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Micromachined piezoelectric z-axis gyroscope

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01C-019/56
출원번호 US-0930175 (2010-12-30)
등록번호 US-8516887 (2013-08-27)
발명자 / 주소
  • Acar, Cenk
  • Shenoy, Ravindra Vaman
  • Black, Justin Phelps
  • Petersen, Kurt Edward
  • Ganapathi, Srinivasan Kodaganallur
  • Stephanou, Philip Jason
출원인 / 주소
  • QUALCOMM MEMS Technologies, Inc.
대리인 / 주소
    Weaver Austin Villeneuve & Sampson, LLP
인용정보 피인용 횟수 : 9  인용 특허 : 47

초록

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connectin

대표청구항

1. A gyroscope, comprising: a central anchor;a sense frame disposed around the central anchor;a plurality of sense beams configured for connecting the sense frame to the central anchor;a drive frame disposed around and coupled to the sense frame, the drive frame including a first side and a second s

이 특허에 인용된 특허 (47)

  1. Mizuno Jun,JPX ; Nottmeyer Kay,JPX, Acceleration sensor.
  2. Huang Yongli ; Lim Martin ; Haniff Tariq M. ; Yun Weijie, Angular rate sensor made from a structural wafer of single crystal silicon.
  3. Ohuchi,Satoshi; Aizawa,Hiroyuki, Angular velocity sensor and its designing method.
  4. Norris Elwood B. (San Antonio TX) Yeakley Lester M. (San Antonio TX), Biaxial capacitance strain transducer.
  5. Burckhardt, Christophe W.; Fournier, Jacques; Stauber, Philippe, Capacitive device for the measurement of displacements.
  6. Meyer Hans U. (42 ; rue de Lausanne 1110 Morges CHX), Capacitive position sensor including a scale with integral topographical features which effect the mutual capacitance be.
  7. Meyer Hans U. (42 ; rue de Lausanne 1110 Morges CHX), Capacitive sensor for measuring a displacement.
  8. Wnuk Vincent P. (Lunenburg MA), Capacitive strain gage having fixed capacitor plates.
  9. Kubota Tomoyuki,JPX, Composite sensor.
  10. Dobson Donald R. (Versailles KY) Williams Robert A. (Lexington KY), Differential capacitive position encoder.
  11. Acar,Cenk, Dual axis rate sensor.
  12. Clark William A. ; Juneau Thor N. ; Lemkin Mark A. ; Roessig Allen W., Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability.
  13. Johnson,Burgess R., Force rebalancing for MEMS inertial sensors using time-varying voltages.
  14. Oppermann Klaus (Eichenallee 31 D-1000 Berlin DEX), Force sensor for electrical measuring of forces, torques, acceleration pressures and mechanical stresses.
  15. Greiff Paul (Wayland MA), Gimballed vibrating wheel gyroscope.
  16. Greiff Paul (Wayland MA) Antkowiak Bernard M. (Oxford MA), Gimballed vibrating wheel gyroscope having strain relief features.
  17. Knowles Stuart J., Inertial rate sensor tuning fork.
  18. Andermo Nils I. (Tby SEX), Measuring device for capacitive determination of the relative position of two with respect to one another moveable parts.
  19. Aigner, Robert; Noe, Reinhold; Sasse, Philipp, Mechanical resonator for a rotation sensor.
  20. Johnson, Burgess R.; Glenn, Max C.; Platt, William P.; Arch, David K.; Weber, Mark W., Methods and systems for simultaneously fabricating multi-frequency MEMS devices.
  21. Lo,Yuan; Ho,Kye Chyn; Lin,Lung Yung; Tsai,Deng Horng; Sche,Schiu, Micro accelerometer.
  22. Pike, William Thomas; Standley, Ian Maxwell; Trnkoczy, Amadej, Micro-machined accelerometer.
  23. Galvin Gregory J. ; Davis Timothy J. ; MacDonald Noel C., Microelectromechanical accelerometer for automotive applications.
  24. Clark William A., Micromachined Z-axis vibratory rate gyroscope.
  25. Galvin Gregory J. ; Davis Timothy J. ; MacDonald Noel C., Micromechanical accelerometer for automotive applications.
  26. Greiff Paul (Wayland MA) Boxenhorn Burton (Chestnut Hill MA), Micromechanical gyroscopic transducer with improved drive and sense capabilities.
  27. Merz, Peter; Weiss, Manfred, Micromechanical inertial sensor for measuring rotation rates.
  28. Neukermans Armand P. (3510 Arbutus Ave. Palo Alto CA 94303) Slater Timothy G. (San Francisco CA), Monolithic silicon rate-gyro with integrated sensors.
  29. Dunn William C. (Mesa AZ), Multi-axes gyroscope.
  30. Hsu Ying W. ; Reeds ; III John W. ; Saunders Christ H., Multi-element micro gyro.
  31. Memishian,John, Multiple axis acceleration sensor.
  32. Nasiri,Steven S.; Seeger,Joseph, Multiple axis accelerometer.
  33. Tanaya,Hideo, Piezoelectric resonator element and piezoelectric device.
  34. Sakai, Minekazu, Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion.
  35. Adams, Scott G.; Miller, Scott A.; Johnson, Wendy Jo H., Sensor for measuring out-of-plane acceleration.
  36. McNeil, Andrew C.; Li, Gary; Koury, Jr., Daniel N., Single proof mass, 3 axis MEMS transducer.
  37. Bennett Paul T. (Phoenix AZ), Tapered cantilever beam for sensors.
  38. Ouchi,Satoshi; Nozoe,Toshiyuki; Nomura,Koji; Tajika,Hirofumi, Thin-film micromechanical resonator, thin-film micromechanical resonator gyro, and navigation system and automobile using the resonator gyro.
  39. Acar,Cenk; Shkel,Andrei M., Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object.
  40. Acar,Cenk; Mao,Minyao, Torsional rate sensor with momentum balance and mode decoupling.
  41. Lin, Yizhen; McNeil, Andrew C., Transducer with decoupled sensing in mutually orthogonal directions.
  42. Mao, Minyao, Tri-axis angular rate sensor.
  43. Haritonidis Joseph H. (Cambridge MA) Howe Roger T. (Belmont MA) Schmidt Martin A. (Brookline MA) Senturia Stephen D. (Boston MA), Turbulent shear force microsensor.
  44. Lin, Yizhen; Miller, Todd F.; Park, Woo Tae, Vertically integrated MEMS acceleration transducer.
  45. Kikuchi,Takayuki; Osugi,Yukihisa, Vibrators and vibratory gyroscopes.
  46. Ng Kay Y. (Kuala Kumpur MYX) Schmidt Martin A. (Reading MA), Wall shear stress sensor.
  47. Ichinose, Toshihiko, Z-axis vibration gyroscope.

이 특허를 인용한 특허 (9)

  1. Zou, Bo; Luo, Hao, MEMS devices sensing both rotation and acceleration.
  2. Stephanou, Philip Jason; Acar, Cenk; Shenoy, Ravindra Vaman; Burns, David William; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur, Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer.
  3. Acar, Cenk; Shenoy, Ravindra V.; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason, Micromachined piezoelectric x-axis gyroscope.
  4. Acar, Cenk; Shenoy, Ravindra V.; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason, Micromachined piezoelectric x-axis gyroscope.
  5. Acar, Cenk; Shenoy, Ravindra V.; Black, Justin Phelps; Petersen, Kurt Edward; Ganapathi, Srinivasan Kodaganallur; Stephanou, Philip Jason, Micromachined piezoelectric z-axis gyroscope.
  6. Ichikawa, Fumio; Okumura, Yoichi; Kikuchi, Takayuki, Physical quantity detection element, physical quantity detection device, and electronic apparatus.
  7. Stephanou, Philip Jason; Burns, David William; Shenoy, Ravindra Vaman, Stacked lateral overlap transducer (SLOT) based three-axis accelerometer.
  8. Stephanou, Philip Jason; Burns, David William; Shenoy, Ravindra Vaman, Stacked lateral overlap transducer (SLOT) based three-axis accelerometer.
  9. Hoffberg, Steven M., Steerable rotating projectile.
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