초록 ▼

A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the

A differential pressure sensor includes two pressure ports for allowing media to pass into contact with both the top and bottom sides of the diaphragm. A silicon pressure sensor die can be attached between the pressure ports using die attach materials for sensing a differential pressure between the media to evaluate media differential pressure. A cap with an opening can be placed on topside of a diaphragm formed in the silicon pressure die. The silicon pressure die can include die bond pads that can be electrically connected to the diaphragm to output electrical signals. The cap can seal the die bond pads from the harsh media and route the electrical signals therein. Media can pass through the opening in the cap such that a media path to the top of the diaphragm is not exposed to the die bond pads of the silicon pressure die to ensure long-term sensor reliability.

대표청구항 ▼

1. A differential pressure sensor, comprising: a pressure sensor die having a pressure sensor with a sensing diaphragm, the pressure sensor die further having a first side and a second side with a plurality of die bond pads formed on the first side of the pressure sensor die;a cap including a top an

1. A differential pressure sensor, comprising: a pressure sensor die having a pressure sensor with a sensing diaphragm, the pressure sensor die further having a first side and a second side with a plurality of die bond pads formed on the first side of the pressure sensor die;a cap including a top and adapted to cover said pressure sensor and isolate said pressure sensor from said die bond pads, said cap having an opening formed in the top, wherein a measured media can pass through the opening in said cap and reach said diaphragm of said pressure sensor while the cap isolates the bond pads from the measured media; anda first port at least partially coupled to said cap, and a second port at least partially coupled to the second side of said pressure sensor die, wherein said first port and second port are configured to allow the measured media to contact said first side and said second side, respectively, of said diaphragm of said pressure sensor. 2. The differential pressure sensor of claim 1, further comprising piezoresistive elements doped on at least one side of said diaphragm. 3. The differential pressure sensor of claim 2, wherein said piezoresistive elements convert a differential pressure across the diaphragm into one or more electrical signals based on piezoresistive principles. 4. The differential pressure sensor of claim 2, wherein said die bond pads are electrically connected to said piezoresistive elements. 5. The differential pressure sensor of claim 1, wherein said cap is bonded to the first side of said pressure sensor die. 6. The differential pressure sensor of claim 1, wherein one or more die attach materials are interposed and used to attached said first and second ports to said cap and the second side of said pressure sensor die, respectively. 7. The differential pressure sensor of claim 1, wherein the measured media passes through said first port, through the opening in said cap and to the diaphragm, such that said die bond pads of the pressure sensor die are not exposed to the measured media path formed thereby. 8. The differential pressure sensor of claim 1, wherein said plurality of die bond pads are electrically connectable to provide output electrical signals from the differential pressure sensor. 9. The differential pressure sensor of claim 1, wherein said diaphragm comprises a thin silicon material. 10. The differential pressure sensor of claim 1, wherein said diaphragm is configured to become deformed in accordance with a pressure applied to the diaphragm by said measured media. 11. A differential pressure sensor, comprising: a pressure sensor die having a pressure sensor with a sensing diaphragm, the pressure sensor die further having a first side and a second side with a plurality of die bond pads formed on the first side, the diaphragm having one or more piezoresistive elements;a cap including a top and adapted to cover said pressure sensor and isolate said pressure sensor from said die bond pads, said cap bonded to the first side of said pressure sensor die over said diaphragm, said cap having an opening formed in the top, wherein said cap isolates said measured media from the bond pads of said pressure sensor die; anda first port at least partially stemming from said cap and a second port at least partially stemming from the second side of said pressure sensor die, wherein said first port and second port are configured to allow media to contact said first side and said second side of said diaphragm of said pressure sensor. 12. The differential pressure sensor of claim 11, wherein said cap is bonded to the first side of said pressure sensor die. 13. The differential pressure sensor of claim 11, wherein die attach materials are used to attached said first port to said cap and the second port to the second side of said pressure sensor die. 14. The differential pressure sensor of claim 11, wherein the measured media passes through said first port, through the opening in said cap and to said diaphragm, such that said die bond pads are not exposed to the measured media path formed thereby. 15. The differential pressure sensor of claim 11, wherein said plurality of die bond pads are electrically connectable to provide output electrical signals from the differential pressure sensor. 16. The differential pressure sensor of claim 11, wherein said diaphragm comprises a thin silicon material. 17. The differential pressure sensor of claim 11, wherein said diaphragm is configured to become deformed in accordance with a pressure applied by said measured media. 18. The differential pressure sensor of claim 11, wherein said piezoresistive elements convert the differential pressure into one or more electrical signals based on piezoresistive principles. 19. The differential pressure sensor of claim 11, wherein said die bond pads are electrically connected to said piezoresistive elements. 20. A differential pressure sensor, comprising: a silicon pressure sensor die having a silicon pressure sensor with a sensing diaphragm, the silicon pressure sensor die further having a first side and a second side with a plurality of die bond pads formed on the first side of said silicon pressure sensor die, the silicon pressure sensor configured to convert a differential pressure imposed by a measured media on the diaphragm into one or more electrical signals that are representative of the differential pressure;a cap including a top and adapted to cover said silicon pressure sensor and isolate said silicon pressure sensor from said die bond pads, said cap bonded to the first side of said silicon pressure sensor die over said diaphragm and having an opening formed in the top;a first port at least partially stemming from said cap, and a second port at least partially stemming from the second side of said silicon pressure sensor die, wherein said first port and second port are configured to allow the measured media to contact said first side and said second side of said diaphragm of said silicon pressure sensor; andwherein said measured media passes through the said first port, through the opening in the cap and to the diaphragm, such that said die bond pads are not exposed to the measured media path formed thereby. 21. The differential pressure sensor of claim 20, wherein said cap is bonded to the first side of said silicon pressure sensor die over said diaphragm. 22. The differential pressure sensor of claim 20, wherein die attach materials are used to attached said first port to said cap and the second port to the second side of said silicon pressure sensor die. 23. The differential pressure sensor of claim 20, wherein said plurality of die bond pads are electrically connectable to provide output electrical signals from the differential pressure sensor.