IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0917969
(2006-07-04)
|
등록번호 |
US-8419272
(2013-04-16)
|
우선권정보 |
JP-2005-195691 (2005-07-05) |
국제출원번호 |
PCT/JP2006/313304
(2006-07-04)
|
§371/§102 date |
20091208
(20091208)
|
국제공개번호 |
WO2007/004644
(2007-01-11)
|
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
Greenblum & Bernstein, P.L.C.
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
1 |
초록
▼
A temperature measuring apparatus and a temperature measuring method, comprising a light intensity measuring unit, a calculation unit, and a temperature output unit; wherein an object to be heated having a uniquely defined correlation between temperature and refractive index is irradiated with a pro
A temperature measuring apparatus and a temperature measuring method, comprising a light intensity measuring unit, a calculation unit, and a temperature output unit; wherein an object to be heated having a uniquely defined correlation between temperature and refractive index is irradiated with a probe laser beam in the light intensity measuring unit, and a light intensity property is determined which represents a relationship between time and light intensity of a reflected light or a transmitted light occurring as a result of interference of the multiply-reflected probe laser beam within the object to be heated. In the calculation unit, a virtual object to be heated having equivalent dimensional, thermal, and optical characteristics to those of the object to be heated is subjected to a thermal incidence equivalent to the heating conditions of the object to be heated. A light intensity property of the virtual object to be heated is irradiated with a probe laser beam having an equivalent property to said probe laser beam is acquired, and a virtual object to be heated having a light intensity property is obtained as a replicated object to be heated. The temperature output unit acquires temperature of the object to be heated at a predetermined position thereon at a predetermined time on the basis of the replicated object to be heated.
대표청구항
▼
1. A temperature measuring apparatus, comprising: a light intensity measurer configuredto irradiate, with a probe laser beam, an object to be heated having a uniquely defined correlation between temperature and refractive index, andto determine a light intensity property X representing a relationshi
1. A temperature measuring apparatus, comprising: a light intensity measurer configuredto irradiate, with a probe laser beam, an object to be heated having a uniquely defined correlation between temperature and refractive index, andto determine a light intensity property X representing a relationship between time and light intensity of any one of a reflected light and a transmitted light occurring as a result of interference of the probe laser beam multiply-reflected within the object to be heated;a calculator configuredto apply a thermal incidence equivalent to heating conditions for the object to be heated to a virtual object to be heated having dimensional, thermal, and optical characteristics equivalent to dimensional, thermal, and optical characteristics of the object to be heated, andto acquire, as a replicated object to be heated, the virtual object to be heated having a light intensity property Z, which is obtained by irradiating the virtual object to be heated with a probe laser beam having equivalent characteristics to the probe laser beam irradiating the object to be heated and closest to the light intensity property X; anda temperature outputter configured to determine a temperature at a predetermined position on the object to be heated at a predetermined time on the basis of the replicated object to be heated. 2. The temperature measuring apparatus according to claim 1, wherein temperature of the object to be heated is acquired, the temperature varying from room temperature to 3000 K within the time ranging from 1 μs to 10 s. 3. The temperature measuring apparatus according to claim 1, wherein the light intensity measurer includes a probe laser beam source, a beam splitter, a laser condenser lens, and a light intensity detector. 4. The temperature measuring apparatus according to claim 3, wherein the laser condenser lens has the focal length f which fulfills the relationship, f>2d, with d being the thickness of an object to be heated. 5. The temperature measuring apparatus according to claim 1, wherein the calculator includes: a data inputter configured to input predetermined input data;a thermal conduction analyzer configured to determine a temperature distribution profile of the virtual object to be heated on the basis of the input data;a converter configured to convert the determined temperature distribution profile into a corresponding refractive index distribution profile;an optical analyzer configured to determine a predetermined optical property Y of the virtual object to be heated having the converted refractive index distribution profile;a judger configured to extract a predetermined optical property X from the light intensity property X, evaluate the difference between the optical properties X and Y, re-input a corrected initial value into the data inputter so that the difference is minimized, and thereby determine an optical property Z closest to the optical property X; anda replicated object to be heated outputter configured to output, as a replicated object to be heated, a virtual object to be heated having the light intensity property Z and a temperature distribution profile which correspond to the optical property Z. 6. The temperature measuring apparatus according to claim 5, wherein the optical property includes any one of an optical thickness property obtained for the virtual object to be heated and a light intensity property obtained for the object to be heated and the virtual object to be heated including a property regarding a frequency, a phase, and peak to valley periods of a waveform. 7. The temperature measuring apparatus according to claim 5, wherein the judger includes a pattern recognizer configured to recognize a difference between the light intensity property X and the light intensity property Y by any one of a pattern matching method, a feature-point matching method, and a frequency analysis method. 8. The temperature measuring apparatus according to claim 5, wherein the judger includes a mean squared error calculator that evaluates a difference between an optical thickness property X of the objected to be heated and the optical thickness property Y of the virtual object to be heated by a mean squared error method. 9. A thermal treatment apparatus comprising a plasma jet generator provided with the temperature measuring apparatus according to claim 1. 10. The thermal treatment apparatus according to claim 9, further comprising a controller which controls an output of the plasma jet generator on the basis of a signal from the temperature measuring apparatus. 11. A temperature measuring method comprising: irradiating an object to be heated having a uniquely defined correlation between temperature and refractive index with a probe laser beam; andafter irradiating, determining a light intensity property X representing a relationship between time and light intensity of any one of a reflected light and a transmitted light occurring as a result of interference of the probe laser beam multiply-reflected within the object to be heated;acquiring a temperature distribution profile of a virtual object to be heated having dimensional, thermal, and optical characteristics equivalent to dimensional, thermal, and optical characteristics of the object to be heated upon applying, to the virtual object to be heated, a thermal incidence equivalent to the conditions for heating of the object to be heated;acquiring a refractive index distribution profile corresponding to the temperature distribution profile;acquiring a light intensity property Y obtained from irradiation of a virtual object to be heated having the refractive index distribution profile with a probe laser beam having equivalent characteristics to the probe laser beam irradiating the object to be heated; and therebyevaluating a difference between the light intensity property Y and the light intensity property X;after evaluating, acquiring a corrected light intensity property by correcting a predetermined condition among conditions of the thermal incidence applied to the virtual object to be heated; and therebyacquiring, as a replicated object to be heated, a virtual object to be heated having a corrected light intensity property Z, which has a minimum difference with the light intensity property X, and a temperature distribution profile corresponding to the acquired light intensity property Z; andacquiring a temperature at a predetermined position on the object to be heated at a predetermined time on the basis of the replicated object to be heated. 12. The temperature measuring method according to claim 11, wherein the predetermined condition among conditions of the thermal incidence is at least one of a power transfer efficiency and the size of a region in which the virtual object to be heated effectively receives an input power. 13. The temperature measuring method according to claim 11, wherein the temperature at the predetermined position on the object to be heated at the predetermined time is acquired on the basis of the temperature distribution profile of the replicated object to be heated. 14. A non-transitory computer-readable recording medium that stores a program executable by a computer, the program causing the computer to: acquire a light intensity property X representing a relationship between time and light intensity of any one of a reflected light and a transmitted light occurring as a result of interference of a probe laser beam multiply-reflected within an object to be heated, the probe laser beam multiply-reflected within an object to be heated being caused by radiation of a probe laser beam on the object to be heated having a uniquely defined correlation between temperature and refractive index;acquire a temperature distribution profile when a virtual object to be heated having dimensional, thermal, and optical characteristics equivalent to dimensional, thermal, and optical characteristics of the object to be heated is subjected to a thermal incidence equivalent to heating conditions for the object to be heated;acquire a refractive index distribution profile corresponding to the temperature distribution profile;acquire a light intensity property Y, which is obtained when a virtual object to be heated having the refractive index distribution profile is irradiated with a probe laser beam having characteristics equivalent to characteristics of the probe laser beam irradiating the object to be heated;acquire a light intensity property Z having the smallest difference with the light intensity property X upon evaluating the difference between the light intensity property X and the light intensity property Y, and correct a predetermined condition among conditions of the thermal incidence to minimize the difference;acquire, as a replicated object to be heated, a virtual object to be heated having the light intensity property Z and a temperature distribution profile corresponding to the light intensity property Z; andacquire a temperature at a predetermined position on the object to be heated at a predetermined time on the basis of the replicated object to be heated. 15. The non-transitory computer readable recording medium according to claim 14, wherein the temperature at the predetermined position on the object to be heated at the predetermined time is acquired on the basis of the temperature distribution profile of the replicated object to be heated. 16. An LSI (Large Scale Integration), wherein temperature measurement is performed by executing: acquiring a light intensity property X representing a relationship between time and light intensity of any one of a reflected light and a transmitted light occurring as a result of interference of probe laser beam multiply-reflected within an object to be heated, the probe laser beam multiply-reflected within an object to be heated being caused by radiation of a probe laser beam on the object to be heated having a uniquely defined correlation between temperature and refractive index;acquiring a temperature distribution profile when a virtual object to be heated having dimensional, thermal, and optical characteristics equivalent to dimensional, thermal, and optical characteristics of the object to be heated is subjected to a thermal incidence equivalent to heating conditions for the object to be heated;acquiring a refractive index distribution profile corresponding to the temperature distribution profile;acquiring a light intensity property Y, which is obtained when a virtual object to be heated having the refractive index distribution profile is irradiated with a probe laser beam having characteristics equivalent to characteristics of the probe laser beam irradiating the object to be heated;acquiring a light intensity property Z having the smallest difference with the light intensity property X upon evaluating the difference between the light intensity property X and the light intensity property Y, and correcting a predetermined condition among conditions of the thermal incidence to minimize the difference;acquiring, as a replicated object to be heated, a virtual object to be heated having the light intensity property Z and a temperature distribution profile corresponding to the light intensity property Z; andacquiring a temperature at a predetermined position on the object to be heated at a predetermined time on the basis of the replicated object to be heated. 17. The LSI according to claim 16, wherein the temperature at the predetermined position on the object to be heated at the predetermined time is acquired on the basis of the temperature distribution profile of the replicated object to be heated. 18. A database comprising: an inputter configured to input data having dimensional, thermal and optical characteristics with respect to an object to be heated, for selection of a subject to be measured;a storage configured to store a group of data representing a light intensity property being calculated in advance on the basis of predetermined initial values of the subject being able to be input into the inputter, and on the basis of a corrected value which is obtained by modifying a specific initial value of the initial values, and a group of data representing a replicated object to be heated having a temperature distribution profile corresponding to the group of data representing the light intensity property; anda retriever configured to retrieve a light intensity property Z which is closest to a light intensity property X obtained for the object to be heated, from the groups of data representing light intensity property and replicated object to be heated, and to retrieve a replicated object to be heated corresponding to the light intensity property Z. 19. A temperature measuring apparatus comprising: a light intensity measurer configuredto irradiate, with a probe laser beam, an object to be heated having a uniquely defined correlation between temperature and refractive index, andto determine a light intensity property X representing a relationship between time and light intensity of any one of a reflected light and a transmitted light occurring as a result of interference of the probe laser beam multiply-reflected within the object to be heated;a database;the database including: an inputter configured to input data having dimensional, thermal and optical characteristics with respect to the object to be heated, for selection of a subject to be measured;a storage configured to store a group of data representing a light intensity property being calculated in advance on the basis of predetermined initial values of the subject being able to be input into the inputter, and on the basis of a corrected value which is obtained by modifying a specific initial value of the initial values, and a group of data representing a replicated object to be heated having a temperature distribution profile corresponding to the group of data representing the light intensity property; anda retriever configured to retrieve a light intensity property Z which is closest to the light intensity property X obtained for the object to be heated, from the groups of data representing light intensity property and replicated object to be heated, and to retrieve a replicated object to be heated corresponding to the light intensity property Z; anda temperature outputter configured to determine temperature at a predetermined position on the object to be heated at a predetermined time on the basis of the replicated object to be heated.
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