초록 ▼

Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin project

Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove.

대표청구항 ▼

1. An apparatus comprising: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container;a positioning pin projecting from the tabl

1. An apparatus comprising: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container;a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;a nozzle configured to charge the gas into the container through the charging inlet;a drive unit configured to move the nozzle into contact with the charging inlet of the container only after the positioning pin is engaged with the positioning groove and a distance is secured between the container and the table, wherein the nozzle is projected from the table; anda sensor configured to detect when the positioning pin is engaged with the positioning groove, the drive unit being configured to move the nozzle in response to a detection signal from the sensor. 2. The apparatus according to claim 1, wherein: the drive unit moves the nozzle between a standby position and a contact position where the nozzle comes into contact with the charging inlet of the container; andwhen the nozzle is located at the standby position, a position of the upper end of the nozzle is lower than a position of the charging inlet of the container when the positioning pin is engaged with the positioning groove. 3. The apparatus according to claim 1, wherein a discharging outlet is disposed on the bottom surface of the container, the apparatus further comprising: a second nozzle configured to discharge the gas from the container through the discharging outlet; wherein the driving unit moves the second nozzle into contact with the discharging outlet of the container after the positioning pin is engaged with the positioning groove. 4. The apparatus according to claim 1, further comprising: a base on which the table is moveably supported; anda sliding unit configured to slide the table on the base in a horizontal direction; whereinthe driving unit moves the nozzle in a vertical direction. 5. An apparatus comprising: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a discharging outlet through which a gas is discharged from the container;a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;a nozzle configured to discharge the gas from the container through the discharging outlet thereof;a drive unit configured to move the nozzle into contact with the discharging outlet of the container only after the positioning pin is engaged with the positioning groove and a distance is secured between the container and the table, wherein the nozzle is projected from the table; anda sensor configured to detect when the positioning pin is engaged with the positioning groove, the drive unit being configured to move the nozzle in response to a detection signal from the sensor. 6. A method comprising: positioning a container, that stores an object therein, on a table, the container including a bottom surface provided with a positioning groove and including a charging inlet thereon, and a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;detecting, using a sensor, when the positioning pin is engaged with the positioning groove;moving a nozzle, that is configured to charge a gas into the container, into contact with the charging inlet of the container only after the positioning pin is engaged with the positioning groove and a distance is secured between the container and the table in response to a detection signal from the sensor; andcharging the gas from the nozzle into the container through the charging inlet, wherein the nozzle is projected from the table. 7. A method comprising: positioning a container, that stores an object therein, on a table, the container including a bottom surface provided with a positioning groove and including a discharging outlet, and a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;detecting, using a sensor, when the positioning pin is engaged with the positioning groove;moving a nozzle, that is configured to discharge a gas from the container, into contact with the discharging outlet of the container only after the positioning pin is engaged with the positioning groove and a distance is secured between the container and the table in response to a detection signal from the sensor; anddischarging the gas from the container into the nozzle through the discharging outlet, wherein the nozzle is projected from the table. 8. An apparatus comprising: a table configured to receive a container that stores an object therein, the container including a gas inlet through which a gas is charged into the container;a positioning mechanism configured to position the container onto the table;a charging unit configured to charge the gas into the container through the gas inlet;a moving mechanism configured to move the charging unit between a first position and a second position, the charging unit in the first position not interfering the positioning of the container onto the table, and the charging unit in the second position contacting with the gas inlet of the container, the moving mechanism only moving the charging unit into the second position after the positioning mechanism positions the container onto the table and a distance is secured between the container and the table, wherein the charging unit is projected from the table; anda sensor configured to detect when the positioning mechanism positions the container onto the table, the moving mechanism being configured to move the charging unit in response to a detection signal from the sensor. 9. An apparatus comprising: a table configured to receive a container that stores an object therein, the container including a gas inlet through which a gas is charged into the container;positioning means for positioning the container onto the table;charging means for charging the gas into the container through the gas inlet;moving means for moving the charging means between a first position and a second position, the charging means in the first position not interfering the positioning of the container onto the table, and the charging means in the second position contacting with the gas inlet of the container, the moving means only moving the charging means to the second position after the positioning meaning means positions the container onto the table and a distance is secured between the container and the table, wherein the charging means is projected from the table; andsensing means for detecting when the positioning meaning means positions the container onto the table, the moving means being configured to move the charging means in response to a detection signal from the sensing means. 10. A load port, comprising: a table configured to receive a FOUP (front opening unified pod), a first positioning portion being provided on the table, the FOUP including a bottom surface including a gas inlet and a second positioning portion to engage with the first positioning portion;a sensor configured to detect when the first and second positioning portions being engaged with each other and determine that the FOUP is properly positioned on the table;a nozzle configured to charge a gas into the FOUP through the gas inlet;a moving unit configured to translate the nozzle between a first position and a second position in response to a detection signal from the sensor, the nozzle in the first position not interfering the positioning of the FOUP onto the table, and the nozzle in the second position contacting the gas inlet of the FOUP and charging the gas into the FOUP through the gas inlet, the moving unit only translating the nozzle to the second position after the detection signal from the sensor indicates that the first and second positioning portions are engaged with each other and a distance is secured between the FOUP and the table, wherein the nozzle is projected from the table. 11. The apparatus according to claim 1, further comprising the container, wherein the container is disposed on the table. 12. The apparatus according to claim 5, further comprising the container, wherein the container is disposed on the table. 13. The apparatus according to claim 8, further comprising the container, wherein the container is disposed on the table. 14. The apparatus according to claim 9, further comprising the container, wherein the container is disposed on the table. 15. The load port according to claim 10, further comprising the FOUP, wherein the FOUP is disposed on the table. 16. An apparatus comprising: a table, that is horizontally movably supported, configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container;a positioning pin projecting from the table and adapted to engage with the positioning groove of the container;a nozzle configured to charge the gas into the container through the charging inlet; anda drive unit configured to bring the nozzle into contact with the charging inlet of the container in a state of securing distance between the container and the table only after the positioning pin is engaged with the positioning groove and a distance is secured between the container and the table, wherein the nozzle is projected from the table; anda sensor configured to detect when the positioning pin is engaged with the positioning groove, the drive unit being configured to bring the nozzle into contact with the charging inlet in response to a detection signal from the sensor.