Fluid recirculation system for use in vapor phase particle production system
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B01J-019/08
C22B-009/21
출원번호
US-0151765
(2008-05-08)
등록번호
US-8574408
(2013-11-05)
발명자
/ 주소
Layman, Fredrick P.
출원인 / 주소
SDCmaterials, Inc.
대리인 / 주소
Morrison & Foerster LLP
인용정보
피인용 횟수 :
37인용 특허 :
209
초록▼
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor ma
A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.
대표청구항▼
1. A method of recirculating a fluid in a particle production system, the method comprising: producing a reactive particle-gas mixture from a precursor material and a working gas in a particle production reactor;receiving a conditioning fluid at a fluid inlet of a quench chamber and receiving the re
1. A method of recirculating a fluid in a particle production system, the method comprising: producing a reactive particle-gas mixture from a precursor material and a working gas in a particle production reactor;receiving a conditioning fluid at a fluid inlet of a quench chamber and receiving the reactive particle-gas mixture from the particle production reactor at a reactive mixture inlet of the quench chamber;mixing the conditioning fluid with the reactive particle-gas mixture in the quench chamber, thereby producing a cooled particle-gas mixture, the cooled particle-gas mixture comprising a plurality of precursor material particles and an output fluid, the output fluid including the conditioning fluid;receiving and filtering the output fluid from the quench chamber using a filter element, thereby producing a filtered output;receiving and controlling the temperature of the filtered output using a temperature control module, thereby producing a temperature-controlled, filtered output;receiving and modulating a content ratio of the temperature-controlled, filtered output using a content ratio control module, thereby producing a content-controlled, temperature-controlled, filtered output, wherein the temperature-controlled, filtered output comprises a distinct primary fluid and a distinct secondary fluid, and the content ratio is the ratio of the primary fluid to the secondary fluid; andsupplying the content-controlled, temperature-controlled, filtered output to the fluid inlet of the quench chamber using a channeling element, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in quenching the reactive particle-gas mixture. 2. The method of claim 1, wherein producing a reactive particle-gas mixture comprises: energizing the working gas to form a plasma; andapplying the plasma to the precursor material, thereby producing the reactive particle-gas mixture. 3. The method of claim 1, further comprising generating a suction force at the cooled mixture outlet of the quench chamber to draw the output fluid from the quench chamber using a suction generator. 4. The method of claim 1, wherein the filter element removes the plurality of precursor material particles from the output fluid to produce the filtered output. 5. The method of claim 4, wherein the filter element comprises a high efficiency particulate air (HEPA) filter. 6. The method of claim 1, further comprising reducing the pressure of the filtered output if the pressure exceeds a predetermined threshold using a pressure relief module. 7. The method of claim 1, wherein the temperature control module comprises a heat exchanger. 8. The method of claim 1, wherein modulating the content ratio comprises: sensing the content ratio of the temperature-controlled, filtered output using a sensor;producing a signal representing the sensed content ratio;receiving the signal from the sensor at a micro controller; andmodulating the content ratio of the content-controlled, temperature-controlled, filtered output that is to be supplied to the fluid inlet of the quench chamber based on the received signal using the micro controller. 9. The method of claim 8, further comprising: receiving the temperature-controlled, filtered output from the temperature control module at a buffer reservoir; andtemporarily storing the temperature-controlled, filtered output in the buffer reservoir before the content ratio of the temperature-controlled, filtered output is modulated. 10. The method of claim 9, wherein the modulating the content ratio further comprises venting the secondary fluid from the buffer reservoir to the ambient atmosphere using a fluid relief valve. 11. The method of claim 9, wherein modulating the content ratio further comprises: storing a supply of the secondary fluid in a secondary fluid supply reservoir; andselectively adding a portion of the secondary fluid from the secondary fluid supply reservoir into the temperature-controlled, filtered output in response to a signal from the micro-controller using a secondary fluid supply valve, thereby producing the content-controlled, temperature-controlled, filtered output. 12. The method of claim 11, wherein modulating the content ratio further comprises: storing a supply of the primary fluid in a primary fluid supply reservoir; andselectively adding a portion of the primary fluid from the primary fluid supply reservoir into the temperature-controlled, filtered output using a primary fluid supply valve in response to a signal from the micro-controller, thereby producing the content-controlled, temperature-controlled, filtered output. 13. A method of recirculating a fluid in a particle production system, the method comprising: producing a reactive particle-gas mixture from a precursor material and a working gas;mixing a conditioning fluid with the reactive particle-gas mixture in a quench chamber to produce a cooled particle-gas mixture, the cooled particle-gas mixture comprising a plurality of precursor material particles and an output fluid, the output fluid including the conditioning fluid;filtering the output fluid to produce a filtered output;controlling the temperature of the filtered output to produce a temperature-controlled, filtered output;modulating a content ratio of the temperature-controlled, filtered output to produce a content-controlled, temperature-controlled, filtered output, wherein the temperature-controlled, filtered output comprises a distinct primary fluid and a distinct secondary fluid, and the content ratio is the ratio of the primary fluid to the secondary fluid; andsupplying the content-controlled, temperature-controlled, filtered output to a fluid inlet of the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in quenching the reactive particle-gas mixture. 14. The method of claim 13, wherein producing a reactive particle-gas mixture comprises: energizing the working gas to form a plasma; andapplying the plasma to the precursor material to produce the reactive particle-gas mixture. 15. The method of claim 13, further comprising generating a suction force at the cooled mixture outlet of the quench chamber to draw the output fluid from the quench chamber. 16. The method of claim 13, wherein filtering the output comprises removing the plurality of precursor material particles from the output fluid. 17. The method of claim 13, further comprising reducing the pressure of the filtered output if the pressure exceeds a predetermined threshold. 18. The method of claim 13, wherein modulating the content ratio comprises: sensing the content ratio of the temperature-controlled, filtered output;producing a signal representing the sensed content ratio;modulating the content ratio of the content-controlled, temperature-controlled, filtered output that is to be supplied to the fluid inlet of the quench chamber based on the content ratio of the temperature-controlled, filtered output. 19. The method of claim 18, further comprising: receiving the temperature-controlled, filtered output from the temperature control module at a buffer reservoir; andtemporarily storing the temperature-controlled, filtered output in the buffer reservoir before the content ratio of the temperature-controlled, filtered output is modulated. 20. The method of claim 19, wherein modulating the content ratio further comprises venting the secondary fluid from the buffer reservoir to the ambient atmosphere. 21. The method of claim 19, wherein modulating the content ratio further comprises: storing a supply of the secondary fluid in a secondary fluid supply reservoir; andselectively adding a portion of the secondary fluid from the secondary fluid supply reservoir into the temperature-controlled, filtered output. 22. The method of claim 21, wherein modulating the content ratio further comprises: storing a supply of the primary fluid in a primary fluid supply reservoir; andselectively adding a portion of the primary fluid from the primary fluid supply reservoir into the temperature-controlled, filtered output.
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