$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Detecting and preventing instabilities in plasma processes 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-007/24
  • H05B-031/26
  • H03B-001/00
출원번호 US-0766913 (2010-04-25)
등록번호 US-8674606 (2014-03-18)
발명자 / 주소
  • Carter, Daniel
  • Brouk, Victor
  • Roberg, Jeff
출원인 / 주소
  • Advanced Energy Industries, Inc.
대리인 / 주소
    Neugeboren O'Dowd PC
인용정보 피인용 횟수 : 19  인용 특허 : 26

초록

Systems, methods and apparatus for reducing instabilities in a plasma-based processing system are disclosed. An exemplary method includes applying power to a plasma with a power amplifier; determining whether low frequency instability oscillations are present or high frequency instability oscillatio

대표청구항

1. A method for reducing instabilities in a plasma-based processing system, the method comprising: applying power to a plasma with a power amplifier;obtaining samples indicative of an impedance of the plasma;determining a frequency of instability oscillations, resulting from plasma-power amplifier i

이 특허에 인용된 특허 (26)

  1. Hilliker, Stephen E., Absorptive filter for semiconductor processing systems.
  2. Howald, Arthur M.; Kuthi, Andras; Bailey, III, Andrew D., Apparatus and methods for improving the stability of RF power delivery to a plasma load.
  3. Keane Anthony R. A. (Webster NY) Hauer Steven E. (Berlin NJ), Automatic impedance matching apparatus and method.
  4. Johnson Wayne L. ; Parsons Richard, Electrical impedance matching system and method.
  5. Sorensen Carl A. ; Blonigan Wendell T. ; White John, Fast transition RF impedance matching network for plasma reactor ignition.
  6. Harnett Sean, Fuzzy logic tuning of RF matching network.
  7. Kotani,Hiroyuki; Takei,Hirotaka; Tanaka,Ryohei; Matoba,Hiroshi, High-frequency power device and method for controlling high-frequency power.
  8. DiVergilio William F. ; Kellerman Peter L. ; Ryan Kevin T., Integrated power oscillator RF source of plasma immersion ion implantation system.
  9. Reyzelman, Leonid E.; Sortor, John E., Method and apparatus for VHF plasma processing with load mismatch reliability and stability.
  10. Van Zyl, Gideon; Roberg, Jeff, Method and apparatus for advanced frequency tuning.
  11. Porter Robert M. ; Mueller Michael L., Method and apparatus for stabilizing switch-mode powered RF plasma processing.
  12. Nulty James E. (San Jose CA), Method for forming a stable plasma.
  13. Richardson Brett C. ; Ngo Tuan, Method of and apparatus for minimizing plasma instability in an RF processor.
  14. Russell F. Jewett ; Curtis C. Camus, Methods and apparatus for RF power process operations with automatic input power control.
  15. Howald Arthur M., Methods for controlling an RF matching network.
  16. Zhao Jun (Milpitas CA) Wolff Stefan (Sunnyvale CA) Smyth Kenneth (Sunnyvale CA) Taylor ; Jr. William Nixon (Dublin CA) McNutt Gerald (Los Altos Hills CA), Plasma chamber with fixed RF matching.
  17. Shannon, Steven C.; Ramaswamy, Kartik; Hoffman, Daniel J.; Miller, Matthew L.; Collins, Kenneth S., Plasma reactor with high speed plasma load impedance tuning by modulation of different unmatched frequency sources.
  18. Patrick Roger (Santa Clara CA) Bose Frank A. (Wettingen CHX), Power control and delivery in plasma processing equipment.
  19. Yuzurihara, Itsuo; Kikuchi, Masahiro; Suenaga, Toyoaki; Ishikawa, Yoichi, Power supply apparatus for generating plasma.
  20. Benjamin, Neil, RF generating system with fast loop control.
  21. Hauer, Frederick; Bhutta, Imran A.; Decker, Ronald A.; Osselburn, Joseph; Beizer, Theresa; Mavretic, Anton, RF power control device for RF plasma applications.
  22. Goodman, Daniel; Bortkiewicz, Andrzej; Alley, Gary D.; Horne, Stephen F.; Holber, William M., RF power supply with integrated matching network.
  23. Porter Robert M. ; Mueller Michael L., Stabilizer for switch-mode powered RF plasma.
  24. Brouk,Victor L.; Heckman,Randy L., Stabilizing plasma and generator interactions.
  25. Padmapani Nallan ; John Holland ; Valentin Todorov ; Thorsten Lill, Stable plasma process for etching of films.
  26. Fujii Shuitsu,JPX, System for impedance matching and power control for apparatus for high frequency plasma treatment.

이 특허를 인용한 특허 (19)

  1. Choi, Myeong Yeol; Shaw, Denis; Mueller, Mike; Roberg, Jeffrey; Jordan, Steve, Apparatus for frequency tuning in a RF generator.
  2. Choi, Myeong Yeol; Shaw, Denis; Mueller, Mike; Roberg, Jeffrey; Jordan, Steve, Apparatus for frequency tuning in a RF generator.
  3. Bhutta, Imran Ahmed, Electronically variable capacitor and RF matching network incorporating same.
  4. Bhutta, Imran Ahmed, High speed high voltage switching circuit.
  5. Bhutta, Imran, High voltage switching circuit.
  6. Van Zyl, Gideon, Noise based frequency tuning and identification of plasma characteristics.
  7. Van Zyl, Gideon, Noise based frequency tuning and identification of plasma characteristics.
  8. Bhutta, Imran Ahmed, RF impedance matching network.
  9. Bhutta, Imran Ahmed, RF impedance matching network.
  10. Bhutta, Imran Ahmed, RF impedance matching network.
  11. Bhutta, Imran Ahmed, RF impedance matching network.
  12. Mavretic, Anton, RF impedance matching network.
  13. Mavretic, Anton, RF impedance matching network.
  14. Mavretic, Anton, Switching circuit.
  15. Mavretic, Anton, Switching circuit.
  16. Mavretic, Anton, Switching circuit for RF currents.
  17. Hoffman, Daniel J.; Carter, Daniel; Brouk, Victor; Hattel, William J., Systems and methods for calibrating a switched mode ion energy distribution system.
  18. Howald, Arthur M.; Valcore, Jr., John C.; Lyndaker, Bradford J., Systems and methods for increasing efficiency of delivered power of a megahertz radio frequency generator in the presence of a kilohertz radio frequency generator.
  19. Van Zyl, Gideon, Systems and methods for obtaining information about a plasma load.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로