[특허]Reactor with silicide-coated metal surfaces

Reactor with silicide-coated metal surfaces 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B01J-019/02 B01J-008/18 C01B-033/03
출원번호	US-0763734 (2010-04-20)
등록번호	US-8425855 (2013-04-23)
발명자 / 주소	Froehlich, Robert Fieselmann, Ben Mixon, David Tsuo, York
출원인 / 주소	Froehlich, Robert
대리인 / 주소	Greenberg Traurig, LLP
인용정보	피인용 횟수 : 0 인용 특허 : 70

초록 ▼

In an embodiment, a reactor includes a section, wherein at least a portion of the section includes a base layer, wherein the base layer has a first composition that contains a silicide-forming metal element; and a silicide coating layer, wherein the silicide coating layer is formed by a process of exposing, at a first temperature above 600 degrees Celsius and a sufficient low pressure, the base layer having a sufficient amount of the silicide-forming metal element to a sufficient amount of a silicon source gas having a sufficient amount of silicon element, wherein the silicon source gas is capable of decomposing to produce the sufficient amount of silicon element at a second temperature below 1000 degrees Celsius; reacting the sufficient amount of the silicide-forming metal element with the sufficient amount of silicon element, and forming the silicide coating layer.

대표청구항 ▼

1. A reactor for producing polysilicon, comprising: a first section, wherein at least a portion of the first section has a first composition that comprises: i) at least one first layer, wherein the at least one first layer consists essentially of: at least 37 wt. % nickel andthe balance being at least one other metal element;ii) at least one second layer, wherein one layer of the at least one second layer directly contacts one layer of the at least one first layer and the at least one second layer comprises a silicide coating layer; andiii) at least one third layer, wherein one layer of the at least one third layer contacts one layer of the at least one second layer, and the at least one third layer comprises a silicon layer produced from a deposition of silicon element from halogenated silicon source gases within the reactor;a second section, wherein the second section is constructed from a second composition and wherein the first and the second compositions are different;an inert material, wherein the inert material occupies the second section of the reactor,wherein the second section comprises:i) a top portion having a first end and a second end, wherein the second end of the top portion has a first lip and wherein the first end is attached to the portion of the first section of the reactor;ii) a bottom portion having a first end and a second end, wherein the second end of the bottom portion forms the bottom of the reactor and wherein the first end of the bottom portion has a second lip; andwherein the first lip and the second lip are designed to securely attach to each other. 2. The reactor for producing polysilicon of claim 1, wherein the reactor further comprises a liner, wherein the liner extends from the inert material into the top portion of the second section. 3. The reactor for producing polysilicon of claim 2, wherein there is a space between the liner and a wall of the reactor to allow for an introduction of a non-silicon source gas.

이 특허에 인용된 특허 (70)

Meelu Mehar C.,GBX ; Jones Alan T.,GBX ; McMordie Bruce G., Aluminide-silicide coatings coated products.
상세보기
Van Slooten Richard A. (E. Aurora NY) Prasad Ravi (E. Amherst NY), Annular heated fluidized bed reactor.
상세보기
Hyppanen Timo,FIX, Arrangement in a wall and a method of coating a wall.
상세보기
Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf Ha, Chemical refill system.
상세보기
Lipisko Bruce A. (Carlsbad CA) Schumacher John C. (Rancho Santa Fe CA) Howard Richard E. (Escondido CA) Randtke Peter T. (San Marcos CA) Sandu Adrian (La Mesa CA) Fletcher Robert E. (Vista CA) Graf H, Chemical refill system.
상세보기
DeLuca John P., Closed loop process for producing polycrystalline silicon and fumed silica.
상세보기
McKaveney James P. (Claremont CA) Simpson Vernon P. (Laguna Beach CA), Composition for corrosion protection using metal silicides or alloys of silicon and metals.
상세보기
Oda Hiroyuki,JPX, Cyclone and fluidized bed reactor having same.
상세보기
Clary David W. (Baton Rouge LA) Wikman Andrew O. (Baton Rouge LA), Device for the magnetic inductive heating of vessels.
상세보기
Wilfried Kalchauer DE; Herbert Straussberger DE; Willi Streckel DE; Jochen Gross DE, Dust recirculation in the direct synthesis of chlorosilanes and methylchlorosilanes in a fluidized bed.
상세보기
Weidhaus, Dieter; Crössmann, Ivo; Schreieder, Franz, Dust-free and pore-free, high-purity granulated polysilicon.
상세보기
Winterton,Lyle C.; Hill,John P., Energy efficient method for growing polycrystalline silicon.
상세보기
Schumacher John C. (1944 Calle Buena Ventura Oceanside CA 92054), Energy efficient process for continuous production of thin semiconductor films on metallic substrates.
상세보기
Schumacher John C. (Oceanside CA), Energy efficient process for continuous production of thin semiconductor films on metallic substrates.
상세보기
Gautreaux Marcelian F. (Baton Rouge LA) Allen Robert H. (Baton Rouge LA), Fluid bed process for producing polysilicon.
상세보기
Flagella Robert N. (Ridgefield WA), Fluidized bed for production of polycrystalline silicon.
상세보기
Kim Hee Y. (Daejeon KRX) Song Yong M. (Daejeon KRX) Jeon Jong Y. (Daejeon KRX) Kwon Dae H. (Daejeon KRX) Lee Kang M. (Daejeon KRX) Lee Jae S. (Daejeon KRX) Park Dong S. (Daejeon KRX), Fluidized bed reactor heated by microwaves.
상세보기
Beech, Jr.,James H.; Walter,Richard E., Gas-solids separation device and method.
상세보기
Weir Richard L. (Mahopac NY) Pearsall Jeannine A. (Pomona NY), Glass ceramic precursor compositions containing titanium diboride.
상세보기
Kim Hee Y. (Daejeon KRX) Song Yong M. (Daejeon KRX) Jeon Jong Y. (Daejeon KRX) Kwon Dae H. (Daejeon KRX) Lee Kang M. (Daejeon KRX) Lee Jae S. (Daejeon KRX) Park Dong S. (Daejeon KRX), Heating of fluidized bed reactor by microwaves.
상세보기
Brown Robert C. (Ames IA), Latent heat-ballasted gasifier method.
상세보기
Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA), Liquid source material container and method of use for semiconductor device manufacturing.
상세보기
Lord, Stephen M, Machine for production of granular silicon.
상세보기
Age Shuichi (Amagasaki JPX), Manufacturing high purity/low chlorine content silicon by feeding chlorosilane into a fluidized bed of silicon particles.
상세보기
Kim, Young Hee; Park, Yong-Ki, Method and apparatus for preparing polysilicon granules.
상세보기
Matthes Reinhard (Rheinfelden DEX) Schork Reinhold (Rheinfelden DEX) Vahlensieck Hans-Joachim (Wehr DEX), Method and apparatus for the preparation of dichlorosilane.
상세보기
Block, Hans-Dieter; Kr?uter, Udo; Schreckenberg, Peter, Method and device for producing globular grains of high-puroty silicon having a diameter of between 50 μm and 300 μm and use of the same.
상세보기
Lehrer William I. (Los Altos CA), Method for LPCVD co-deposition of metal and silicon to form metal silicide.
상세보기
Stephen M Lord, Method for improving the efficiency of a silicon purification process.
상세보기
Mleczko, Leslaw; Buchholz, Sigurd; Ezpeleta Tejero, Maria Pilar; Schl?ter, Felix-Karl Oliver, Method for producing highly pure, granular silicon.
상세보기
Herold, Heiko; Holdenried, H. Günter; Mleczko, Leslaw; Pfaffelhuber, Matthias; König, Karl Theodor, Method for producing highly pure, granular silicon in a fluidised bed.
상세보기
Metzger,Karl Ludwig; Mleczko,Leslaw; Buchholz,Sigurd; Schlichth채rle,Philipp, Method for producing highly purified, granular silicium.
상세보기
K?nig, Theo; Pfaffelhuber, Matthias; Herold, Heiko; Holdenried, G?nter; Mleczko, Leslaw, Method for producing highly-pure granular silicon.
상세보기
Block, Hans-Dieter; Mleczko, Leslaw; Bulan, Andreas; Weber, Rainer; Buchholz, Sigurd; Sill, Torsten, Method for producing silane.
상세보기
Wakamatsu, Satoru; Oda, Hiroyuki, Method for producing silicon.
상세보기
Bulan,Andreas; Weber,Rainer, Method for producing trichlorosilane.
상세보기
Block, Hans-Dieter; Mleczko, Leslaw; Leimk?hler, Hans-Joachim; Weber, Rainer; Werner, Knud; Schwanke, Dietmar; Sch?fer, Johannes-Peter; Wagner, Gebhard, Method for production of high purity silicon.
상세보기
Hoel,Jan Otto; Rong,Harry Morten; Roe,Torbjorn; Oye,Harald Arnljot, Method for production of trichlorosilane and silicon for use in the production of trichlorosilane.
상세보기
Lord Stephen M. ; Milligan Robert J., Method for silicon deposition.
상세보기
Hieber Konrad (Bernau DEX) Stolz Manfred (Munich DEX) Wieczorek Claudia (Ottobrunn DEX), Method for the manufacture of metal silicide layers by means of reduced pressure gas phase deposition.
상세보기
Stephen M Lord, Method of improving the efficiency of a silicon purification process.
상세보기
Li, Si Yi; Zhu, Helen H.; Sadjadi, S. M. Reza; Pirkle, David R.; Bowers, James; Goss, Michael, Method of plasma etching of silicon carbide.
상세보기
Poong Yoon (Seoul KRX) Yongmok Song (Chungnam KRX), Method of preparing a high-purity polycrystalline silicon using a microwave heating system in a fluidized bed reactor.
상세보기
Cabrera Alejandro L. (Fogelsville PA) Kirner John F. (Allentown PA) Miller Robert A. (Allentown PA) Pierantozzi Ronald (Orefield PA), Method of producing silicon diffusion coatings on metal articles.
상세보기
Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA), Method of shipping and using semiconductor liquid source materials.
상세보기
Oda Hiroyuki,JPX, Method of storing trichlorosilane and silicon tetrachloride.
상세보기
Lepage Jean-Luc (Lyon FRX) Simon Gerard (Villeurbanne FRX), Plasma production of trichorosilane, SiHCl₃.
상세보기
Gautreaux Marcelian F. (Baton Rouge LA) Allen Robert H. (Baton Rouge LA), Polysilicon produced by a fluid bed process.
상세보기
Schumacher John C. (Oceanside CA), Process and apparatus for bubbling gas through a high purity liquid.
상세보기
Weidhaus,Dieter, Process and apparatus for comminuting silicon.
상세보기
Kendig,James Edward; Landis,David Russell; McQuiston,Todd Michael; Zalar,Michael Matthew, Process for preparation of polycrystalline silicon.
상세보기
Schreieder Franz,DEX ; Kim Hee Young,KRX, Process for preparing highly pure silicon granules.
상세보기
Allen Robert H. (Baton Rouge LA) Boone James E. (Baton Rouge LA), Process for preparing polysilicon with diminished hydrogen content by using a fluidized bed with a two-step heating proc.
상세보기
Allen Robert H. (Baton Rouge LA) Boone James E. (Baton Rouge LA), Process for preparing polysilicon with diminished hydrogen content by using a two-step heating process.
상세보기
Spangler,Michael V.; Seburn,Carl D., Process for producing a crystalline silicon ingot.
상세보기
Kirii, Seiichi; Narukawa, Mitsutoshi; Takesue, Hisayuki, Process for producing hexachlorodisilane.
상세보기
Woerner, Lloyd M.; Moore, Edward B., Process for producing polycrystalline silicon.
상세보기
Bothe Almquist Catherine L. (West Chester OH) Diaz Michael A. (Louisville KY) Halm Roland L. (Midland MI) Hasler ; Jr. James R. (Madison IN) Smith James S. (Midland MI), Process for purifying halosilanes.
상세보기
Schumacher ; Joseph C., Process for the production of silicon of high purity.
상세보기
Ajioka Masanobu (Yokohama JPX) Takenaka Shinji (Omuta JPX) Itoh Hiroyuki (Omuta JPX) Kataita Masafumi (Houya JPX) Kohno Yoshitsugu (Omuta JPX), Production process of chlorine.
상세보기
Accuntius James A. (Georgetown TX) Wilde David S. (Austin TX), Pyrolytic deposition in a fluidized bed.
상세보기
Weidhaus,Dieter; Hayduk,Alexander, Radiation-heated fluidized-bed reactor.
상세보기
Iya Sridhar K. (Vancouver WA), Reactor for fluidized bed silane decomposition.
상세보기
Lord, Stephen Michael, Set of processes for removing impurities from a silcon production facility.
상세보기
Ibrahim Jameel (Humble TX) Farritor Robert E. (Baton Rouge LA) Clary David W. (Baton Rouge LA), Silicon coating process.
상세보기
Lord Stephen M. ; Milligan Robert J., Silicon deposition reactor apparatus.
상세보기
Hansen Richard L. ; Drafall Larry E. ; McCutchan Robert M. ; Holder John D. ; Allen Leon A. ; Shelley Robert D., Surface-treated crucibles for improved zero dislocation performance.
상세보기
Schumacher John C. (Carlsbad CA), Ultra-pure epitaxial silicon.
상세보기
McMenamin Joseph C. (Fresno CA), Vapor mass flow control system.
상세보기
McMenamin Joseph C. (Oceanside CA), Vapor mass flow control system.
상세보기

IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Reactor with silicide-coated metal surfaces 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

이 특허에 인용된 특허 (70)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

Reactor with silicide-coated metal surfaces 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

이 특허에 인용된 특허 (70)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트