[특허]System and method for miniaturization of synthetic jets

General Electric Company

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특허 상세정보

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System and method for miniaturization of synthetic jets

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B05B-001/08
미국특허분류(USC)	239/102.2; 361/692; 361/697
출원번호	US-0198267 (2008-08-26)
등록번호	US-8418934 (2013-04-16)
발명자 / 주소	Arik, Mehmet Weaver, Stanton Earl
출원인 / 주소	General Electric Company
대리인 / 주소	Ziolkowski Patent Solutions Group, SC
인용정보	피인용 횟수 : 9 인용 특허 : 20

초록
▼

A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

대표
청구항
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1. A micro-electromechanical (MEM) synthetic jet actuator comprising: a semiconductor substrate having a cavity extending therethrough such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate;a first flexible membrane formed on at least a portion of the first surface of the semiconductor substrate and extending over the first opening, wherein the first flexible membrane comprises an orifice formed therein and aligned with the first opening;a second flexible membrane formed on at least a portion of the second surface of the semiconductor substrate and extending over the second opening; anda pair of actuator elements, each of the actuator elements coupled to a respective flexible membrane to selectively cause displacement of the first and second flexible membranes;wherein vibration of the first and second flexible membranes causes a change in cavity volume such that an ambient fluid is drawn into the cavity through the orifice when the cavity volume is expanded and such that the ambient fluid is expelled from the orifice when the cavity volume is decreased, the expelled ambient fluid forming a synthetic jet stream; andwherein the actuator element on the first flexible membrane is positioned off-center from the cavity, adjacent to the orifice formed in the first flexible membrane. 2. The MEM synthetic jet actuator of claim 1 wherein the first and second flexible membranes comprise a piezoelectric film. 3. The MEM synthetic jet actuator of claim 2 wherein each of the actuator elements comprises an electrode configured to actuate the piezoelectric film coupled thereto when an electric charge is applied to the electrode. 4. The MEM synthetic jet actuator of claim 1 wherein the first and second flexible membranes comprise a polyimide film. 5. The MEM synthetic jet actuator of claim 4 wherein each of the actuator elements comprises a piezoelectric element configured to displace the polyimide film coupled thereto when an electric charge is applied to the piezoelectric element. 6. The MEM synthetic jet actuator of claim 1 further comprising a backer structure formed on at least one of the first flexible membrane and the second flexible membrane and positioned between the at least one of the first flexible membrane and the second flexible membrane and the actuator element coupled thereto. 7. The MEM synthetic jet actuator of claim 1 wherein the first and second flexible membranes vibrate at one of a Helmholtz frequency and a structural resonant frequency to cause displacement of the first and second flexible membranes in time-harmonic motion in response to electric charges received from the actuator elements. 8. The MEM synthetic jet actuator of claim 1 further comprising: a jet driver configured to selectively transmit a driver signal to each of the actuator elements to cause vibration thereof; anda temperature sensing element positioned adjacent the synthetic jet actuator and configured to sense a temperature of an area in proximity to the synthetic jet actuator and send feedback to the jet driver that includes the sensed temperature;wherein the jet driver is configured to vary at least one of an amplitude and frequency of the driver signal transmitted to the pair of actuator elements based on the sensed temperature feedback. 9. The MEM synthetic jet actuator of claim 1 wherein a diameter of the orifice is less than approximately 100 microns. 10. A synthetic jet actuator array comprising: a semiconductor substrate;a plurality of synthetic jet actuators formed in the semiconductor substrate, each of the plurality of synthetic jet actuators comprising: a cavity extending through the semiconductor substrate such that a front opening is formed in a front surface of the semiconductor substrate and such that a back opening is formed in a back surface of the semiconductor substrate;a front laminate film formed on the front surface of the semiconductor substrate and extending over the front opening;a back laminate film formed on the back surface of the semiconductor substrate and extending over the back opening;a pair of actuator elements, each of the actuator elements placed on a respective laminate film to selectively cause displacement of the front and back laminate films; andan orifice formed in one of the front laminate film and the back laminate film and aligned with the cavity; andan adhesive applied to the one of the front laminate film and the back laminate film having the orifices formed therein to secure the synthetic jet actuator array to an integrated circuit (IC) chip to be cooled, with the IC chip secured to the synthetic jet actuator array such that each of the plurality of synthetic jet actuators is aligned with a depression formed in a backside of the IC chip so as to provide cooling to a plurality of desired locations in the IC chip, wherein the actuator element on the laminate film comprising the orifice is positioned off-center from the cavity, adjacent to the orifice formed in the laminate film. 11. The synthetic jet actuator array of claim 10 wherein each of the front and back laminate films comprises a piezoelectric film and wherein each of the actuator elements comprises an electrode interconnected to each of the actuator elements' respective piezoelectric film to supply an electric charge thereto, thereby causing displacement of the piezoelectric film. 12. The synthetic jet actuator array of claim 10 wherein each of the front and back laminate films comprises a polyimide film and wherein each of the actuator elements comprises a piezoelectric element positioned on each of the actuator elements' polyimide film, the piezoelectric elements configured to displace the polyimide films when an electric charge is applied thereto. 13. The synthetic jet actuator array of claim 10 wherein each of the plurality of synthetic jet actuators further comprises: a controller power source combination configured to selectively transmit an electric charge to each of the actuator elements to cause vibration thereof; anda temperature sensing element positioned adjacent the synthetic jet actuator and configured to sense a temperature of an area in proximity to the synthetic jet actuator and send feedback to the controller power source combination that includes the sensed temperature;wherein the controller power source combination is configured to vary at least one of an amplitude and frequency of the electric charge transmitted to the pair of actuator elements based on the sensed temperature feedback.

이 특허에 인용된 특허 (20)

이 특허를 인용한 특허 피인용횟수: 9

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특허 상세정보

System and method for miniaturization of synthetic jets

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이 특허에 인용된 특허 (20)

이 특허를 인용한 특허 피인용횟수: 9

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System and method for miniaturization of synthetic jets

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이 특허에 인용된 특허 (20)

이 특허를 인용한 특허 피인용횟수: 9

IPC 상위 출원인

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IPC 상세정보(version : 201201)

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