초록 ▼

A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated

A flap transfer valve is disclosed for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber having an elongated first opening, which is surrounded in the form of a frame by a first sealing surface on a first sealing plane, and an elongated valve closure beam, having a second sealing surface which corresponds to the first sealing surface, can be brought into gas-tight contact with it, and is located on a second sealing plane. A support is arranged on the rear face of the valve closure beam, which is arranged such that it can pivot through a limited pivoting angle about a tilting axis. The support together with the valve closure beam can pivot about a pivoting axis, which lies on the first sealing plane, and the tilting axis lies on the second sealing plane.

대표청구항 ▼

1. Flap transfer valve for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber which can be isolated in a gas-tight manner, having an elongated first opening, which extends along a first longitudinal axis and is surrounded in the form of

1. Flap transfer valve for the transfer of semiconductor elements or substrates into a semiconductor or substrate processing process chamber which can be isolated in a gas-tight manner, having an elongated first opening, which extends along a first longitudinal axis and is surrounded in the form of a frame by a first sealing surface which lies on a first sealing plane, wherein the entire first sealing surface lies on the first sealing plane,an elongated valve closure beam,which extends along a second longitudinal axis, which is parallel to the first longitudinal axis, andwhich has a closure surface on a front face for closing the first opening, andhas a second sealing surface, which corresponds to the first sealing surface, that can be brought into gas-tight contact with the first sealing surface, and is located in the edge area of the closure surface and on a second sealing plane,at least one support on a rear face, which is opposite the front face, of the valve closure beam, wherein the valve closure beam is arranged such that it can pivot through a limited pivoting angle about a tilting axis, which is parallel to the second longitudinal axis, via a pivotable connection on the support, anda pivoting bearing, by means of which the support, together with the valve closure beam, can pivot about a pivoting axis, which is parallel to the second longitudinal axis, betweena closed position, in which the closure surface of the valve closure beam covers and closes the first opening, and in which the first sealing surface and the second sealing surface are in gas-tight contact on the common first sealing plane and second sealing planes—by exertion of a force which is applied to the rear face by means of the support, andan open position in which the valve closure beam is pivoted away from the first opening and at least partially releases the first opening,wherein the pivoting axis lies essentially on the first sealing plane, andthe tilting axis lies essentially on the second sealing plane. 2. The flap transfer valve according to claim 1, wherein the pivotable connection between the support and the valve closure beam is formed by at least one tilting joint,ball joint orpivoting joint. 3. The flap transfer valve according to claim 1, wherein a pivot stop, which limits the pivoting angle, between the valve closure beam and the support, andat least one spring between the valve closure beam and the support, wherein the at least one spring presses the valve closure beam against the pivot stop in the open position, andthe valve closure beam is tilted with respect to the support when in the open position such that, during pivoting of the support and of the valve closure beam by means of the pivoting bearing from the open position to the closed position while making the contact between the first sealing surface and the second sealing surface, these sealing surfaces come to rest flat on one another. 4. The flap transfer valve according to claim 1, wherein a pivoting shaft, which extends parallel to the first longitudinal axis of the first opening and along the pivoting axis, is arranged adjacent to the first opening, to which pivoting shaft the support is attached in order to pivot about the pivoting axis. 5. The flap transfer valve according to claim 1, wherein a shaft which can rotate about a shaft axis, which is essentially parallel to the second longitudinal axis and is at a distance from the pivoting axis,at least one drive, which is coupled to the shaft in order to rotate the shaft about the shaft axis and to move the valve closure beam between the open position and the closed position, andat least one first arm, which is arranged on the shaft such that they rotate together and whose free end engages directly or indirectly via the support with the rear face of the valve closure beam, such that rotation of the shaft, and therefore pivoting of the first arm, about the shaft axis can result in a force being applied to the rear face of the valve closure beam in order to pivot the valve closure beam about the pivoting axis between the open position and the closed position. 6. The flap transfer valve according to claim 1, wherein, in the closed position, the first sealing surface and the second sealing surface are parallel and lie on one another on a common plane, which is the first sealing plane and the second sealing plane. 7. The flap transfer valve according to claim 1, wherein the second sealing surface, which is located in the edge area of the closure surface, is set back in the direction of the rear face such that the closure surface—at least in a central area of the valve closure beam—projects beyond the second sealing plane in the direction of the front face of the valve closure beam, andat least one recess is formed on the rear face of the closure beam—at least in the central area of the valve closure beam—and extends at least onto the second sealing plane in the direction of the front face, wherein the tilting axis extends in the area of the recess, andthe pivotable connection is arranged in the recess. 8. The flap transfer valve according to claim 7, wherein the pivotable connection is formed by the at least one recess andat least one projection on the support, whereinthe projection projects into the recess, and a contact exists between the projection and the recess such that the valve closure beam can pivot about the tilting axis relative to the support. 9. The flap transfer valve according to claim 8, wherein the recess is in the form of a groove which extends at least partially along the tilting axis, wherein the base of the groove runs on the second sealing plane, andthe projection is in the form of a wedge which extends along the tilting axis. 10. The flap transfer valve according to claim 8, wherein a spring arrangement between the valve closure beam and the support, wherein the spring arrangement is arranged such that the valve closure beam is held on the support, andthe projection is pushed into the recess. 11. The flap transfer valve according to claim 10, wherein the spring arrangement is in the form of at least one leaf spring, which is arranged on the rear face of the valve closure beam, presses the projection into the recess, and is arranged transversely with respect to the tilting axis, behind the projection which projects into the recess. 12. The flap transfer valve according to claim 8, wherein the pivotable connection is in the form of a tilting joint,the recess has a base andthe projection has a cross section which converges to a point and has a point, with respect to the plane through which the tilting axis and the second longitudinal axis pass at right angles, wherein there is a point or line contact on the tilting axis between the point and the base, and this forms the tilting joint. 13. The flap transfer valve according to claim 12, wherein the projection has a V-shaped cross section, and the point is formed by an acute angle which is formed by the V-shaped cross-section. 14. Flap transfer valve according to claim 12, wherein the recess has a cross section which converges inwards with respect to the plane through which the tilting axis and the second longitudinal axis pass at right angles. 15. Flap transfer valve according to claim 14, wherein the recess has a V-shaped cross section, and the base is formed by the V-angle, which converges bluntly.