IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0874624
(2010-09-02)
|
등록번호 |
US-8307783
(2012-11-13)
|
우선권정보 |
CH-0788/05 (2005-05-04) |
발명자
/ 주소 |
- Massler, Orlaw
- Eberle, Hubert
- Gschwend, Patrick
|
출원인 / 주소 |
- Oerlikon Trading AG, Truebbach
|
대리인 / 주소 |
Notaro, Michalos & Zaccaria P.C.
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
3 |
초록
▼
Vacuum treatment installation particularly for plasma coating workpieces, has an arrangement for boosting and/or igniting a glow discharge plasma for the treatment of workpieces, and at least one hollow body of electrically conductive material, the hollow body including a hollow space and at least o
Vacuum treatment installation particularly for plasma coating workpieces, has an arrangement for boosting and/or igniting a glow discharge plasma for the treatment of workpieces, and at least one hollow body of electrically conductive material, the hollow body including a hollow space and at least one entrance opening through which charge carriers flow in order to make possible ignition and operation of a plasma or to boost an existing plasma. The hollow body is electrically connected to workpieces so that the hollow body is essentially at workpiece potential. The hollow space is formed such that when an electric signal is applied to the hollow body, at least in a certain pressure and voltage range, geometric conditions for the ignition of a discharge in the interior of the hollow body are satisfied, and the at least one hollow body is not a workpiece carrier.
대표청구항
▼
1. A vacuum treatment installation for plasma treatment, in particular for the plasma coating of workpieces, comprising at least one arrangement for boosting and/or igniting a glow discharge plasma for the treatment of said workpieces, said arrangement comprising at least one hollow body of an elect
1. A vacuum treatment installation for plasma treatment, in particular for the plasma coating of workpieces, comprising at least one arrangement for boosting and/or igniting a glow discharge plasma for the treatment of said workpieces, said arrangement comprising at least one hollow body of an electrically conductive material, the hollow body comprising a hollow space, wherein a plurality of receptions for workpieces are provided exterior to the hollow space of the hollow body and along an annular surface, wherein the hollow body is essentially at workpiece potential, and wherein the hollow space of the hollow body is formed such that when an electric signal is applied to the hollow body, at least in a certain pressure and voltage range, geometric conditions for the ignition of a discharge in the interior of the hollow body are satisfied. 2. The vacuum treatment installation as claimed in claim 1, furthermore comprising a second arrangement for boosting and/or igniting a glow discharge plasma for the treatment said workpieces, said second arrangement comprising at least one second hollow body of an electrically conductive material, the second hollow body comprising a second hollow space and at least one opening through which charge carriers can flow off into environs of the second arrangement in order to make here possible ignition and operation of a plasma or to boost a plasma existing here, wherein the second arrangement comprises means which connect the second hollow body electrically with said workpieces such that the second hollow body is substantially at workpiece potential of the further workpieces as well, and wherein the second hollow space is formed such that when an electric signal is applied to the second hollow body, at least in a selected pressure and voltage range, geometric conditions for the ignition of a discharge in the interior of the second hollow body are satisfied, and wherein the second hollow body is a workpiece carrier. 3. The vacuum treatment installation as claimed in claim 2, the hollow space of said hollow body having a cross section with at least one geometrical characteristic parameter d′ decisive for said conditions and having the form of at least one of the geometries selected from a circle, an ellipse and a polygon, and a form composed of different of said geometries, and the second hollow body having a cross section with at least one geometrical characteristic parameter d″ decisive for said conditions and having the form of at least one of the geometries selected from a circle, an ellipse and a polygon, and a form composed of different of these geometries, and wherein the at least one geometrical characteristic parameter d′ is smaller than the at least one geometrical characteristic parameter d″. 4. The vacuum treatment installation as claimed in claim 1, wherein the hollow body is mounted on a carousel. 5. The vacuum treatment installation as claimed in claim 1, wherein said at least one workpiece carrier is mounted on a carousel. 6. The vacuum treatment installation as claimed in claim 1, comprising a vacuum chamber comprising a chamber bottom and a chamber cover, wherein said at least one arrangement is mounted to one of said chamber bottom and of said chamber cover. 7. The vacuum treatment installation as claimed in claim 1, wherein the geometric conditions are satisfied for a pressure range between 1×10−3 and 5×10−2 mbar. 8. The vacuum treatment installation as claimed in claim 1, wherein the geometric conditions are satisfied for a pressure range between 4×10−3 and 2×10−2 mbar. 9. The vacuum treatment installation as claimed in claim 1, wherein the electric signal is a DC voltage or an AC voltage. 10. The vacuum treatment installation as claimed in claim 1, wherein the electric signal is a bipolar or unipolar pulsed AC voltage signal in a medium frequency range. 11. The vacuum treatment installation as claimed in claim 1, wherein the geometric conditions for an electric signal are satisfied with a voltage range between 200 and 2000 V. 12. The vacuum treatment installation as claimed in claim 1, wherein the geometric conditions for an electric signal are satisfied with a voltage range between 400 and 1200 V. 13. The vacuum treatment installation as claimed in claim 1, wherein the hollow body has at least one of a top-opening and of a bottom-opening, said at least one opening being covered with a grid. 14. The vacuum treatment installation as claimed in claim 13, wherein a distance d′ is less or equal to the twofold, however greater or equal to the simple cathode drop distance in a certain pressure and voltage range. 15. The vacuum treatment installation as claimed in claim 1, said hollow space being within a lateral surface having a plurality of through openings. 16. The vacuum treatment installation as claimed in claim 15, wherein said through-openings comprises at least one of at least a part of said surface being a surface of a grid and of at least a part of said surface being realized by mutually distant rods. 17. The vacuum treatment installation as claimed in claim 1, the hollow body having a hollow space with a cross-sectional distance decisive for said conditions d′ and having the form of a circle, an ellipse or a polygon or a form composed of different of these geometries, wherein said distance d′ is one of between 20 to 200 mm and of between 60 and 100 mm. 18. The vacuum treatment installation as claimed in claim 1, wherein the hollow body comprises several circular, elliptical or polygonal annuli or annuli of combined geometries, disposed one above the other, wherein the annuli are disposed at a mutual distance a, which is sufficiently small to avoid the ignition of a discharge between the annuli. 19. The vacuum treatment installation as claimed in claim 18, wherein the distance a is smaller than the cathode drop distance in said certain pressure and voltage range. 20. The vacuum treatment installation as claimed in claim 19, wherein the distance a is one of between 1 and 60 mm and of between 5 and 25 mm. 21. The vacuum treatment installation as claimed in claim 1, wherein at least one plasma booster is disposed on a carousel.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.