Embodiments of impedance matching networks are provided herein. In some embodiments, an impedance matching network may include a coaxial resonator having an inner and an outer conductor. A tuning capacitor may be provided for variably controlling a resonance frequency of the coaxial resonator. The t
Embodiments of impedance matching networks are provided herein. In some embodiments, an impedance matching network may include a coaxial resonator having an inner and an outer conductor. A tuning capacitor may be provided for variably controlling a resonance frequency of the coaxial resonator. The tuning capacitor may be formed by a first tuning electrode and a second tuning electrode and an intervening dielectric, wherein the first tuning electrode is formed by a portion of the inner conductor. A load capacitor may be provided for variably coupling energy from the inner conductor to a load. The load capacitor may be formed by the inner conductor, an adjustable load electrode, and an intervening dielectric.
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1. An impedance matching network, comprising: a coaxial resonator having an inner conductor, a middle conductor, an outer conductor, and a dielectric tube disposed between the inner conductor and the middle conductor, wherein the outer conductor is folded to form at least one of the inner conductor
1. An impedance matching network, comprising: a coaxial resonator having an inner conductor, a middle conductor, an outer conductor, and a dielectric tube disposed between the inner conductor and the middle conductor, wherein the outer conductor is folded to form at least one of the inner conductor or the middle conductor, and wherein the middle conductor is coupled to an input to receive power and substantially coaxially surrounds at least a portion of the inner conductor;a tuning capacitor for variably controlling a resonance frequency of the coaxial resonator formed by the inner conductor, the middle conductor and the dielectric tube; anda load capacitor for variably coupling energy from the inner conductor to a load, the load capacitor formed by the inner conductor, an adjustable load electrode, and an intervening dielectric. 2. The impedance matching network of claim 1, wherein the load capacitor comprises an output configured to be connected to a load. 3. The impedance matching network of claim 1, wherein the inner conductor, the middle conductor, and the outer conductor are fabricated from aluminum (Al). 4. The impedance matching network of claim 1, wherein the inner conductor further comprises a dielectric material disposed on an outer surface thereof. 5. The impedance matching network of claim 4, wherein the dielectric material comprises one of polytetrafluoroethylene (PTFE) or polystyrene. 6. The impedance matching network of claim 1, wherein the load capacitor further comprises: a dielectric saddle disposed over an end of the inner conductor and movable along a longitudinal axis with respect to the inner conductor; andwherein the adjustable load electrode comprises a conductive ring disposed about an outer surface of the dielectric saddle. 7. The impedance matching network of claim 6, wherein the dielectric saddle comprises one of polytetrafluoroethylene (PTFE) or polystyrene. 8. The impedance matching network of claim 6, wherein the conductive ring further comprises at least one of copper (Cu) or beryllium (Be). 9. The impedance matching network of claim 6, wherein the load capacitor further comprises a position control mechanism for controlling an overlap between the conductive ring and the end of the inner conductor. 10. The impedance matching network of claim 9, wherein the position control mechanism further comprises: a threaded shaft interfacing with the dielectric saddle for controlling the position thereof via rotation of the threaded shaft; andan actuator connected to the threaded shaft to control the rotation thereof. 11. The impedance matching network of claim 10, wherein the actuator comprises a servo motor or a stepper motor. 12. The impedance matching network of claim 6, wherein the inner conductor further comprises a rounded end. 13. The impedance matching network of claim 1, wherein the load capacitor further comprises a position control mechanism for controlling a distance defined between the adjustable load electrode and the inner conductor. 14. The impedance matching network of claim 1, wherein the dielectric tube is movably disposed between the inner conductor and the middle conductor and having a controllable overlap therewith, the amount of overlap defining a total dielectric value of the dielectric tube. 15. The impedance matching network of claim 14, further comprising: a position control mechanism coupled to the dielectric tube for adjusting the position of the dielectric tube with respect to the inner conductor and the middle conductor. 16. The impedance matching network of claim 1, further comprising: a conductive plate disposed within the outer conductor, the conductive plate having a through hole formed proximate a center of the conductive plate, wherein the middle conductor is coupled to the conductive plate and disposed within the through hole, and wherein the inner conductor is disposed within the through hole without making contact with the conductive plate. 17. The impedance matching network of claim 1, wherein the coaxial resonator is terminated at opposing ends by a short circuit end and an open circuit end, and wherein the load capacitor is disposed proximate the open circuit end. 18. The impedance matching network of claim 17, wherein the inner conductor and middle conductor are shorted at the open circuit end. 19. A substrate processing system, comprising: a process chamber having a substrate support disposed therein;one or more electrodes for coupling RF power into the process chamber; andone or more RF power sources coupled to the one or more electrodes through the impedance matching network of claim 1. 20. The substrate processing system of claim 19, further comprising: one or more detectors to sense a magnitude and polarity of RF power reflected from a load during operation of the substrate processing system; anda controller to vary the tuning capacitor in response to a signal corresponding to the sensed phase of the reflected RF power and to vary the load capacitor in response to a signal corresponding to the sensed magnitude of the reflected RF power. 21. An impedance matching network, comprising: a coaxial resonator having a folded structure providing a more compact physical length as compared to its electrical length, the coaxial resonator comprising: an outer conductor folded to form an inner conductor and a middle conductor, wherein the middle conductor is coupled to an input to receive power and substantially coaxially surrounds at least a portion of the inner conductor;a tuning capacitor for variably controlling a resonance frequency of the coaxial resonator formed by the inner conductor, the middle conductor and a dielectric tube movably disposed between the inner conductor and the middle conductor; anda load capacitor for variably coupling energy from the inner conductor to a load, the load capacitor formed by the inner conductor, an adjustable load electrode, and an intervening dielectric. 22. The impedance matching network of claim 21, wherein the tuning capacitor comprises a position control mechanism coupled to the dielectric tube for adjusting the position of the dielectric tube with respect to the inner conductor and the middle conductor, and wherein the load capacitor comprises a position control mechanism for controlling a distance defined between the adjustable load electrode and the inner conductor. 23. A substrate processing system, comprising: a process chamber having a substrate support disposed therein;one or more electrodes for coupling RF power into the process chamber;one or more RF power sources coupled to the one or more electrodes through the impedance matching network of claim 21;one or more detectors to sense a magnitude and polarity of RF power reflected from a load during operation of the substrate processing system; anda controller to vary the tuning capacitor in response to a signal corresponding to the sensed phase of the reflected RF power and to vary the load capacitor in response to a signal corresponding to the sensed magnitude of the reflected RF power. 24. An impedance matching network, comprising: a coaxial resonator having a folded structure providing a more compact physical length as compared to its electrical length, the coaxial resonator comprising: an inner conductor;an outer conductor folded to form a middle conductor, wherein the middle conductor is coupled to an input to receive power and substantially coaxially surrounds at least a portion of the inner conductor;a tuning capacitor for variably controlling a resonance frequency of the coaxial resonator formed by the inner conductor, the middle conductor and a dielectric tube movably disposed between the inner conductor and the middle conductor; anda load capacitor for variably coupling energy from the inner conductor to a load, the load capacitor formed by the inner conductor, an adjustable load electrode, and an intervening dielectric. 25. The impedance matching network of claim 24, wherein the tuning capacitor comprises a position control mechanism coupled to the dielectric tube for adjusting the position of the dielectric tube with respect to the inner conductor and the middle conductor, and wherein the load capacitor comprises a position control mechanism for controlling a distance defined between the adjustable load electrode and the inner conductor. 26. A substrate processing system, comprising: a process chamber having a substrate support disposed therein;one or more electrodes for coupling RF power into the process chamber;one or more RF power sources coupled to the one or more electrodes through the impedance matching network of claim 24;one or more detectors to sense a magnitude and polarity of RF power reflected from a load during operation of the substrate processing system; anda controller to vary the tuning capacitor in response to a signal corresponding to the sensed phase of the reflected RF power and to vary the load capacitor in response to a signal corresponding to the sensed magnitude of the reflected RF power.
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