IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0561514
(2004-06-10)
|
등록번호 |
US-8496022
(2013-07-30)
|
우선권정보 |
JP-2003-177134 (2003-06-20) |
국제출원번호 |
PCT/JP2004/008117
(2004-06-10)
|
§371/§102 date |
20051220
(20051220)
|
국제공개번호 |
WO2004/114038
(2004-12-29)
|
발명자
/ 주소 |
- Sugiyama, Kazuhiko
- Ikeda, Nobukazu
- Nishino, Kouji
- Dohi, Ryousuke
- Uenoyama, Toyomi
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
7 인용 특허 :
11 |
초록
▼
The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing ope
The invention supplies a quantity Q of gas while dividing at flow rate ratio Q1/Q2 from a gas supply facility equipped with a flow controller. A total quantity Q=Q1+Q2 of gas is supplied into a chamber at flow rate Q1 and Q2 through shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GL1 and GL2, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BL1 on the downstream side of the open/close valve OV1 and branched from GL1 ,bypass line BL2 on the downstream side of the open/close valve OV2 and branched from GL2 ,pressure type division quantity controller connected to the bypass line BL1 and the bypass line BL2 ,a sensor measuring pressure inside branch supply line GL1 ,and another sensor measuring pressure inside branch supply line GL2.
대표청구항
▼
1. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller, the device comprising: (a) a gas supply device disposed to supply a specified quantity of gas, while dividing the specified quantity of gas at a specified flow rate ratio Q1/Q2 from the gas
1. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller, the device comprising: (a) a gas supply device disposed to supply a specified quantity of gas, while dividing the specified quantity of gas at a specified flow rate ratio Q1/Q2 from the gas supply facility provided with the flow controller, into the chamber through a plurality of branch supply lines, wherein the plurality of branch supply lines include a first branch supply line and a second branch supply line, and wherein shower plates are fixed to ends of the first branch supply line and the second branch supply line;(b) a first open/close valve and a second open/close valve that are installed on the first branch supply line and the second branch supply line, respectively;(c) a first bypass line that is disposed on a downstream side of the first open/close valve and branched from the first branch supply line;(d) a second bypass line that is disposed on a downstream side of the second open/close valve and branched from the second branch supply line;(e) a pressure type division quantity controller that is connected to the first bypass line and the second bypass line, wherein the pressure type division quantity controller controls flow rate in the first branch supply line and in the second branch supply line;(f) a first pressure sensor that is disposed to measure pressure inside the first branch supply line;(g) a second pressure sensor that is disposed to measure pressure inside the second branch supply line, wherein Q1 and Q2 are specified quantities of gas supplied to the first branch supply line and the second branch supply line, respectively; and(h) a control device disposed to regulate a degree of opening of the pressure type division quantity controller in order to reduce a difference between actual pressure of one of the plurality of branch supply lines and a set pressure to reach the specified flow rate ratio Q1/Q2 by comparing either one of a first set pressure or a second set pressure, respectively, of the first branch supply line and the second branch supply line to reach the specified flow rate ratio Q1/Q2 with corresponding first actual pressure or second actual pressure of the first branch supply line and the second branch supply line measured by the first pressure sensor or the second pressure sensor, wherein the control device is connected to receive pressure signals from the first pressure sensor and the second pressure sensor, and the control device is connected to send control signals to the pressure type division quantity controller and to a switch valve, a wherein the control device is operable to determine values for Q1 and Q2 when given a total flow quantity Q and the specified flow rate ratio Q1/Q2, wherein the specified flow rate ratio Q1/Q2 has a value in the range of 4/1 to 1/4. 2. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller as claimed in claim 1, wherein the flow controller is a pressure type flow controller. 3. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller as claimed in claim 2, wherein the first open/close valve and the second open/close valve are pneumatically operated. 4. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller as claimed in claim 1, wherein the first open/close valve and the second open/close valve are pneumatically operated, and the switch valve is disposed to supply actuating air to the first open/close valve and the second open/close valve. 5. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller as claimed in claim 4, wherein the flow controller is a pressure type flow controller. 6. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller, the device comprising: (a) a gas supply device disposed to supply a specified quantity of gas, while dividing the specified quantity of gas at a specified flow rate ratio Q1/Q2 from the gas supply facility provided with the flow controller, into the chamber through a plurality of branch supply lines, wherein the plurality of branch supply lines include a first branch supply line and a second branch supply line, and wherein shower plates are fixed to ends of the first branch supply line and the second branch supply line;(b) a first open/close valve and a second open/close valve that are installed on the first branch supply line and the second branch supply line, respectively, wherein the first open/close valve and the second open/close valve are pneumatically operated, and a switch valve is disposed to supply actuating air to the first open/close valve and the second open/close valve;(c) a first bypass line that is disposed on a downstream side of the first open/close valve and branched from the first branch supply line;(d) a second bypass line that is disposed on a downstream side of the second open/close valve and branched from the second branch supply line;(e) a pressure type division quantity controller that is connected to the first bypass line and the second bypass line, wherein the pressure type division quantity controller controls flow rate in the first branch supply line and in the second branch supply line;(f) a first pressure sensor that is disposed to measure pressure inside the first branch supply line;(g) a second pressure sensor that is disposed to measure pressure inside the second branch supply line, wherein Q1 and Q2 are specified quantities of gas supplied to the first branch supply line and the second branch supply line, respectively; and(h) a control device disposed to regulate a degree of opening of the pressure type division quantity controller in order to reduce a difference between actual pressure of one of the plurality of branch supply lines and a set pressure to reach the specified flow rate ratio Q1/Q2 by comparing either one of a first set pressure or a second set pressure, respectively, of the first branch supply line and the second branch supply line to reach the specified flow rate ratio Q1/Q2 with corresponding first actual pressure or second actual pressure of the first branch supply line and the second branch supply line measured by the first pressure sensor or the second pressure sensor, wherein the control device is connected to receive pressure signals from the first pressure sensor and the second pressure sensor, and the control device is connected to send control signals to the pressure type division quantity controller and to the switch valve, wherein the control device is operable to determine values for Q1 and Q2 when given a total flow quantity Q and the specified flow rate ratio Q1/Q2, wherein the specified flow rate ratio Q1/Q2 has a value in the range of 4/1 to 1/4. 7. A device for supplying gas divided to a chamber from a gas supply facility equipped with a flow controller as claimed in claim 6, wherein the flow controller is a pressure type flow controller.
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