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Microelectromechanical systems (MEMS) resonators and related apparatus and methods 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-041/04
출원번호 US-0681904 (2012-11-20)
등록번호 US-8698376 (2014-04-15)
발명자 / 주소
  • Chen, David M.
  • Kuypers, Jan H.
  • Mohanty, Pritiraj
  • Schoepf, Klaus Juergen
  • Zolfagharkhani, Guiti
  • Goodelle, Jason
  • Rebel, Reimund
출원인 / 주소
  • Sand 9, Inc.
대리인 / 주소
    Wolf, Greenfield & Sacks, P.C.
인용정보 피인용 횟수 : 4  인용 특허 : 92

초록 ▼

Devices having piezoelectric material structures integrated with substrates are described. Fabrication techniques for forming such devices are also described. The fabrication may include bonding a piezoelectric material wafer to a substrate of a differing material. A structure, such as a resonator,

대표청구항 ▼

1. An apparatus, comprising: a first microelectromechanical systems (MEMS) wafer comprising a first MEMS device; anda second MEMS wafer comprising a second MEMS device,wherein the second MEMS wafer is configured to cap the first MEMS wafer, andwherein the first and second MEMS wafers are bonded toge

이 특허에 인용된 특허 (92)

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이 특허를 인용한 특허 (4)

  1. Burak, Dariusz; Grannen, Kevin J.; Choy, John, Bulk acoustic wave resonator with piezoelectric layer comprising lithium niobate or lithium tantalate.
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  2. Martin, Tom A., SAW device and method for post-seal frequency trimming.
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  3. Abraham, Margaret H.; Taylor, David P., Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same.
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  4. Taylor, David P.; Abraham, Margaret H., Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same.
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