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A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mi

A method and apparatus for forming an electrochemical layer of a thin film battery is provided. A precursor mixture comprising precursor particles dispersed in a carrying medium is activated in an activation chamber by application of an electric field to ionize at least a portion of the precursor mixture. The activated precursor mixture is then mixed with a combustible gas mixture to add thermal energy to the precursor particles, converting them to nanocrystals, which deposit on a substrate. A second precursor may be blended with the nanocrystals as they deposit on the surface to enhance adhesion and conductivity.

대표청구항 ▼

1. A method of forming a layer on a substrate, comprising: providing a precursor mixture comprising an electrochemical precursor and an oxygen containing precursor to a processing chamber;forming a plasma from the precursor mixture;reacting the electrochemical precursor and the oxygen containing pre

1. A method of forming a layer on a substrate, comprising: providing a precursor mixture comprising an electrochemical precursor and an oxygen containing precursor to a processing chamber;forming a plasma from the precursor mixture;reacting the electrochemical precursor and the oxygen containing precursor in the plasma to form electrochemically active nanocrystals; and depositing the electrochemically active nanocrystals on a substrate, and further comprising flowing the nanocrystals out of the processing chamber toward the substrate in a stream, and adding a binder to the stream. 2. The method of claim 1, wherein the binder is a polymer, and adding the binder to the stream comprises forming an emulsion of the polymer in water and mixing the emulsion with the stream at a location selected to vaporize the water. 3. A method of forming a layer on a substrate, comprising: providing a precursor mixture comprising an electrochemical precursor and an oxygen containing precursor to a processing chamber;forming a plasma from the precursor mixture;reacting the electrochemical precursor and the oxygen containing precursor in the plasma to form electrochemically active nanocrystals; anddepositing the electrochemically active nanocrystals on a substrate, wherein the electrochemical precursor is a solution comprising lithium nitrate, nickel nitrate, magnesium nitrate, and cobalt nitrate, mixed with an organic oxygen containing fluid, the solution is atomized to form the plasma, a carbon containing gas is added to the plasma, the nanocrystals are ejected from the processing chamber in a stream, and a flow rate of the carbon containing gas is adjusted to control a temperature of the stream, and further comprising adding a mixture of a polymer and water to the stream of nanocrystals at a location selected to vaporize the water. 4. A method of forming an electrochemical layer on a substrate, comprising: forming a precursor solution comprising lithium, oxygen, and carbon;atomizing the precursor solution in an inert gas;flowing the atomized precursor and a carbon containing gas mixture into a plasma chamber;coupling DC voltage to the plasma chamber to form a plasma from the atomized precursor and the carbon containing gas;reacting the atomized precursor to form nanocrystals of an electrochemically active material;flowing the nanocrystals in a stream out of the plasma chamber toward the substrate;adding a polymer binder to the stream to form a deposition mixture; anddepositing the deposition mixture on the substrate. 5. The method of claim 4, wherein the precursor solution further comprises nickel, magnesium, and cobalt. 6. The method of claim 4, wherein the precursor solution is an aqueous solution comprising lithium and an organic compound. 7. The method of claim 6, wherein the aqueous solution comprises lithium nitrate, nickel nitrate, magnesium nitrate, and cobalt nitrate. 8. The method of claim 7, further comprising altering a composition of the electrochemical layer as it is deposited by changing a composition of the precursor solution. 9. The method of claim 4, wherein adding the polymer binder comprises mixing a water emulsion of the polymer binder with the nanocrystals stream at a location that vaporizes the water. 10. The method of claim 9, further comprising controlling a temperature in the plasma chamber by adjusting a flow rate of the carbon containing gas mixture. 11. The method of claim 10, wherein the carbon containing gas mixture comprises a hydrocarbon.