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Unit type clean room 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01L-001/04
출원번호 US-0646147 (2009-12-23)
등록번호 US-8371912 (2013-02-12)
우선권정보 JP-2007-166678 (2007-06-25)
발명자 / 주소
  • Ozeki, Kazuhiro
출원인 / 주소
  • Unitec Inc.
인용정보 피인용 횟수 : 4  인용 특허 : 39

초록

A unit type clean room has a wide operation space while providing a high air cleaning effect, is unitized and can be easily installed. The unit type clean room is characterized by including: a machine room unit; a front room unit; and a clean room unit, wherein an air conditioner and a fixed air vol

대표청구항

1. A unit type clean room, comprising: a machine room unit having flooring, a front panel standing on said flooring and provided with an air inlet for intake of air to be fed into the clean room, a boundary panel located on a side adjacent to a front room and including a power board and a control bo

이 특허에 인용된 특허 (39)

  1. Kim,Jong Ok, Air cleaning system for semiconductor manufacturing equipment.
  2. Mattson Brian (Boise ID), Air shower with directed air flow.
  3. Kuo,Po Sung; Chen,Yung Dar; Chou,Jheng Long; Wu,Tung Li; Huang,Ming Wen, Air supply systems and pressure adjustment devices for use therewith.
  4. Ziemer, Wolf; Holle, Wilhelm, Ceiling construction for clean rooms.
  5. Burge Byron, Ceiling mounted air filtration system.
  6. Woods Robert L., Chemical washing system including a chemical dispensing system and suitable for use within a semiconductor fabrication clean room.
  7. Spengler, Charles W., Clean air room with a blower including a HEPA filter and ducts.
  8. Renz Manfred,DEX, Clean room.
  9. Yamagata Taizo (Chuo JPX) Uchikawa Takaaki (Chuo JPX) Yamamoto Shinichi (Chuo JPX) Tomikawa Shinichiro (Chuo JPX) Ogasahara Yoshio (Chuo JPX) Sukagawa Masaru (Chuo JPX), Clean room.
  10. Kleinsek Don A. (W5036N CTH A Elkhart Lake WI 53020), Clean room and clean room containment center.
  11. Nakagawa, Toshiaki, Clean room for semiconductor device.
  12. Nagafune Hitoshi,JPX ; Fukumoto Takaaki,JPX ; Shibuya Hakushi,JPX ; Ezaki Koji,JPX, Clean room having an air conditioning system.
  13. MacDonald Ross P. (2630 NW. Robinia La. Portland OR 97229), Clean room including an internal partition system.
  14. Wetzel Lawrence E. (3590 Watervale Rd. Manlius NY 13104), Clean room module.
  15. Hashimoto Takayoshi (Kanagawa JPX), Clean room system.
  16. Ohmura,Shiro; Ohmura,Yoshihito; Hirobe,Hideaki; Imura,Takehiko, Clean room unit.
  17. Masahiko Minoshima JP, Cleanroom and cleanroom ventilation method.
  18. Daw Terry L. (Salt Lake City UT), Cleanroom structure.
  19. Suenaga, Osamu; Kobayashi, Sadao, Device and method for feeding treating air.
  20. Suwa Nobuyuki,JPX, Fan filter unit and a clean room for using the same.
  21. Jackson, Mark, Integrated machining module for processing workpieces and a method of assembling the same.
  22. Demster, Stanley J., Isolation damper with proofing.
  23. Agne Nilsson SE, Method and device for ventilating a so called clean room.
  24. Woo-dong Sung KR; Sam-soon Han KR; Chang-wook Oh KR; Kang-sik Lee KR, Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area.
  25. Jingu, Takahiro; Miyazaki, Yusuke; Zama, Kazuhiro, Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space.
  26. Henry, Charles E.; Noya, George J.; Faure, Luis E.; Heyl, Monica J.; Reutter, Dennis J., Mobile all hazards receipt facility/analytical laboratory.
  27. Aulson Alan P. (201 Pond St. Georgetown MA 01833), Mobile deleading unit.
  28. Aulson Alan P. (201 Pond St. Georgetown MA 01833), Mobile deleading unit.
  29. Burleson Maurice L. (8003 Woodglen Cir. La Palma CA 90623), Modular clean room.
  30. Austin Frank X. (Plymouth MI), Modular clean room structure.
  31. Dennis J. Gallant, Modular patient room.
  32. Brennan Eric L. (1331 Willow St. San Diego CA 92653) Rivero Arnold E. (24922 Oxford Dr. Laguna Niguel CA 92677) Bohn William S. (25652 Nottingham Ct. Laguna Hills CA 92653) Pfeiffer Jean (9463 Grackl, Modular pharmacy system and pharmacy process.
  33. Woo Sik Yoo ; Taro Yamazaki, Portable enclosure for semiconductor processing.
  34. Fortney Roger (6421 Keelson Dr. Madison WI 53705), Positive environmental enclosure.
  35. Davis George B. (Frederick MD) Irving Robert W. (Boonsboro MD), Prefabricated knockdown clean room.
  36. Endo, Mitsushi; Taniguchi, Toshiaki; Sahara, Teruyoshi; Hayakawa, Noriyuki; Yoshitomi, Tatsuo; Takahashi, Kozo; Nagatani, Yoshiteru; Kawai, Hidenao; Kaizyo, Shuichi; Nakagawa, Yoichi; Yamagami, Kazuo, Rearrangeable partial environmental control device.
  37. Vacek,Sam S., System and method for inhibiting moisture and mold in an outer wall of a structure.
  38. Weidner,Samuel, System and method for protection/isolation against infections.
  39. Austin Frank X. (Plymouth MI), Washable seamless clean room.

이 특허를 인용한 특허 (4)

  1. Jornitz, Maik Wolfgang, Method for connecting modular mobile rooms.
  2. Holtz, R. Barry; Arledge, Troy; Maples, Philip B.; Shanahan, David M., Modular, self-contained, mobile clean room.
  3. Holtz, R. Barry; Arledge, Troy; Maples, Phillip B.; Shanahan, David M., Modular, self-contained, mobile clean room.
  4. Holtz, R. Barry; Arledge, Troy; Maples, Phillip B.; Shanahan, David M., Modular, self-contained, mobile clean room.
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