초록 ▼

The technology disclosed relates to translating between a Cartesian grid and a curved scanning path that produces varying exposure doses as the scanning head traces the curved scanning path. It can be applied to writing to or reading from a workpiece. In particular, we teach use of varying exposure

The technology disclosed relates to translating between a Cartesian grid and a curved scanning path that produces varying exposure doses as the scanning head traces the curved scanning path. It can be applied to writing to or reading from a workpiece. In particular, we teach use of varying exposure dose that compensates for the time it takes for the curved scan path to transit a straight axis. This simplifies either modulation of a modulator, from which data is projected onto the workpiece, or analysis of data collected by a detector, onto which partial images of the workpiece are projected.

대표청구항 ▼

1. A method of adjusting exposing doses that vary and accumulate along first axis of a workpiece as a writer sweeps a curved path that is not parallel to the first axis, the method including: determining a direction of sweep of a scanning head when writing a particular pixel of a rasterized image on

1. A method of adjusting exposing doses that vary and accumulate along first axis of a workpiece as a writer sweeps a curved path that is not parallel to the first axis, the method including: determining a direction of sweep of a scanning head when writing a particular pixel of a rasterized image onto a workpiece or reading a particular pixel from the workpiece;looking up in a computer readable storage medium or calculating a correction factor based at least in part on an angle of the direction of sweep relative to a first axis of the workpiece; andapplying the correction factor for the particular pixel to adjust a cumulative intensity at the workpiece of the particular pixel. 2. The method of claim 1, wherein the correction factor is approximately sinusoidal as the scanning head sweeps an approximately circular arc across the workpiece. 3. The method of claim 2, further including in determining the angle relative to the first axis both the sweep of the scanning head in a first direction and movement of the workpiece in a second direction. 4. The method of claim 2, wherein the scanning head maintains substantially the same projected image orientation relative to the axis through the sweep of the scanning head across the workpiece, further including the projected image orientation relative to the axis when determining the angle. 5. The method of claim 2, further including sensing an angular position of the reading head as part of determining the direction of sweep. 6. The method of claim 2, further including applying the correction factor to an illumination source, whereby the raw image dose is corrected by the strength of the illumination to the corrected image dose. 7. The method of claim 1, further including applying the correction factor to an illumination source, whereby the raw image dose is corrected by the strength of the illumination to the corrected image dose. 8. The method of claim 1, further including sensing an angular position of the writing head as part of determining the direction of sweep. 9. The method of claim 1, further including applying the correction factor to raw image dose data to generate corrected image dose data and driving a modulator with the corrected image dose data. 10. The method of claim 1, further including applying the correction factor to raw image dose data to generate corrected image dose data and driving a modulator with the corrected image dose data. 11. A cumulative intensity adjusting device including: a sweep direction calculator that determines the direction of sweep of the scanning head when a particular pixel of a rasterized image is written onto a workpiece;a lookup memory or program function that determines a correction factor that is based at least in part on an angle of the direction of sweep relative to the axis; anda correction calculator that is coupled to the sweep direction calculator and the lookup memory or program function, wherein the correction calculator uses the least the direction of sweep to determine the correction factor, the correction calculator applies the correction factor to a raw pixel value, and outputs a corrected pixel value to memory. 12. The device of claim 11, wherein the correction factor is approximately sinusoidal as the scanning head sweeps an approximately circular arc across the workpiece. 13. The device of claim 12, wherein the correction calculator further uses at least the angle the sweep of the scanning head in a first direction and movement of the workpiece in a second direction to determine the correction factor. 14. The device of claim 11, wherein the scanning head maintains substantially the same projected image orientation relative to the axis through the sweep of the scanning head across the workpiece, wherein the correction calculator further uses at least the projected image orientation of the scanning head relative to the axis when determining the angle. 15. The device of claim 11, further including a sensing device coupled to the sweep direction calculator that senses an angular position of the writing head. 16. The device of claim 11, further including a dose calculator that applies the correction factor to raw image dose data to generate corrected image dose data; and a modulator coupled to the dose calculator and response to the corrected image dose data. 17. The device of claim 11, further including an illumination adjuster that applies the correction factor to an illumination system, whereby the raw image dose is corrected by the strength of the illumination to the corrected image dose. 18. The device of claim 11, coupled with a sensing device that senses an angular position of the reading head as part of determining the direction of sweep. 19. The device of claim 18, further including a dose calculator that applies the correction factor to raw image dose data to generate corrected image dose data; and drives a modulator coupled to the dose calculator and response to the corrected image dose data. 20. The device of claim 18, further including an illumination adjuster that applies the correction factor to an illumination system, whereby the raw image dose is corrected by the strength of the illumination to the corrected image dose.