IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0382459
(2009-03-17)
|
등록번호 |
US-8323733
(2012-12-04)
|
우선권정보 |
FR-08 01922 (2008-04-08) |
발명자
/ 주소 |
- Coiffic, Jean-Christophe
- Rivoire, Maurice
|
출원인 / 주소 |
- Commisariat a l'Energie Atomique
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
5 |
초록
▼
A surface of a support comprising through micropassages is brought into contact with an aqueous solution comprising a plurality of particles in suspension and a pad. A pressure perpendicular to the plane of the support, between the pad and the surface of the support, and a relative movement of the p
A surface of a support comprising through micropassages is brought into contact with an aqueous solution comprising a plurality of particles in suspension and a pad. A pressure perpendicular to the plane of the support, between the pad and the surface of the support, and a relative movement of the pad and of the surface in a direction parallel to the plane of the support are applied. At least one particle is thus introduced in each microgap to form a porous material therein.
대표청구항
▼
1. A method for forming a porous membrane successively comprising: forming, in an impermeable support between first and second main surfaces, at least one micropassage that passes through the support,bringing the first main surface into contact with an aqueous solution comprising a plurality of part
1. A method for forming a porous membrane successively comprising: forming, in an impermeable support between first and second main surfaces, at least one micropassage that passes through the support,bringing the first main surface into contact with an aqueous solution comprising a plurality of particles in suspension, andsimultaneously applying a pressure between a pad and said first surface, and relative rotating movement of the pad and of said first surface so as to perform chemical mechanical polishing and to introduce at least one particle forming a porous material into each micropassage, the pad moving in rotation in a plane parallel to a plane defined by the first main surface. 2. The method according to claim 1, wherein the second main surface of the support is covered by an impermeable support layer, said support layer being eliminated at least at the level of the micropassages after the micropassages have been filled by the porous material. 3. The method according to claim 1, wherein the second main surface of the support is covered by a permeable support layer. 4. The method according to claim 1, wherein the porosity of the material filling the micropassage is comprised between 26% and 50%. 5. The method according to claim 1, wherein the particles being spherical, they have a diameter of less than two thirds of the smallest dimension of the micropassage . 6. The method according to claim 1, wherein the diameter of the particles is comprised between 3 and 300 nm. 7. The method according to claim 1, wherein the particles are chosen from silica, carbon, cerium oxide, titanium oxide, iron, cobalt, gold, platinum, palladium, nickel, ruthenium, tin, molybdenum, zinc oxide, cerium, alumina and polymer materials or compounds. 8. The method according to claim 1, wherein the mass percentage of particles in the aqueous solution is comprised between 0.0001 and 50%. 9. The method according to claim 1, wherein the pressure exerted is comprised between 0.02 daN/cm2 and 1 daN/cm2. 10. The method according to claim 1, wherein a support layer is deposited on said first surface of the support before formation of the micropassages. 11. The method according to claim 9, wherein the support layer is made from silicon nitride. 12. The method according to claim 1, wherein at least a part of the particles are made from catalyst material. 13. The method according to claim 1, wherein a proton-conducting permeable layer is formed on at least one of the main surfaces after the micropassages have been filled. 14. The method according to 13, wherein the permeable layer is chosen from polybenzimidalones, sulfonated polyether-etherketones, and sulfonated polyimides. 15. A method for forming a porous membrane successively comprising: providing an impermeable support with opposite first and second main surfaces, the first main surface being flat;forming, in the impermeable support, at least one micropassage that passes through the impermeable support and connects the first and the second main surfaces;bringing the first main surface into contact with an aqueous solution comprising a plurality of particles in suspension; andsimultaneously applying a pressure between a pad and the first surface, and relative rotating movement of the pad and of the first surface so as to perform chemical mechanical polishing and to introduce a plurality of particles into each micropassage from the first main surface to the second main surface so as to form a porous material filling, the pad moving in rotation in a plane parallel to a plane defined by the first main surface. 16. The method according to claim 15, wherein the second main surface of the support is covered by a support layer, the plurality of particles being compressed between the pad and the support layer. 17. A method for forming a porous membrane successively comprising: providing a support comprising first and second opposite main surfaces, the first and second main surfaces comprising first and second complementary portions, the first portion being made of an impermeable support, the second portion being a micropassage passing through the impermeable support, the first and the second main surfaces being flat;bringing the first main surface into contact with an aqueous solution comprising a plurality of particles in suspension; andsimultaneously applying a pressure between a pad and the first surface, and relative rotating movement of the pad and of the first surface so as to perform chemical mechanical polishing and to introduce a plurality of particles into each micropassage and form a porous material into each micropassage, the pad moving in rotation in a plane parallel to a plane defined by the first main surface.
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