[특허]Substrate container with fluid-sealing flow passageway

Entegris, Inc.

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특허 상세정보

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Substrate container with fluid-sealing flow passageway

특허상세정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B65B-031/04
미국특허분류(USC)	206/711; 206/454; 206/832; 211/041.18; 414/217.1
출원번호	US-0026336 (2008-02-05)
등록번호	US-8727125 (2014-05-20)
발명자 / 주소	Tieben, Anthony Mathius Lystad, John Halbmaier, David L.
출원인 / 주소	Entegris, Inc.
대리인 / 주소	Christensen Fonder P.A.
인용정보	피인용 횟수 : 2 인용 특허 : 33

초록

A substrate container includes an enclosure and an access structure formed in the enclosure and providing fluid access through the enclosure to an interior of the substrate container. The access structure includes an opening and an inner surface. A grommet is situated against the inner surface of the access structure.

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1. A substrate container, comprising a container portion with an open side or bottom, a door to sealingly close the open side or bottom, one of the door and the container portion comprising a first access structure; and a first elastomeric grommet formed of elastomeric material, the grommet having an axis, the grommet retained in the access structure for providing fluid access to an interior of the substrate container, wherein the access structure defines an opening passing from interior the container to exterior the container, and wherein the access structure has an apertured wall extending transverse to the axis of the grommet and the access structure further has an axially extending wall with an inwardly facing surface sealingly engaged with the elastomeric material of the grommet therein, and wherein the first elastomeric grommet having generally a cylindrical shape or a tapered cylindrical shape, an axial length, an outer facing surface engaged with the inwardly facing surface of the axially extending wall of the access structure, an inwardly facing surface defining an opening configured as a bore extending axially through the grommet, and a pair of parallel and planar end faces arranged perpendicular to the axis, the grommet when viewed in cross-section taken axially coincident with the axis, having a cross-sectional area of the grommet that is greater than the cross-sectional area of the bore extending axially through the grommet, each of the pair of end faces formed of elastomeric material and one of the pair of end faces exteriorly exposed with respect to the substrate container for engaging with a purging nozzle, the substrate container further comprising a check valve positioned in the bore of the grommet and a filter positioned intermediate the grommet and the apertured wall; and whereby the grommet provides a single body with a continuous surface including an elastomeric sealing surface for sealing with the access structure, an elastomeric surface for sealing with the check valve in the bore, and an exposed elastomeric surface for sealing with an exterior purging nozzle. 2. The substrate container of claim 1, further comprising a second access structure formed in the enclosure and a second elastomeric grommet, the grommet having an axis, retained therein for providing fluid access through the enclosure between exterior and interior of the substrate container, wherein the second access structure defines an opening passing from interior the container to exterior the container, and wherein the access structure further has an axially extending wall with an inwardly facing surface for engaging a grommet therein and an apertured wall extending transverse to the axis of the second elastomeric grommet, and further the second elastomeric grommet having a shape corresponding to the first elastomeric grommet and having an outer facing surface confronting the inwardly facing surface of the second access structure with a filter positioned therebetween. 3. The substrate container of claim 1, wherein the grommet has outer radii measured radially between the axis and the outer facing surface, said outer radii measured for the entire axial length of the grommet and for each outer radius the grommet has a radial thickness measured between the inwardly facing surface of the grommet and the outer facing surface of the grommet, and for at least most of the axial length of the grommet, each radial thickness comprises most of the respective outer radii. 4. The substrate container of claim 1, wherein one end face of the grommet is an exteriorly exposed planar end face and the other end face is an interiorly positioned opposite planar end face and the operational element is a check valve and is positioned entirely between the respective end faces. 5. The substrate container of claim 1, wherein the opening configured as a bore has a cylindrical shape and extends from one end face of the grommet to the other end face. 6. The substrate container of claim 5, wherein the axial length of the grommet is greater than the diameter of the opening configured as a bore. 7. The substrate container of claim 1 wherein the filter is constrained in place by said grommet. 8. The substrate container of claim 1, wherein one of the end faces of the grommet is an exteriorly exposed planar end face providing a sealing surface for a nozzle or nipple as part of a purging system without using o-rings. 9. The substrate container of claim 1, wherein the grommet includes an exteriorly exposed contact surface that can facilitate a fluid-tight coupling between the interior volume of the substrate container and an external purging system. 10. The substrate container of claim 1, wherein the grommet includes a body having at least one feature facilitating sealing with an external purging member. 11. A substrate container, comprising: a purging port having a generally cylindrical or tapered cylindrical wall surrounding an opening and an apertured wall;an elastomeric grommet comprising elastomeric material, the grommet having a generally cylindrical outer surface or tapered cylindrical outer surface and opposite planar end faces, one of the two end faces providing elastomeric material outwardly exposed with respect to the substrate container thereby providing a purging nozzle engagement surface, the grommet sealingly situated within the purging port with the elastomeric material sealingly engaged with the cylindrical or tapered cylindrical wall, the elastomeric grommet including a bore extending from interior the substrate container to exterior of the substrate container providing a fluid flow path therethrough, the bore having a bore surface with exposed elastomeric material; andan operational component sealingly situated substantially within the bore, the operational component comprising a one way check valve, the operational component sealingly engaged with the elastomeric material in the bore of the grommet; anda filter positioner between the grommet and the apertured wall;whereby the grommet provides a single body with a continuous surface including an elastomeric sealing surface for sealing with the access structure, an elastomeric surface for sealing with the check valve in the bore, and an exposed elastomeric surface for sealing with an exterior purging nozzle. 12. A substrate container, comprising: an enclosure portion; anda cover portion adapted to establish a fluid-tight engagement with the enclosure portion and define an interior volume;wherein at least one of the cover portion and the enclosure portion has at least one access structure including at least one of a fluid inlet, a fluid outlet, and a fluid vent;wherein the at least one access structure retains a grommet formed of elastomeric material in sealing communication therewith by way of engagement of the elastomeric material with the access structure; wherein the grommet includes a fluid passageway with a bore surface of elastomeric material that retains a check valve in sealing communication with the elastomeric material of the bore surface; andwherein the grommet has a generally cylindrical shape with the fluid passageway configured as a cylindrical bore extending axially and a pair of opposite planar end surfaces, the cylindrical bore having an axial length that is greater than the length of the valve such that the valve is disposed completely within the cylindrical bore, wherein the opposite planar end faces are comprised of the elastomeric material, and wherein one of the opposite planar end faces is exteriorly exposed with respect to the substrate container thereby providing a purge nozzle engagement surface and the other of the opposite planar end faces confronts an apertured wall of the access structure with a filter positioned between the apertured wall and the other of the opposite planar end faces,whereby the grommet provides a single body with a continuous surface including an elastomeric sealing surface for sealing with the access structure, an elastomeric surface for sealing with the check valve in the bore, and an exposed elastomeric surface for sealing with an exterior purging nozzle. 13. The substrate container of claim 12, wherein the cover portion has a plurality of access structures each with a respective grommet as described in claim 12. 14. The substrate container of claim 12, wherein the at least one access structure includes a flow conduit having an inner surface against which the grommet is in sealing communication. 15. The substrate container of claim 12, wherein the grommet is adapted to facilitate a sealing engagement between a vacuum/fluid source and the interior volume of the substrate container. 16. The substrate container of claim 12, wherein one of the planar end surfaces of the grommet is an exteriorly exposed surface that provides a sealing surface for a nozzle or nipple as part of a purging system without using o-rings.

이 특허에 인용된 특허 (33)

이 특허를 인용한 특허 피인용횟수: 2

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Substrate container with fluid-sealing flow passageway

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Substrate container with fluid-sealing flow passageway

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이 특허에 인용된 특허 (33)

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