Fabrication of conductive pathways, microcircuits and microstructures in microfluidic networks
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/44
H01L-021/4763
출원번호
US-0920483
(2006-05-18)
등록번호
US-8486833
(2013-07-16)
국제출원번호
PCT/US2006/019787
(2006-05-18)
§371/§102 date
20100302
(20100302)
국제공개번호
WO2007/061448
(2007-05-31)
발명자
/ 주소
Bruzewicz, Derek A.
Boncheva-Bettex, Mila
Whitesides, George M.
Siegel, Adam
Weibel, Douglas B.
Shevkoplyas, Sergey S.
Martinez, Andres
출원인 / 주소
President and Fellows of Harvard College
대리인 / 주소
Wolf, Greenfield & Sacks, P.C.
인용정보
피인용 횟수 :
3인용 특허 :
33
초록▼
Disclosed herein are a variety of microfluidic devices and solid, typically electrically conductive devices that can be formed using such devices as molds. In certain embodiments, the devices that are formed comprise conductive pathways formed by solidifying a liquid metal present in one or more mic
Disclosed herein are a variety of microfluidic devices and solid, typically electrically conductive devices that can be formed using such devices as molds. In certain embodiments, the devices that are formed comprise conductive pathways formed by solidifying a liquid metal present in one or more microfluidic channels (such devices hereinafter referred to as “microsolidic” devices). In certain such devices, in which electrical connections can be formed and/or reformed between regions in a microfluidic structure; in some cases, the devices/circuits formed may be flexible and/or involve flexible electrical components. In certain embodiments, the solid metal wires/conductive pathways formed in microfluidic channel(s) may remain contained within the microfluidic structure. In certain such embodiments, the conductive pathways formed may be located in proximity to other microfluidic channel(s) of the structure that carry flowing fluid, such that the conductive pathway can create energy (e.g. electromagnetic and/or thermal energy) that interacts withy and/or affects the flowing fluid and/or a component contained therein or carried thereby. In other embodiments, a microsolidic structure may be removed from a microfluidic mold to form a stand-alone structure. In certain embodiments, the solid metal structures formed may interact with light energy incident upon a structure or may be used to fabricate a light-weight electrode. Another aspect of the invention relates to the formation of self-assembled structures that may comprise these electrically conductive pathways/connections.
대표청구항▼
1. A method of fabricating an electrically conductive pathway comprising steps of: providing a structure defining a microfluidic system, the microfluidic system comprising a substantially covered microfluidic channel; causing a liquid metal to flow into at least a portion of the substantially covere
1. A method of fabricating an electrically conductive pathway comprising steps of: providing a structure defining a microfluidic system, the microfluidic system comprising a substantially covered microfluidic channel; causing a liquid metal to flow into at least a portion of the substantially covered microfluidic channel to form an electrically conductive pathway, the metal having a temperature greater than a melting point of the metal; cooling the liquid metal within the substantially covered microfluidic channel to a temperature less than the melting point of the metal, thereby causing the metal to become solid and form the electrically conductive pathway within the microfluidic system; passing an electrical current through the electrically conductive pathway; and modifying the shape of at least a portion of the structure and the electrically conductive pathway after the passing step. 2. The method of claim 1, wherein the structure defining a microfluidic system comprises a layer having a length of the layer measured along a first direction, a width of the layer measured along a second direction perpendicular to the first direction, and a thickness of the layer measured along a third direction perpendicular to both the first and the second directions, the thickness of the layer being less than the length of the layer and less than the width of the layer, and wherein the substantially covered microfluidic channel does not traverse the entire thickness of the layer. 3. The method of claim 2, wherein the substantially covered microfluidic channel lies within a plane or curved surface defined by the first and second directions. 4. The method of claim 2, wherein the structure defining the microfluidic system is formed of a flexible material. 5. The method of claim 1, wherein at least a portion of a wall of the microfluidic channel is treated by a process that enables the portion of the wall to be wet by the metal, prior to flowing the metal into the channel. 6. The method of claim 5, wherein the process comprises chemically altering at least a portion of the wall. 7. The method of claim 6, wherein the process comprises exposing the wall to a chemical able to adhere or chemically bind to the wall. 8. The method of claim 7, wherein the chemical comprises an alkanethiol or a silane. 9. The method of claim 8, wherein the chemical comprises 3-mercaptopropyltrimethoxysilane. 10. The method of claim 1, wherein the microfluidic channel has at least one cross-sectional dimension of less than about 1 mm. 11. The method of claim 1, wherein the microfluidic channel has at least one cross-sectional dimension of less than about 100 microns. 12. The method of claim 1, wherein the microfluidic channel has at least one cross-sectional dimension of less than about 10 microns. 13. The method of claim 1, wherein the microfluidic channel has at least one cross-sectional dimension of less than about 1 micron. 14. The method of claim 1, wherein the microfluidic channel has at least one cross-sectional dimension between about 1 micron and about 100 microns. 15. The method of claim 1, further comprising forming an electrical connection between an electrical component and at least a portion of the solidified metal. 16. The method of claim 15, wherein the microfluidic system comprises a plurality of substantially covered microfluidic channels providing a plurality of conductive pathways after completion of the cooling act, and wherein a plurality of electrical connections are formed between a plurality of electrical components and a plurality of conductive pathways, thereby forming an electrical circuit device. 17. The method of claim 16, wherein the electrical circuit device comprises a transformer, an electromagnet, an antenna, a computer, or a radio.
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