 특허 (14)
Sinha Bikash K. ; Niwa Masaru,JPX ; Matsumoto Noriyuki,JPX ; Sudo Yukio,JPX, Dual-mode thickness-shear quartz pressure sensors for high pressure and high temperature applications.
Berard Michel V. (Palaiseau FRX) Eisenmann Pierre (Paris FRX) Jinzaki Yoshinobu (Tokyo JPX) Dubourg Isabelle M. (Malakoff FRX), Method and apparatus for correcting a pressure measurement for the influence of temperature.
Totty Charles D. (Duncan OK) Dennis John R. (Duncan OK), Pressure transducer with quartz crystal of singly rotated cut for increased pressure and temperature operating range.
Wiggins Robert B. (Salt Lake City UT), Quartz thickness-shear mode resonator temperature-compensated pressure transducer with matching thermal time constants o.
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