Coating method and coating unit
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0375267
(2007-07-05)
|
등록번호 |
US-8307778
(2012-11-13)
|
우선권정보 |
JP-2006-205053 (2006-07-27) |
국제출원번호 |
PCT/JP2007/063441
(2007-07-05)
|
§371/§102 date |
20090324
(20090324)
|
국제공개번호 |
WO2008/013035
(2008-01-31)
|
발명자
/ 주소 |
- Inamasu, Toshifumi
- Ikeda, Fumihiko
- Shinozaki, Kenya
- Otsuka, Yoshitaka
|
출원인 / 주소 |
|
대리인 / 주소 |
Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
5 |
초록
▼
Jet lines C1, C3, C5, . . . extending in an X-direction and suction lines C2, C4, C6, . . . extending in the X-direction are arranged alternately at a fixed pitch W in a Y-direction. Jet openings 88 are arranged at fixed intervals 3D on the jet lines C2n−1, suction openings 90 are arranged at fixed
Jet lines C1, C3, C5, . . . extending in an X-direction and suction lines C2, C4, C6, . . . extending in the X-direction are arranged alternately at a fixed pitch W in a Y-direction. Jet openings 88 are arranged at fixed intervals 3D on the jet lines C2n−1, suction openings 90 are arranged at fixed intervals 3D on the suction lines C2n, and the jet openings 88 and the suction openings 90 on the adjacent ones of the jet lines C2n−1 and the suction lines C2n are spaced apart from each other by a fixed distance D with respect to the X-direction. Slots 88a and 90a are extended straight from the upper ends of the jet openings 88 and the upper ends of the suction openings 90, respectively, in a carrying direction (the X-direction) and a direction opposite the carrying direction.
대표청구항
▼
1. A coating unit comprising: a stage having a first flotation area provided with many jet openings for jetting a gas and many suction openings for sucking the gas in an intermixed arrangement;substrate carrying mechanisms capable of moving a substrate floating above the stage in a predetermined car
1. A coating unit comprising: a stage having a first flotation area provided with many jet openings for jetting a gas and many suction openings for sucking the gas in an intermixed arrangement;substrate carrying mechanisms capable of moving a substrate floating above the stage in a predetermined carrying direction past the first flotation area;a process liquid supply unit including a nozzle disposed above the first flotation area and capable of making the nozzle discharge process liquid onto the substrate; andslots formed in the first flotation area in an upper surface of the stage so as to extend in a first direction parallel to or inclined at an acute angle to the carrying direction from upper ends of the jet openings or the suction openings,wherein both slots extending in the carrying direction from the upper ends of the jet or the suction openings and slots extending in a direction opposite the carrying direction from the upper ends of the jet or the suction openings are formed. 2. The coating unit according to claim 1, wherein the slots are extended from all the jet openings and all the suction openings. 3. The coating unit according to claim 1, wherein the jet and the suction openings are arranged alternately at first intervals on straight jet-and-suction lines extending in the first direction, and the jet-and-suction lines are arranged at second intervals in a second direction perpendicular to the first direction. 4. The coating unit according to claim 1, wherein the number of the jet and the suction openings on a straight line extending on the stage in a second direction perpendicular to the first direction is smaller than that of the jet and the suction openings arranged in a line in the second direction perpendicular to the first direction. 5. The coating unit according to claim 1 further comprising: a flotation pressure controller for controlling at least either of pressure of the gas jetted through the jet openings and a vacuum in the suction openings for variable height control of a floating height of the substrate at a position directly below a discharge opening of the nozzle. 6. The coating unit according to claim 1, wherein the stage has a second flotation area on the upstream side of the first flotation area with respect to the carrying direction. 7. The coating unit according to claim 1, wherein the stage has a third flotation area on the downstream side of the first flotation area with respect to the carrying direction. 8. A coating unit comprising: a stage having a first flotation area provided with many jet openings for jetting a gas and many suction openings for sucking the gas in an intermixed arrangement;substrate carrying mechanisms capable of moving a substrate floating above the stage in a predetermined carrying direction past the first flotation area;a process liquid supply unit including a nozzle disposed above the first flotation area and capable of making the nozzle discharge process liquid onto the substrate; andslots formed in the first flotation area in an upper surface of the stage so as to extend in a first direction parallel to or inclined at an acute angle to the carrying direction from upper ends of the jet openings or the suction openings,wherein the slots have the greatest depth at the upper end of the jet or the suction opening and has a bottom sloping up from the upper end of the jet or the suction opening toward a free end thereof. 9. The coating unit according to claim 8, wherein the slots are extended from all the jet openings and all the suction openings. 10. The coating unit according to claim 8, wherein the jet and the suction openings are arranged alternately at first intervals on straight jet-and-suction lines extending in the first direction, and the jet-and-suction lines are arranged at second intervals in a second direction perpendicular to the first direction. 11. The coating unit according to claim 8, wherein the number of the jet and the suction openings on a straight line extending on the stage in a second direction perpendicular to the first direction is smaller than that of the jet and the suction openings arranged in a line in the second direction perpendicular to the first direction. 12. The coating unit according to claim 8 further comprising: a flotation pressure controller for controlling at least either of pressure of the gas jetted through the jet openings and a vacuum in the suction openings for variable height control of a floating height of the substrate at a position directly below a discharge opening of the nozzle. 13. The coating unit according to claim 8, wherein the stage has a second flotation area on the upstream side of the first flotation area with respect to the carrying direction. 14. The coating unit according to claim 8, wherein the stage has a third flotation area on the downstream side of the first flotation area with respect to the carrying direction. 15. A coating unit comprising: a stage having a first flotation area provided with many jet openings for jetting a gas and many suction openings for sucking the gas in an intermixed arrangement;substrate carrying mechanisms capable of moving a substrate floating above the stage in a predetermined carrying direction past the first flotation area;a process liquid supply unit including a nozzle disposed above the first flotation area and capable of making the nozzle discharge process liquid onto the substrate; andslots formed in the first flotation area in an upper surface of the stage so as to extend in a first direction parallel to or inclined at an acute angle to the carrying direction from upper ends of the jet openings or the suction openings,wherein the jet openings are arranged at first intervals on straight jet lines extending in the first direction and arranged at first pitches in a second direction perpendicular to the first direction,the suction openings are arranged at second intervals on straight suction lines extending in the first direction and arranged at second pitches in a second direction, andthe jet lines and the suction lines are separated from each other. 16. The coating unit according to claim 15, wherein the slots are extended from all the jet openings and all the suction openings. 17. The coating unit according to claim 15, wherein the number of the jet and the suction openings on a straight line extending on the stage in the second direction perpendicular to the first direction is smaller than that of the jet and the suction openings arranged in a line in the second direction perpendicular to the first direction. 18. The coating unit according to claim 15 further comprising: a flotation pressure controller for controlling at least either of pressure of the gas jetted through the jet openings and a vacuum in the suction openings for variable height control of a floating height of the substrate at a position directly below a discharge opening of the nozzle. 19. The coating unit according to claim 15, wherein the stage has a second flotation area on the upstream side of the first flotation area with respect to the carrying direction. 20. The coating unit according to claim 15, wherein the stage has a third flotation area on the downstream side of the first flotation area with respect to the carrying direction.
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Bergman Raymond A. (107 E. Second St. Minster OH 45865), Air float fixture clamping system.
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Goodman, Matt G.; Stoutyesdijk, Jereon; Aggarwal, Ravinder; Halpin, Mike; Keeton, Tony; Hawkins, Mark; Haen, Lee; Ferro, Armand; Brabant, Paul; Vyne, Robert; Bartlett, Gregory M.; Italiano, Joseph P.; Haro, Bob, Substrate support system for reduced autodoping and backside deposition.
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Ekhoff, Donald L., Workpiece levitation using alternating positive and negative pressure flows.
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