최소 단어 이상 선택하여야 합니다.
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다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0818521 (2010-06-18) |
등록번호 | US-8451017 (2013-05-28) |
발명자 / 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 4 인용 특허 : 821 |
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a
A substrate, preferably constructed of a ductile material and a tool having the desired shape of the resulting device for contacting contact pads on a test device is brought into contact with the substrate. The tool is preferably constructed of a material that is harder than the substrate so that a depression can be readily made therein. A dielectric (insulative) layer, that is preferably patterned, is supported by the substrate. A conductive material is located within the depressions and then preferably lapped to remove excess from the top surface of the dielectric layer and to provide a flat overall surface. A trace is patterned on the dielectric layer and the conductive material. A polyimide layer is then preferably patterned over the entire surface. The substrate is then removed by any suitable process.
1. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, each of said contacts having a length and a contacting portion spaced apart from an axis of moment of sa
1. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, each of said contacts having a length and a contacting portion spaced apart from an axis of moment of said contact, and each contact being electrically connected to a corresponding conductor; and(b) an elastic assembly including a surface supporting said plurality of contacts, said elastic assembly operating in respect to each contact to urge each contact, when in pressing engagement with said electrical device, into tilting motion so that each contact is driven in accordance with said tilting motion into lateral scrubbing movement across said electrical device, each contact remaining supported by said elastic assembly along substantially all of said length during the tilting motion, wherein said plurality of contacts further includes a first conductive material that defines said contacting portion of said plurality of contacts and a second conductive material that supports said first conductive material, wherein said first conductive material is different from said second conductive material, and further wherein a thickness of said first conductive material in a direction that is perpendicular to said elastic assembly and at a point of contact between said electrical device and said contacting portion is greater than a thickness of said first conductive material in a direction that is perpendicular to a side of said first conductive material and in a location where said second conductive material supports said first conductive material. 2. The probing assembly of claim 1 including a base, said elastic assembly being tiltably coupled to said base so as to enable said elastic assembly to automatically tilt relative to said base toward a position parallel to said electrical device in response to pressing engagement between respective ones of said contacts and said electrical device. 3. The probing assembly of claim 1 wherein said contacts are provided in adjacent pairs and the respective lateral scrubbing movements of said contacts in each adjacent pair are in opposite directions. 4. The probing assembly of claim 1 wherein each contact is supported by a continuous portion of said elastic assembly. 5. The probing assembly of claim 1, wherein said contacting portion is configured to contact said electrical device, and further wherein said contacting portion includes at least one of a roughened surface pattern, a sharp ridge, a waffle pattern, and a pair of projections, wherein a spacing between said pair of projections is less than a diameter of a solder bump of said electrical device that said contacting portion is configured to contact. 6. The probing assembly of claim 1, wherein each of said plurality of contacts includes at least one substantially flat surface inclined relative to a perpendicular direction relative to said elastic assembly and defining an acute angle relative thereto. 7. The probing assembly of claim 1, wherein each of said plurality of contacts includes an elongate portion that defines the length, wherein said contacting portion is disposed in elevational relationship to said elongate portion, and further wherein said contacting portion and said elongate portion are integral with each other and formed free from interfacial layers. 8. The probing assembly of claim 1, wherein the probing assembly is configured to form a Kelvin connection with the electrical device, wherein said plurality of contacts is arranged in adjacent pairs, wherein each adjacent pair includes a first contact and a second contact, wherein the first contact is configured to provide an electric current to a contact pad of the electrical device, and further wherein the second contact is configured to detect a voltage of the contact pad. 9. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, said plurality of contacts being substantially asymmetric, each of said contacts having a length and being electrically connected to a corresponding conductor; and(b) an elastic assembly supporting said contacts, said elastic assembly operating in respect to each contact to urge each contact, when placed into pressing engagement with said electrical device, into tilting motion so that each contact is driven in accordance with said tilting motion into lateral scrubbing movement across said electrical device, and each contact remaining supported by said elastic assembly along substantially all of said length during the tilting motion, wherein said plurality of contacts further includes a plurality of contacting portions, wherein a first conductive material defines said contacting portion of said contacts and a second conductive material supports said first conductive material, wherein said first conductive material is different from said second conductive material, and further wherein a thickness of said first conductive material in a direction that is perpendicular to said elastic assembly and at a point of contact between said electrical device and said contacting portion is greater than a thickness of said first conductive material in a direction that is perpendicular to a side of said first conductive material and in a location where said second conductive material supports said first conductive material. 10. The probing assembly of claim 9 including a base, said elastic assembly being tiltably coupled to said base so as to enable said elastic assembly to automatically tilt relative to said base toward a position parallel to said electrical device in response to pressing engagement between respective ones of said contacts and said electrical device. 11. The probing assembly of claim 9 wherein each contact includes a contact bump fixedly joined in an off-centered location on said contact. 12. The probing assembly of claim 9 wherein said contacts are provided in adjacent pairs and the respective lateral scrubbing movements of said contacts in each adjacent pair are in opposite directions. 13. The probing assembly of claim 9 wherein each contact is supported by a continuous portion of said elastic assembly. 14. The probing assembly of claim 9, wherein each of said plurality of contacts includes a contacting portion, wherein said contacting portion is configured to contact said electrical device, and further wherein said contacting portion includes at least one of a roughened surface pattern, a sharp ridge, a waffle pattern, and a pair of projections, wherein a spacing between said pair of projections is less than a diameter of a solder bump of said electrical device that said contacting portion is configured to contact. 15. The probing assembly of claim 9, wherein each of said plurality of contacts includes at least one substantially flat surface inclined relative to a perpendicular direction relative to said elastic assembly and defining an acute angle relative thereto. 16. The probing assembly of claim 9, wherein each of said plurality of contacts includes an elongate portion that defines the length and a contacting portion in elevational relationship to said elongate portion, and further wherein said contacting portion and said elongate portion are integral with each other and formed free from interfacial layers. 17. The probing assembly of claim 9, wherein the probing assembly is configured to form a Kelvin connection with the electrical device, wherein said plurality of contacts is arranged in adjacent pairs, wherein each adjacent pair includes a first contact and a second contact, wherein the first contact is configured to provide an electric current to a contact pad of the electrical device, and further wherein the second contact is configured to detect a voltage of the contact pad. 18. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, each of said contacts having a length and a contacting portion spaced apart from an axis of moment of said contact, and each contact being electrically connected to a corresponding conductor, wherein the probing assembly is configured to form a Kelvin connection with the electrical device, wherein said plurality of contacts is arranged in adjacent pairs, wherein each adjacent pair includes a first contact and a second contact, wherein the first contact is configured to provide an electric current to a contact pad of the electrical device, and further wherein the second contact is configured to detect a voltage of the contact pad; and(b) an elastic assembly including a surface supporting said plurality of contacts, said elastic assembly operating in respect to each contact to urge each contact, when in pressing engagement with said electrical device, into tilting motion so that each contact is driven in accordance with said tilting motion into lateral scrubbing movement across said electrical device, each contact remaining supported by said elastic assembly along substantially all of said length during the tilting motion. 19. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, said plurality of contacts being substantially asymmetric, each of said contacts having a length and being electrically connected to a corresponding conductor, wherein the probing assembly is configured to form a Kelvin connection with the electrical device, wherein said plurality of contacts is arranged in adjacent pairs, wherein each adjacent pair includes a first contact and a second contact, wherein the first contact is configured to provide an electric current to a contact pad of the electrical device, and further wherein the second contact is configured to detect a voltage of the contact pad; and(b) an elastic assembly supporting said contacts, said elastic assembly operating in respect to each contact to urge each contact, when placed into pressing engagement with said electrical device, into tilting motion so that each contact is driven in accordance with said tilting motion into lateral scrubbing movement across said electrical device, and each contact remaining supported by said elastic assembly along substantially all of said length during the tilting motion. 20. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, each of said contacts having a length and a contacting portion spaced apart from an axis of moment of said contact, and each contact being electrically connected to a corresponding conductor, wherein said contacting portion is configured to contact said electrical device, and further wherein said contacting portion includes at least one of a roughened surface pattern, a sharp ridge, a waffle pattern, and a pair of projections, wherein a spacing between said pair of projections is less than a diameter of a solder bump of said electrical device that said contacting portion is configured to contact; and(b) an elastic assembly including a surface supporting said plurality of contacts, said elastic assembly operating in respect to each contact to urge each contact, when in pressing engagement with said electrical device, into tilting motion so that each contact is driven in accordance with said tilting motion into lateral scrubbing movement across said electrical device, each contact remaining supported by said elastic assembly along substantially all of said length during the tilting motion. 21. A probing assembly for probing an electrical device comprising: (a) a plurality of contacts formed by locating conductive material within a plurality of depressions of a sacrificial substrate, said plurality of contacts being substantially asymmetric, each of said contacts having a length and being electrically connected to a corresponding conductor, wherein each of said plurality of contacts includes a contacting portion, wherein said contacting portion is configured to contact said electrical device, and further wherein said contacting portion includes at least one of a roughened surface pattern, a sharp ridge, a waffle pattern, and a pair of projections, wherein a spacing between said pair of projections is less than a diameter of a solder bump of said electrical device that said contacting portion is configured to contact; and(b) an elastic assembly supporting said contacts, said elastic assembly operating in respect to each contact to urge each contact, when placed into pressing engagement with said electrical device, into tilting motion so that each contact is driven in accordance with said tilting motion into lateral scrubbing movement across said electrical device, and each contact remaining supported by said elastic assembly along substantially all of said length during the tilting motion.
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