Method for testing group III-nitride wafers and group III-nitride wafers with test data
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C30B-023/00
C30B-025/00
C30B-028/12
C30B-028/14
출원번호
US-0456181
(2009-06-12)
등록번호
US-8357243
(2013-01-22)
발명자
/ 주소
Hashimoto, Tadao
Ikari, Masanori
Letts, Edward
출원인 / 주소
Sixpoint Materials, Inc.
인용정보
피인용 횟수 :
8인용 특허 :
17
초록▼
The present invention discloses a new testing method of group III-nitride wafers. By utilizing the ammonothermal method, GaN or other Group III-nitride wafers can be obtained by slicing the bulk GaN ingots. Since these wafers originate from the same ingot, these wafers have similar properties/qualit
The present invention discloses a new testing method of group III-nitride wafers. By utilizing the ammonothermal method, GaN or other Group III-nitride wafers can be obtained by slicing the bulk GaN ingots. Since these wafers originate from the same ingot, these wafers have similar properties/qualities. Therefore, properties of wafers sliced from an ingot can be estimated from measurement data obtained from selected number of wafers sliced from the same ingot or an ingot before slicing. These estimated properties can be used for product certificate of untested wafers. This scheme can reduce a significant amount of time, labor and cost related to quality control.
대표청구항▼
1. A method of testing a first set of group III-nitride substrates cut from an ingot formed using a seed material, said method comprising a) selecting substrates from the first set of substrates to form a second set of substrates, the second set of substrates being a subset of the first set and ther
1. A method of testing a first set of group III-nitride substrates cut from an ingot formed using a seed material, said method comprising a) selecting substrates from the first set of substrates to form a second set of substrates, the second set of substrates being a subset of the first set and therefore being a selection of substrates from the first set of substrates that does not include all members from the first set of substrates,b) analyzing samples taken from the substrates of the second set to assess values of a first property of each of the substrates of the second set,c) determining a correlation for the values of the first property, said correlation being a function of distance of each of said substrates of the second set from a seed used to form the ingot, andd) applying said correlation to substrates not in said second set of substrates to provide estimated values of said first property for said substrates, whereine) the ingot was produced using an ammonothermal process, whereinf) the testing is carried out on at least one of the crystallographic planes selected from Group III-polar side c plane, nitride-polar side c plane, m plane, or {101} plane, and whereing) the substrate is cut at an angle to the crystallographic plane. 2. A method according to claim 1 wherein the substrates of the first set each have a group III-polar face and a nitride polar face. 3. A method according to claim 1 wherein the angle is about 5-10degrees. 4. A method according to claim 1 wherein the group III-nitride substrates are GaN substrates. 5. A method according to claim 1 wherein the act of analyzing samples taken from the substrates of the second set comprises at least one analytical technique selected from the group consisting of X-ray analysis, X-ray diffraction analysis, electron beam analysis, photo luminescence or cathode luminescence, secondary ion mass spectroscopy, Hall measurement, capacitance-voltage measurement, and laser light-assisted analysis. 6. A method according to claim 1 wherein said second set includes at least one outer-most substrate from the ingot. 7. A method according to claim 6 wherein the second set includes at least one wafer from the ingot. 8. A method according to claim 6 wherein said second set consists of at least one outer-most substrate of the original bulk crystal. 9. A method according to claim 8 wherein said second set consists of both outer-most substrates of the original bulk crystal. 10. A method according to claim 6 wherein the outer-most substrate is not a wafer. 11. A method according to claim 1 wherein the act of determining the correlation additionally includes a value of the first property for the seed material. 12. A method of testing a first set of group III-nitride substrates cut from an ingot formed using a seed material, said method comprising a) selecting substrates from the first set of substrates to form a second set of substrates, the second set of substrates being a subset of the first set and therefore being a selection of substrates from the first set of substrates that does not include all members from the first set of substrates,b) analyzing samples taken from the substrates of the second set to assess values of a first property of each of the substrates of the second set,c) determining a correlation for the values of the first property, said correlation being a function of distance of each of said substrates of the second set from a seed used to form the ingot,d) comparing said correlation against a value of said property for the seed material to assess whether said value of the property for the seed material can be used as an estimate of the property for wafers cut from the ingot, ande) providing said value of the property for the seed material as the value of the property for said wafers, whereinf) the ingot was produced using an ammonothermal process, whereing) the testing is carried out on at least one of the crystallographic planes selected from Group III-polar side c plane, nitride-polar side c plane, m plane, or {101} plane, and whereinh) the substrate is cut at an angle to the crystallographic plane. 13. A method according to claim 12 wherein the substrates of the first set each have a group III-polar face and a nitride polar face. 14. A method according to claim 12 wherein the angle is about 5-10 degrees. 15. A method according to claim 12 wherein the group III-nitride substrates are GaN substrates. 16. A method according to claim 12 wherein the act of analyzing samples taken from the substrates of the second set comprises at least one analytical technique selected from the group consisting of X-ray analysis, X-ray diffraction analysis, electron beam analysis, photo luminescence or cathode luminescence, secondary ion mass spectroscopy, Hall measurement, capacitance-voltage measurement, and laser light-assisted analysis. 17. A method according to claim 12 wherein said second set includes at least one outer-most substrate from the ingot. 18. A method according to claim 17 wherein the second set includes at least one wafer from the ingot. 19. A method according to claim 17 wherein said second set consists of at least one outer-most substrate of the new bulk crystal. 20. A method according to claim 19 wherein said second set consists of both outer-most substrates of the new bulk crystal. 21. A method according to claim 17 wherein the outer-most substrate is not a wafer. 22. A method according to claim 12 wherein the act of determining the correlation additionally includes a value of the first property for the seed material. 23. A method according to claim 1 and further comprising providing a set of said substrates with representative test data taken from the ingot. 24. A method according to claim 2 and further comprising providing a set of said substrates with representative test data taken from the ingot. 25. A method according to claim 4 and further comprising providing a set of said substrates with representative test data taken from the ingot. 26. A method according to claim 11 and further comprising providing a set of said substrates with representative test data taken from the ingot. 27. A method according to claim 12 and further comprising providing a set of said substrates with representative test data taken from the ingot. 28. A method according to claim 13 and further comprising providing a set of said substrates with representative test data taken from the ingot. 29. A method according to claim 15 and further comprising providing a set of said substrates with representative test data taken from the ingot. 30. A method according to claim 22 and further comprising providing a set of said substrates with representative test data taken from the ingot.
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