IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0169459
(2011-06-27)
|
등록번호 |
US-8567214
(2013-10-29)
|
우선권정보 |
JP-2010-146549 (2010-06-28) |
발명자
/ 주소 |
- Miyasaka, Junko
- Koike, Akio
- Ogawa, Tomonori
- Kawagishi, Masahiro
|
출원인 / 주소 |
- Asahi Glass Company, Limited
|
대리인 / 주소 |
Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
|
인용정보 |
피인용 횟수 :
0 인용 특허 :
18 |
초록
▼
The present invention relates to a method for producing a glass body containing: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in a flame projected from a burner to form glass fine particles; and depositing and growing the formed glass fine particles on a base
The present invention relates to a method for producing a glass body containing: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in a flame projected from a burner to form glass fine particles; and depositing and growing the formed glass fine particles on a base material, in which a raw material mixed gas containing a gas of the silicon compound, a gas of the compound containing a metal serving as a dopant, and either one of a combustible gas and a combustion supporting gas is fed into a central nozzle (A) positioning in the center of the burner; the other gas of the combustible gas and the combustion supporting gas is fed into a nozzle (B) different from the central nozzle (A) of the burner; a combustible gas or a combustion supporting gas is arbitrarily fed into a nozzle different from the nozzles (A) and (B); and a flow rate of the raw material mixed gas is 50% or more and not more than 90% of the largest flow rate among flow rate(s) of the combustible gas(ses) and the combustion supporting gas(ses) fed from other nozzle or nozzles than the central nozzle (A).
대표청구항
▼
1. A method for producing a glass body, the method comprising: feeding a raw material mixed gas through a central nozzle (A) positioned in a central portion of a burner, the raw material mixed gas comprising a gas of a silicon compound, a gas of a compound comprising a metal dopant, and a combustibl
1. A method for producing a glass body, the method comprising: feeding a raw material mixed gas through a central nozzle (A) positioned in a central portion of a burner, the raw material mixed gas comprising a gas of a silicon compound, a gas of a compound comprising a metal dopant, and a combustible gas;feeding a combustible gas through a first nozzle directly adjacent to the central nozzle (A);feeding a combustible gas or a combustion supporting gas through a second nozzle (B) different from the first nozzle and the central nozzle (A) of the burner;optionally feeding a combustible gas, a combustion supporting gas, a mixed gas comprising a combustible gas, or a mixed gas comprising a combustion supporting gas through at least one nozzle (C) different from the central nozzle (A), the first nozzle, and the second nozzle (B);hydrolyzing the silicon compound and the compound comprising the metal dopant, in a flame projected from the burner, to form glass fine particles; andgrowing the glass fine particles on a base material,wherein a flow rate of the raw material mixed gas is 50% or more and not more than 90% of a largest flow rate among flow rate(s) of the combustible gas(es) and the combustion supporting gas(es) fed through a nozzle or nozzles other than the central nozzle (A), andthe largest flow rate is provided in the first nozzle. 2. The method for producing a glass body according to claim 1, further comprising: feeding a noncombustible gas through a nozzle provided between a nozzle through which a combustible gas or a mixed gas comprising a combustible gas is fed and a nozzle through which a combustion supporting gas or a mixed gas comprising a combustion supporting gas is fed. 3. The method for producing a glass body according to claim 1, wherein the burner comprises the at least one nozzle (C) through which a combustible gas, a combustion supporting gas, a mixed gas comprising a combustible gas, or a mixed gas comprising a combustion supporting gas is fed, anda flow rate of a gas fed through a nozzle spatially farthest from the central nozzle (A) is not more than 95% of the flow rate of the raw material mixed gas. 4. The method for producing a glass body according to claim 1, wherein the burner has a multitubular structure. 5. The method for producing a glass body according to claim 4, wherein the burner comprises the central nozzle (A), a first peripheral nozzle which is the first nozzle directly adjacent to the central nozzle (A) and surrounding the central nozzle (A), a second peripheral nozzle surrounding the first peripheral nozzle, and a third peripheral nozzle which is the second nozzle (B) surrounding the second peripheral nozzle;a noncombustible gas is fed through the second peripheral nozzle; anda combustion supporting gas is fed through the third peripheral nozzle. 6. The method for producing a glass body according to claim 1, wherein the metal dopant is Ti. 7. The method for producing a glass body according to claim 1, wherein the raw material mixed gas is fed such that a mass of a finally obtained glass body is 50 kg or more. 8. A method for producing an optical member for EUV lithography, comprising: forming a member from a glass body produced by the method according to claim 1. 9. The method for producing a glass body according to claim 1, wherein the flow rate of the raw material mixed gas is 60% or more and not more than 80% of the largest flow rate among flow rate(s) of the combustible gas(es) and the combustion supporting gas(es) fed through a nozzle or nozzles other than the central nozzle (A). 10. The method for producing a glass body according to claim 2, wherein the noncombusible gas is fed at a flow rate which is smaller than the flow rate of the raw material mixed gas, a flow rate of the combustible gas, and a flow rate of the combustion supporting gas. 11. The method for producing a glass body according to claim 3, wherein the flow rate of the gas fed through the nozzle spatially farthest from the central nozzle (A) is more than 30% of the flow rate of the raw material mixed gas. 12. A method for producing a glass body, the method comprising: feeding a raw material mixed gas through a central nozzle (A) positioned in a central portion of a burner, the raw material mixed gas comprising a gas of a silicon compound, a gas of a compound comprising a metal dopant, and a combustible gas;feeding a noncombustible gas through a first nozzle directly adjacent to the central nozzle (A);feeding a combustion supporting gas through a second nozzle (B) directly adjacent to the first nozzle;optionally feeding a combustible gas, a combustion supporting gas, a mixed gas comprising a combustible gas, or a mixed gas comprising a combustion supporting gas through at least one nozzle (C) different from the central nozzle (A), the first nozzle, and the second nozzle (B);hydrolyzing the silicon compound and the compound comprising the metal dopant, in a flame projected from the burner, to form glass fine particles; andgrowing the glass fine particles on a base material,wherein a flow rate of the raw material mixed gas is 50% or more and not more than 90% of a largest flow rate among flow rate(s) of the combustible gas(es) and the combustion supporting gas(es) fed through a nozzle or nozzles other than the central nozzle (A), andthe largest flow rate is provided in the second nozzle (B). 13. The method for producing a glass body according to claim 12, wherein the burner has a multitubular structure. 14. The method for producing a glass body according to claim 13, wherein the burner comprises the central nozzle (A), a first peripheral nozzle which is the first nozzle directly adjacent to the central nozzle (A) and surrounding the central nozzle (A), and a second peripheral nozzle which is the second nozzle (B) and surrounds the first peripheral nozzle. 15. The method for producing a glass body according to claim 12, wherein the burner comprises the at least one nozzle (C) through which a combustible gas, a combustion supporting gas, a mixed gas comprising a combustible gas, or a mixed gas comprising a combustion supporting gas is fed, anda flow rate of a gas fed through a nozzle spatially farthest from the central nozzle (A) is not more than 95% of the flow rate of the raw material mixed gas. 16. The method for producing a glass body according to claim 12, wherein the metal dopant is Ti. 17. The method for producing a glass body according to claim 12, wherein the raw material mixed gas is fed such that a mass of a finally obtained glass body is 50 kg or more. 18. A method for producing an optical member for EUV lithography, comprising: forming a member from a glass body produced by the method according to claim 12. 19. The method for producing a glass body according to claim 12, wherein the flow rate of the raw material mixed gas is 60% or more and not more than 80% of the largest flow rate among flow rate(s) of the combustible gas(es) and the combustion supporting gas(es) fed through a nozzle or nozzles other than the central nozzle (A). 20. The method for producing a glass body according to claim 12, wherein the noncombusible gas is fed at a flow rate which is smaller than the flow rate of the raw material mixed gas, a flow rate of the combustible gas, and a flow rate of the combustion supporting gas.
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