초록

An article including a monolithic crucible body comprising silicon oxynitride (SixNyO, wherein x0 and y0), wherein the silicon oxynitride extends throughout the entire volume of the monolithic crucible body.

대표청구항 ▼

1. An article comprising: a monolithic crucible body comprising silicon nitride and at least about 22 vol % of silicon oxynitride (SixNyO, wherein x>0 and y>0), wherein the silicon oxynitride extends throughout the entire volume of the monolithic crucible body, and the body comprises a ratio of sili

1. An article comprising: a monolithic crucible body comprising silicon nitride and at least about 22 vol % of silicon oxynitride (SixNyO, wherein x>0 and y>0), wherein the silicon oxynitride extends throughout the entire volume of the monolithic crucible body, and the body comprises a ratio of silicon oxynitride to silicon nitride [Si2ON2/Si3N4] of not greater than about 0.7. 2. The article of claim 1, wherein the monolithic crucible body comprises a composite material including a third material in addition to the silicon nitride and silicon oxynitride. 3. The article of claim 2, wherein the monolithic crucible body comprises a greater content of the third material than the silicon nitride and silicon oxynitride. 4. The article of claim 1, wherein the monolithic crucible body comprises a third material comprising an oxide. 5. The article of claim 4, wherein the third material comprises silica (SiO2). 6. The article of claim 4, wherein the body comprises not greater than about 12 vol % of a third material for the total volume of the body. 7. The article of claim 1, wherein the monolithic crucible body comprises a third material, and the third material comprises at least one of a crystalline phase, a vitreous phase, and a combination of a vitreous phase and a crystalline phase. 8. The article of claim 7, wherein the body comprises a ratio of vitreous phase to crystalline phase of the third material [Pvit/Pcry] of not greater than about 0.45. 9. The article of claim 7, wherein the body comprises a crystalline phase of not greater than about 5 vol % for the total volume of the body. 10. The article of claim 1, wherein the monolithic crucible body comprises at least about 81 wt % of one or more compounds including silicon and nitrogen atoms. 11. The article of claim 1, wherein the [Si2ON2/Si3N4] is at least 0.10. 12. The article of claim 1, wherein the monolithic crucible body comprises not greater than about 5 vol % aluminum. 13. The article of claim 1, wherein the monolithic crucible body comprises a porosity of at least about 5 vol %. 14. The article of claim 1, wherein the monolithic crucible body comprises a coefficient of thermal expansion (CTEc) of not greater than about 3.00×10−6 1/° C. from 20° C. to 200° C. 15. The article of claim 1, wherein the monolithic crucible body comprises a coefficient of thermal expansion (CTEc) of at least about 2.00×10−6 1/° C. from 20° C. to 200° C. 16. The article of claim 1, further comprising a coating layer overlying an external surface of the monolithic crucible body.