Inspection apparatus, substrate mounting device and inspection method
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0580473
(2011-01-14)
|
등록번호 |
US-8723536
(2014-05-13)
|
우선권정보 |
JP-2010-080071 (2010-03-31) |
국제출원번호 |
PCT/JP2011/000161
(2011-01-14)
|
§371/§102 date |
20120920
(20120920)
|
국제공개번호 |
WO2011/121868
(2011-10-06)
|
발명자
/ 주소 |
- Miyazaki, Yusuke
- Aiko, Kenji
- Iijima, Yuichiro
- Kato, Yuichiro
|
출원인 / 주소 |
- Hitachi High-Technologies Corporation
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
7 인용 특허 :
3 |
초록
▼
Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of groove
Non-contact type displacement sensors which measure the height of a substrate surface are installed above the substrate in order to hold the upper surface of the substrate at a desired height or to maintain the flatness of the substrate. A substrate mounting device is such that a plurality of grooves and of barriers are provided on the upper surface of a table and air is supplied between the substrate and the table to enable the pressure of air to displace the substrate. In addition, the substrate mounting device has such a structure as to make it possible to deform the substrate into an arbitrary convex-concave shape or to make the substrate flat by feeding back the output of the displacement sensor.
대표청구항
▼
1. An inspection apparatus for inspecting a substrate, comprising: a substrate mounting device,where the substrate mounting device is a rear surface non-contact type, and includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the subst
1. An inspection apparatus for inspecting a substrate, comprising: a substrate mounting device,where the substrate mounting device is a rear surface non-contact type, and includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the substrate thereon;a structure, including a first piezo element, formed at a portion opposed to a rear surface of the substrate; anda first control section for controlling pressure between the rear surface of the substrate and the structure,where the first control section includes a second control section for controlling volume between the rear surface of the substrate and the structure. 2. The inspection apparatus according to claim 1, wherein the second control section includes a first drive section for driving the first piezo element. 3. An inspection apparatus for inspecting a substrate, comprising: a substrate mounting device,where the substrate mounting device is a rear surface non-contact type, and includes a holding portion disposed at an outer circumferential portion of the substrate mounting device so as to mount the substrate thereon;a structure formed at a portion opposed to a rear surface of the substrate;first control section for controlling pressure between the rear surface of the substrate and the structure,where the holding section includes a second piezo element; anda second drive section for driving the second piezo element. 4. An inspection method for inspecting a substrate, comprising the steps of: holding the substrate using a substrate mounting device which is a rear surface non-contact type;controlling flatness of the substrate by controlling pressure on a rear surface side of the substrate; andinspecting the substrate,wherein a concavity-convexity forming structure is disposed on a portion opposed to the rear surface of the substrate, and the concavity-convexity forming structure includes a piezo element, andwherein volume between the rear surface of the substrate and the concavity-convexity forming structure is controlled. 5. The inspection apparatus according to claim 1, wherein the structure is concavity-convexity forming. 6. The inspection apparatus according to claim 1, wherein the structure is formed in a circle. 7. The inspection apparatus according to claim 1, wherein the structure is formed in a straight line. 8. The inspection apparatus according to claim 1, further comprising: a first measuring section for measuring displacement of the substrate disposed on a side where the substrate is inspected;wherein the first control section controls pressure between the rear surface of the substrate and the structure on the basis of a measurement result of the first measuring section. 9. The inspection apparatus according to claim 1, wherein the inspection apparatus includes a medium supply section for supplying a medium to a portion opposed to the rear surface of the substrate, andthe first control section controls an amount of the medium. 10. The inspection apparatus according to claim 9, further comprising: a second measuring section for measuring temperature of the medium; andwherein the control section controls the temperature of the medium on the basis of a measurement result of the second measuring section. 11. The inspection apparatus according to claim 2, wherein the holding section includes a second piezo element, andthe inspection apparatus includes a second drive section for driving the second piezo element. 12. The inspection apparatus according to claim 3, wherein the structure is concavity-convexity forming. 13. The inspection apparatus according to claim 3, wherein the structure is formed in a circle. 14. The inspection apparatus according to claim 3, wherein the structure is formed in a straight line. 15. The inspection apparatus according to claim 3, further comprising: a first measuring section for measuring displacement of the substrate disposed on a side where the substrate is inspected;wherein the first control section controls pressure between the rear surface of the substrate and the structure on the basis of a measurement result of the first measuring section. 16. The inspection apparatus according to claim 15, wherein the substrate mounting device includes a medium supply section for supplying a medium to a portion opposed to the rear surface of the substrate, andthe first control section controls an amount of the medium. 17. The inspection apparatus according to claim 3, further comprising: a second measuring section for measuring temperature of the medium; andwherein the first control section controls the temperature of the medium on the basis of a measurement result of the second measuring section.
이 특허에 인용된 특허 (3)
-
Sato, Yasue, Electron source, image display device manufacturing apparatus and method, and substrate processing apparatus and method.
-
Yamamoto,Masayuki; Kaneshima,Yasuji, Releasing method and releasing apparatus of work having adhesive tape.
-
Zhao, Guoheng; Belyaev, Alexander; Wolters, Christian H.; Doyle, Paul Andrew; Dando, Howard W.; Vaez Iravani, Mehdi, Stabilizing a substrate using a vacuum preload air bearing chuck.
이 특허를 인용한 특허 (7)
-
Smith, Fraser M.; Maclean, Brian J.; Colvin, Glenn, Autonomous hull inspection.
-
Smith, Fraser M., Hull cleaning robot.
-
Rooney, III, James H.; Longley, Jonathan T.; Harris, Joel N.; Smith, Fraser; Jacobsen, Stephen C., Hull robot.
-
Kornstein, Howard R.; Rooney, III, James H; Hermann, Jeremy C.; Longley, Jonathan T.; Harris, Joel N.; Wu, Wen-te, Hull robot drive system.
-
Smith, Fraser M., Hull robot for autonomously detecting cleanliness of a hull.
-
Smith, Fraser M., Hull robot with hull separation countermeasures.
-
Rooney, III, James H.; Mann, Timothy I.; Kornstein, Howard R.; Harris, Joel N.; Longley, Jonathan T.; Allen, Scott H., Hull robot with rotatable turret.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.