$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Liner-based liquid storage and dispensing systems with empty detection capability

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B67C-003/00
출원번호 US-0912613 (2006-04-25)
등록번호 US-8322571 (2012-12-04)
국제출원번호 PCT/US2006/015964 (2006-04-25)
§371/§102 date 20090903 (20090903)
국제공개번호 WO2006/116572 (2006-11-02)
발명자 / 주소
  • Hovinen, Minna
  • Kingery, John R.
  • Tom, Glenn M.
  • O'Dougherty, Kevin T.
  • Mikkelsen, Kirk
  • Ware, Donald D.
  • Van Buskirk, Peter C.
출원인 / 주소
  • Advanced Technology Materials, Inc.
대리인 / 주소
    Gustafson, Vincent K.
인용정보 피인용 횟수 : 19  인용 특허 : 27

초록

Fluid supply systems for storage and dispensing of chemical reagents and compositions, e.g., high purity liquid reagents and chemical mechanical polishing compositions used to manufacture microelectronic device products, having capability for detection of an empty or near-empty condition when the co

대표청구항

1. A liner package dispensing system comprising: a vessel having an interior volume;a liner in said interior volume, arranged to contain a liquid medium subject to being overlaid by head space gas;a reservoir arranged to receive liquid medium from the liner to define a liquid medium level in or abov

이 특허에 인용된 특허 (27)

  1. Soon Chye Chan MY; Bak Hong Chia SG; Chun Pheng Tan SG, Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool.
  2. Kelly,Wayne; Chilcote,Dennis, Apparatus and method for minimizing the generation of particles in ultrapure liquids.
  3. Geatz Tobin (Durham NC), Apparatus and method for the transfer and delivery of high purity chemicals.
  4. Spears James Richard (Bloomfield Hills MI) Crilly Richard James (Wondsor CAX), Apparatus and method of delivery of gas-supersaturated solutions to a delivery site.
  5. Marinaro, Vincent; Wakamiya, Ted; Peffer, Gerry, Apparatus to reduce wasting of unused photoresist in semiconductor containers.
  6. Blatt, Christopher S.; Pearce, Richard H.; Williams, Graham; Wentworth, III, Edward H., Automatic refill system for ultra pure or contamination sensitive chemicals.
  7. Horino Morikatsu,JPX ; Kage Tsuyoshi,JPX ; Takahashi Yutaka,JPX ; Shimomi Akira,JPX, Bag for bag-in-box.
  8. Lang-Ree Arne (Manhattan Beach CA) Apps William P. (Anaheim CA) Ackermann Jeff (Manhattan Beach CA), Bag-in box with split lid.
  9. Gregg John N. ; Noah Craig M. ; Jackson Robert M., Chemical delivery system having purge system utilizing multiple purge techniques.
  10. Haskew, James W., Delivery system for liquid catalysts.
  11. Clark, Alisdair Quentin; Read, Harry, Dispenser and method of use.
  12. Chen Yung-Dar,TWX, Eliminating microbubbles in developer solutions to reduce photoresist residues.
  13. Sund,Wesley E.; Dille,Joseph C.; Barger,Michael J.; Pawlas,Gary E., High purity fluid delivery system.
  14. Siegele Stephen H. ; Noah Craig M. ; Gregg John N., Level control systems for high purity chemical delivery systems.
  15. Osgar Michael L. (Eagan MN), Liquid chemical container and dispensing system.
  16. Osgar Michael L. ; O'Dougherty Kevin T., Liquid chemical dispensing system with pressurization.
  17. O'Dougherty,Kevin T., Liquid dispensing system.
  18. Lan Ho-Ku,TWX ; Kuo Chen-Cheng,TWX ; Chen Hung-Chih,TWX ; Chen Shih-Shiung,TWX, Liquid dispensing system and method for dispensing.
  19. Bjorn Liedtke DE, Method and device for dispensing a fluid from a pressure tank.
  20. Xu Mindi ; Vigor Xavier, Methods and systems for distributing liquid chemicals.
  21. Bernosky Eugene W. (San Jose CA) Geatz J. Tobin (Durham NC) Ferri ; Jr. Edward T. (Gilroy CA) Roberson ; Jr. Glenn A. (Hollister CA), Process and apparatus for precise volumetric diluting/mixing of chemicals.
  22. Bouchard Fred, Reagent supply vessel for chemical vapor deposition.
  23. Siegele Stephen H. ; Noah Craig M. ; Gregg John N., Refillable ampule and method re same.
  24. Wertenberger, Richard, Returnable and reusable, bag-in-drum fluid storage and dispensing container system.
  25. Johnson David S. (R.D. #1 Box 104A Howard PA 16841), Reusable container dispenser for ultra high purity chemicals and method of storage.
  26. Vallot Bernard,FRX, Sachets for bio-pharmaceutical fluid products.
  27. Runyon Robert R. (9789 Evenson Cir. South Jordan UT 84065) Mabey Kent W. (West Jordan UT), System and method for automatically selecting one of a plurality of liquid supply receptacles as a source for a liquid d.

이 특허를 인용한 특허 (19)

  1. Veltrop, Loren; Lyons, Christopher, Apparatus and method for dispensing liquids using a table to determine dispense time.
  2. Veltrop, Loren; Lyons, Christoper, Apparatus and method for dispensing user-specified fixed volumes of liquids.
  3. Ophardt, Heiner; House, Edward; Tezcan, Cuneyt; Stan, Dusan, Fluid level gauge.
  4. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  5. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  6. Jones, Glyn, Gas recovery systems for beverage dispensing.
  7. Veltrop, Loren; Lyons, Christopher; Graef, Michael A., Holding tank with internally reinforced sidewalls and liquid dispenser using same.
  8. Dubois, Lawrence H.; Ware, Donald, Liner-based dispenser.
  9. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  10. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  11. Ware, Donald D.; Tom, Glenn M.; Dathe, Paul; Koland, Amy; Gerold, Jason; Mikkelsen, Kirk; O'Dougherty, Kevin T.; Cisewski, Michael A., Liquid dispensing systems encompassing gas removal.
  12. Ismail, Husam; Dobizl, Kenneth Thomas; Holzman, Louis Mark; Sharpe, Sonya Shailesh; Kahlhamer, Jason Andrew; Zurbey, Matthew Frank, Liquid out-of-product alarm system and method.
  13. Tom, Glenn; Nelson, Greg; Liu, Wei; Koland, Amy; Ware, Don; Durham, Daniel J.; Momany, Tracy M.; Roush, Chantel, Nested blow molded liner and overpack and methods of making same.
  14. George, Gino; Koh, KeenYip; Lee, CheeChiang; Adnan, Ditto, Photoresist delivery system including control valve and associated methods.
  15. Veltrop, Loren; Lyons, Christopher, Pinch valve for dispenser for liquids.
  16. Tix, Joseph E.; McCormick, Martin P.; Lange, Christopher M., Plural component ratio monitoring and control.
  17. Ando, Ryoji; Satoh, Takami, Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium.
  18. Ando, Ryoji; Satoh, Takami, Solution processing apparatus, solution processing method, and non-transitory computer-readable recording medium.
  19. Tom, Glenn; Baum, Thomas H.; Kusz, Matthew; Menning, Joseph; Nelson, Greg; Lee, Dongyun; Liu, Wei; Kim, Kanghyun; Boggs, Karl; Chism, Richard, Substantially rigid collapsible liner and flexible gusseted or non-gusseted liners and methods of manufacturing the same and methods for limiting choke-off in liners.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트