IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0930186
(2010-12-30)
|
등록번호 |
US-8584522
(2013-11-19)
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발명자
/ 주소 |
- Acar, Cenk
- Shenoy, Ravindra Vaman
- Black, Justin Phelps
- Petersen, Kurt Edward
- Ganapathi, Srinivasan Kodaganallur
- Stephanou, Philip Jason
|
출원인 / 주소 |
- QUALCOMM MEMS Technologies, Inc.
|
대리인 / 주소 |
Weaver Austin Villeneuve & Sampson, LLP
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인용정보 |
피인용 횟수 :
12 인용 특허 :
48 |
초록
▼
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive
This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Some gyroscopes include a drive frame, a central anchor and a plurality of drive beams disposed on opposing sides of the central anchor. The drive beams may connect the drive frame to the central anchor. The drive beams may include a piezoelectric layer and may be configured to cause the drive frame to oscillate torsionally in a plane of the drive beams. The gyroscope may also include a proof mass and a plurality of piezoelectric sense beams. At least some components may be formed from plated metal. The drive frame may be disposed within the proof mass. The drive beams may constrain the drive frame to rotate substantially in the plane of the drive beams. Such devices may be included in a mobile device, such as a mobile display device.
대표청구항
▼
1. A gyroscope, comprising: a drive frame;a central anchor;a plurality of drive beams disposed on opposing sides of the central anchor, the drive beams connecting the drive frame to the central anchor, each of the drive beams including a piezoelectric layer and configured to cause the drive frame to
1. A gyroscope, comprising: a drive frame;a central anchor;a plurality of drive beams disposed on opposing sides of the central anchor, the drive beams connecting the drive frame to the central anchor, each of the drive beams including a piezoelectric layer and configured to cause the drive frame to oscillate torsionally in a plane of the drive beams;a proof mass; anda plurality of sense beams including a layer of piezoelectric sense electrodes, the sense beams configured for connecting the drive frame to the proof mass, the sense beams being configured to bend in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation, causing a piezoelectric charge in the sense electrodes wherein the sense beams are tapered sense beams having a width that decreases with increasing distance from the anchor. 2. The gyroscope of claim 1, wherein the plurality of drive beams is further configured to constrain the drive frame to rotate substantially in the plane of the drive beams. 3. The gyroscope of claim 1, wherein the plurality of drive beams includes a first pair of drive beams disposed on a first side of the central anchor and a second pair of drive beams disposed on an opposing side of the central anchor. 4. The gyroscope of claim 1, wherein the drive frame is disposed within the proof mass. 5. The gyroscope of claim 1, wherein the sense beams are configured to bend in the sense plane in response to sense motion of the proof mass. 6. The gyroscope of claim 1, wherein the sense beams are loaded due to forces exerted by the drive beams. 7. The gyroscope of claim 1, wherein the proof mass is formed, at least in part, from plated metal. 8. The gyroscope of claim 3, wherein the first pair of drive beams and the second pair of drive beams are configured to generate drive oscillations via a differential piezoelectric drive. 9. The gyroscope of claim 5, wherein the drive frame is substantially decoupled from the sense motion of the proof mass. 10. The gyroscope of claim 1, wherein bending stresses along the tapered sense beams are substantially uniform with increasing distance from the anchor when the gyroscope is operating in a sense mode. 11. A gyroscope, comprising: a drive frame;a substrate;anchor means connected to the substrate and disposed within the drive frame means;drive means for connecting the drive frame means to the anchor means, the drive means configured to cause the drive frame means to oscillate torsionally in a plane of the drive means, the drive means being further configured to constrain the drive frame means to rotate substantially in the plane of the drive means;proof mass means disposed around the drive means, the proof mass means configured for sense motions wherein the proof mass means bends in a sense plane in response to an applied angular rotation, the sense plane being substantially perpendicular to the plane of the drive means, the sense motions of the proof mass means being substantially decoupled from motions of the drive frame means; andsense means for connecting the drive means to the proof mass means, the sense motions of the proof mass means causing a piezoelectric charge in the sense means, wherein the sense means include tapered sense beams having a width that decreases with increasing distance from the anchor means. 12. The gyroscope of claim 11, wherein the drive means includes a first pair of drive beams disposed on a first side of the anchor means and a second pair of drive beams disposed on an opposing side of the anchor means. 13. The gyroscope of claim 11, the sense means being further configured to bend in the sense plane in response to the sense motions of the proof mass means. 14. The gyroscope of claim 11, wherein forces exerted by the drive means axially load the sense means. 15. A gyroscope, comprising: a central anchor;a proof mass disposed around the central anchor, the proof mass having a first end and a second end;a first drive beam connecting a first side of the central anchor to the first end of the proof mass;a second drive beam connecting a second side of the central anchor to the second end of the proof mass;a first pair of piezoelectric drive electrodes disposed on the first drive beam;a second pair of piezoelectric drive electrodes disposed on the second drive beam;a first piezoelectric sense electrode disposed on the first drive beam; anda second piezoelectric sense electrode disposed on the second drive beam,wherein the first pair and the second pair of piezoelectric drive electrodes are configured, via a differential piezoelectric drive, to cause the proof mass to oscillate torsionally in a plane of the drive beams, andwherein the proof mass is configured for sense motions wherein the proof mass bends in a sense plane in response to an applied angular rotation, the sense plane being substantially perpendicular to the plane of the drive beams, the sense motions of the proof mass causing a piezoelectric charge in the sense electrodes. 16. The gyroscope of claim 15, wherein the first and second pairs of piezoelectric drive electrodes and the first and second piezoelectric sense electrodes include a piezoelectric film. 17. The gyroscope of claim 15, wherein the proof mass is formed, at least in part, from plated metal. 18. The gyroscope of claim 15, wherein at least one of the first drive beam and the second drive beam include a central slot. 19. The gyroscope of claim 18, wherein the pairs of drive electrodes are disposed on opposite sides of the central slot.
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