IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0808983
(2008-12-17)
|
등록번호 |
US-8686733
(2014-04-01)
|
국제출원번호 |
PCT/US2008/013790
(2008-12-17)
|
§371/§102 date |
20101020
(20101020)
|
국제공개번호 |
WO2009/085165
(2009-07-09)
|
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
Hamilton, Brook, Smith & Reynolds, P.C.
|
인용정보 |
피인용 횟수 :
4 인용 특허 :
28 |
초록
▼
An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed el
An ionization gauge includes an electron generator array that includes a microchannel plate that includes an electron generating portion of the microchannel plate comprising a source for generating seed electrons and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons. The ionization gauge includes an ionization volume in which the electrons impact a gaseous species, and a collector electrode for collecting ions formed by the impact between the electrons and gas species. The collector electrode can be surrounded by the anode, or the ionization gauge can be formed with multiple collector electrodes. The source of electrons can provide for a spontaneous emission of electrons, where the electrons are multiplied in a cascade.
대표청구항
▼
1. An ionization gauge, comprising: an electron generator array including a microchannel plate including:an electron generating portion of the microchannel plate comprising a source for generating seed electrons, and an electron multiplier portion of the microchannel plate, responsive to the seed el
1. An ionization gauge, comprising: an electron generator array including a microchannel plate including:an electron generating portion of the microchannel plate comprising a source for generating seed electrons, and an electron multiplier portion of the microchannel plate, responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons;an ionization volume in which the electrons impact a gaseous species;an adjustor that controls an electron beam current from the electron generator array based on feedback of number of electrons in the ionization volume;an energy filter that controls energy of the electrons in the ionization volume;and a collector electrode that collects ions formed by the impact between the electrons and the gaseous species. 2. The ionization gauge of claim 1, wherein the ionization volume is defined by an anode which retains the electrons therein, and wherein the source that generates electrons is outside of the anode, and wherein the anode surrounds the collector electrode. 3. The ionization gauge of claim 2, further comprising a second collector electrode to collect ions formed outside of the anode. 4. The ionization gauge of claim 2, further comprising an ammeter connected to the anode for measuring the number of electrons in the ionization volume and controlling the electron beam current. 5. The ionization gauge of claim 1, wherein current collected by the collector electrode forms a pressure signal. 6. The ionization gauge of claim 5, wherein the ionization volume is defined by a volume between a plate shaped anode and a plate shaped collector electrode, and wherein the source is located between the plate shaped anode and the plate shaped collector electrode. 7. The ionization gauge of claim 1, wherein the microchannel plate includes an input face and an output face, and wherein voltage is applied between the input face and the output face. 8. The ionization gauge of claim 7, wherein the microchannel plate is treated to cause a spontaneous emission of seed electrons. 9. The ionization gauge of claim 8, wherein an electron emitting material is on the input face of the electron multiplier portion of the microchannel plate, and wherein radiation produces seed electrons. 10. An ionization gauge comprising: an anode structure comprising a cylindrical wire grid defining an ionization volume in which electrons impact a gaseous species;a source that generates electrons that includes an electron seed device and an electron multiplier device that multiplies electrons from the electron seed device;an adjustor that controls an electron beam current from the electron generator array based on feedback of number of electrons in the ionization volume;an energy filter that controls energy of the electrons in the ionization volume;and a collector electrode that collects ions formed by the impact between the electrons and the gaseous species, one of the collector electrode and the source being located inside the anode structure, and the other of the collector electrode and the source being located outside the anode structure. 11. The ionization gauge of claim 10, wherein the cylindrical wire grid is configured as a plurality of wire circles coupled to at least one support strut. 12. The ionization gauge of claim 10, wherein the source that generates electrons is located outside the anode structure and the collector electrode is located inside the anode structure. 13. The ionization gauge of claim 12, further including a second collector electrode located outside the anode structure. 14. The ionization gauge of claim 10, wherein the source that generates electrons is located inside the anode structure and the collector electrode is located outside the anode structure. 15. The ionization gauge of claim 10, wherein current collected by the collector electrode forms a pressure signal. 16. The ionization gauge of claim 10, wherein the electron multiplier device that multiplies electrons includes a microchannel plate. 17. An ionization gauge comprising: an anode structure comprising a cylindrical wire grid defining an ionization volume in which electrons impact a gaseous species;an electron generator array including a microchannel plate including: an electron generating portion of the microchannel plate comprising a source for generating seed electrons, and an electron multiplier portion of the microchannel plate responsive to the seed electrons generated by the electron generating portion, that multiplies the electrons;an adjustor that controls an electron beam current from the electron generator array based on feedback of number of electrons in the ionization volume;an energy filter that controls energy of the electrons in the ionization volume;and a collector electrode located inside of the anode structure, that collects ions formed by the impact between the electrons and the gaseous species. 18. The ionization gauge of claim 17, wherein the cylindrical wire grid is configured as a plurality of wire circles coupled to at least one support strut. 19. The ionization gauge of claim 17, wherein the source that generates electrons is located outside the anode structure and the collector electrode is located inside the anode structure. 20. The ionization gauge of claim 19, further including a second collector electrode located outside the anode structure. 21. The ionization gauge of claim 17, wherein the source that generates electrons is located inside the anode structure and the collector electrode is located outside the anode structure. 22. The ionization gauge of claim 17, wherein current collected by the collector electrode forms a pressure signal. 23. An ionization gauge, comprising: an electron generator array means for generating electrons and multiplying the generated electrons;an anode means comprising a cylindrical wire grid defining an ionization volume in which electrons impact a gaseous species;an adjustor means for controlling an electron beam current from the electron generator array based on feedback of number of electrons in the ionization volume;an energy filter means for controlling energy of the electrons in the ionization volume;a collector electrode means for collecting ions formed by impact between electrons and the gaseous species;and means for forming a signal from the collected ions to determine pressure. 24. A method of measuring a gas pressure from a gaseous species, comprising the steps of: producing electrons using an electron generator array including an electron generating portion of a microchannel plate;multiplying electrons using an electron multiplier portion of the microchannel plate;adjusting an electron beam current from the electron generator array based on feedback of number of electrons in an ionization volume;filtering energy of the electrons in the ionization volume;collecting ions formed by impact between the electrons and the gaseous species using a collector electrode;and forming a pressure signal from the collected ions. 25. The method of claim 24, further comprising producing the electrons between a plate shaped anode and a parallel plate shaped ion collector and collecting the ions on the parallel plate shaped ion collector. 26. The method of claim 24, further comprising multiplying electrons by passing the electrons through a surface-treated microchannel plate. 27. A method of measuring a gas pressure from a gaseous species, comprising the steps of: producing electrons using a source that includes an electron seed device; multiplying the electrons;collecting ions formed by impact between the electrons and the gaseous species using a collector electrode, one of the collector electrode and the source being located inside an anode structure comprising a cylindrical wire grid defining an ionization volume in which electrons impact a gaseous species, and the other of the collector electrode and the source being located outside the anode structure;adjusting an electron beam current from the electron generator array based on feedback of number of electrons in the ionization volume;filtering energy of the electrons in the ionization volume;and forming a pressure signal from the collected ions. 28. The method of claim 27, wherein the source that generates electrons is located outside the anode structure and the collector electrode is located inside the anode structure. 29. The method of claim 27, wherein the source that generates electrons is located inside the anode structure and the collector electrode is located outside the anode structure. 30. The method of claim 27, further comprising multiplying electrons by passing the electrons through at least one surface-treated microchannel plate. 31. The method of claim 27, further comprising multiplying electrons using at least one dynode. 32. The method of claim 27, further comprising collecting ions outside of the anode structure using a second collector electrode located outside of the anode structure.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.