초록 ▼

An inlet shut valve or an outlet shut valve has a main diaphragm and a sub-diaphragm, wherein a valve closing pressure chamber and a valve opening pressure chamber are provided, respectively, on the upper surface side and the lower surface side of the main diaphragm. Furthermore, an atmospheric pres

An inlet shut valve or an outlet shut valve has a main diaphragm and a sub-diaphragm, wherein a valve closing pressure chamber and a valve opening pressure chamber are provided, respectively, on the upper surface side and the lower surface side of the main diaphragm. Furthermore, an atmospheric pressure chamber and a pressure chamber constituting a channel are provided, respectively, on the upper surface side and the lower surface side of the sub-diaphragm. A drive shaft constituting a valve element is driven in the direction for bringing about a valve open state by both forces, i.e. a first force acting by pressure difference between the valve closing pressure chamber and the valve opening pressure chamber and a second force acting by pressure difference between the atmospheric pressure chamber and the pressure chamber constituting a channel and acting in the same direction as the first force.

대표청구항 ▼

1. A pressure control circuit for a fluid control valve, the pressure control circuit comprising the fluid control valve and a pressure controlling flow path for supplying and discharging a fluid for pressure control to the fluid control valve, wherein: the fluid control valve comprises a valve memb

1. A pressure control circuit for a fluid control valve, the pressure control circuit comprising the fluid control valve and a pressure controlling flow path for supplying and discharging a fluid for pressure control to the fluid control valve, wherein: the fluid control valve comprises a valve member having a drive shaft, the fluid control valve used in a gas flow path for supplying or discharging oxidation gas related gas or fuel gas related gas as reactant gas of a fuel cell, for blocking or connecting the flow in a gas flow path by a displacement of the drive shaft;the drive shaft is driven by both a first force acting due to a pressure difference between a first pressure chamber and a second pressure chamber that are separated from each other, and a second force acting in the same direction as the first force and acting due to a pressure difference between a third pressure chamber and a fourth pressure chamber that are separated from each other;in the fluid control valve, the first pressure chamber is the gas flow path in which the flows are blocked or connected by the valve member, while the second pressure chamber is open to the atmosphere;one of the third chamber and the fourth chamber receives pressure from gas which is the same and is supplied from the same supply side as the gas flowing in the gas flow path, while the other one of the third pressure chamber and the fourth pressure chamber is open to the atmosphere;the pressure controlling flow path comprises a main gas flow path which is a gas flow path in which flows are blocked or connected by a valve member, pressure controlling branch flow paths which are branched from the main gas flow path, and a compressor provided on an upstream side of the pressure controlling branch flow path and the main gas flow path;the pressure controlling branch flow paths include a branch flow path on the third pressure chamber side which is connected to the third pressure chamber, a branch flow path on the fourth pressure chamber side which is connected to the fourth pressure chamber, and a three-way solenoid valve provided at a branching portion between the branch flow path on the third pressure chamber side and the branch flow path on the fourth pressure chamber side of the pressure controlling branch flow paths; andthe branch flow path on the third pressure chamber side and the branch flow path on the fourth pressure chamber side are selectively open to the atmosphere by different solenoid valves. 2. A fluid control valve comprising a valve member having a drive shaft, the fluid control valve used in a gas flow path for supplying or discharging oxidation gas related gas or fuel gas related gas as reactant gas of a fuel cell, for blocking or connecting the flow in a gas flow path by a displacement of the drive shaft, wherein the drive shaft is driven by both a first force acting due to a pressure difference between a first pressure chamber and a second pressure chamber that are separated from each other, and a second force acting in the same direction as the first force and acting due to a pressure difference between a third pressure chamber and a fourth pressure chamber that are separated from each other,wherein a member constituting the first pressure chamber and a member constituting the second pressure chamber are made of different metals,wherein one of a member constituting the first pressure chamber and a member constituting the second pressure chamber is made of aluminum or aluminum alloy, and the other member is made of a different metal from the one member, andwherein alumite processing is performed on the entire surface of the one member including a contact portion at which the one member is in contact with the other member, and a contact surface of the one member, on which the alumite processing is performed and the one member is in contact with the other member, is in contact with a contact surface of the other member on which the alumite processing is not performed. 3. The fluid control valve according to claim 1, wherein a resilient sealing portion tightly holding a resilient member between the one member and the other member is provided on the inner side in the radial direction of the contact portion between the one member and the other member. 4. The fluid control valve according to claim 3, wherein the resilient member serves to deform when receiving pressure from the gas and constitutes part of a diaphragm for separating the first pressure chamber and the second pressure chamber. 5. The fluid control valve according to claim 2, wherein the thickness of the contact portion of the other member, on which the other member is in contact with the one member, is made smaller along the radial direction than the thickness of other portions of the other member along the radial direction.