|국가/구분||United States(US) Patent 등록|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 5 인용 특허 : 62|
A monitoring system for monitoring fluid in a fluid supply vessel during operation including dispensing of fluid from the fluid supply vessel. The monitoring system includes (i) one or more sensors for monitoring a characteristic of the fluid supply vessel or the fluid dispensed therefrom, (ii) a data acquisition module operatively coupled to the one or more sensors to receive monitoring data therefrom and responsively generate an output correlative to the characteristic monitored by the one or more sensors, and (iii) a processor and display operatively ...
1. A system for monitoring fluid inventory during dispensing and to an end-point dispensing condition of at least one fluid supply vessel in a gas box, wherein the at least one fluid supply vessel is arranged to supply fluid to an ion implanter tool, said system comprising: a monitoring assembly adapted to monitor at least one characteristic of the fluid supply vessel in the gas box when in dispensing operation or at least one characteristic of fluid supplied by said fluid supply vessel in the gas box when in dispensing operation, and to transmit a monit...