초록 ▼

Embodiments related to methods for forming a film stack on a substrate are provided. One example method comprises exposing the substrate to an activated oxygen species and converting an exposed surface of the substrate into a continuous monolayer of a first dielectric material. The example method al

Embodiments related to methods for forming a film stack on a substrate are provided. One example method comprises exposing the substrate to an activated oxygen species and converting an exposed surface of the substrate into a continuous monolayer of a first dielectric material. The example method also includes forming a second dielectric material on the continuous monolayer of the first dielectric material without exposing the substrate to an air break.

대표청구항 ▼

1. A method for determining a conversion time associated with converting an exposed surface of a substrate into a continuous monolayer of a first dielectric material in a gate assembly without exposing the first dielectric material to a vacuum break, the method comprising: converting the exposed sur

1. A method for determining a conversion time associated with converting an exposed surface of a substrate into a continuous monolayer of a first dielectric material in a gate assembly without exposing the first dielectric material to a vacuum break, the method comprising: converting the exposed surface of the substrate into the first dielectric material via reaction of an activated oxygen species with the exposed surface of the substrate for a preselected time;forming a second dielectric material on the first dielectric material without an air break;measuring a thickness of the second dielectric material; andsetting the preselected time as the conversion time if the thickness matches a preselected thickness. 2. The method of claim 1, where converting the exposed surface of the substrate into the first dielectric material via reaction of the activated oxygen species with the exposed surface of the substrate includes converting the exposed surface of the substrate into the first dielectric material via reaction of the activated oxygen species and an activated nitrogen species with the exposed surface of the substrate. 3. The method of claim 1, where converting the exposed surface of the substrate into the first dielectric material comprises supplying the activated oxygen species from one or more of an ozone source and an oxygen plasma source. 4. The method of claim 1, further comprising determining that a discontinuous layer of the first dielectric material is formed on the exposed surface of the substrate if the thickness of the second dielectric material is less than the preselected thickness. 5. The method of claim 1, where measuring the thickness of the second dielectric material comprises measuring a thickness of a film stack comprising the first dielectric material and the second dielectric material. 6. The method of claim 1, further comprising determining that the continuous monolayer of the first dielectric material is formed on the exposed surface of the substrate if the thickness matches the preselected thickness. 7. The method of claim 1, where the substrate is hydrogen terminated and where the first dielectric material is non-hydrogen terminated. 8. The method of claim 1, where converting the exposed surface of the substrate into the first dielectric material comprises forming SiOx. 9. The method of claim 1, where converting the exposed surface of the substrate into the first dielectric material comprises forming SiO2. 10. The method of claim 1, where the preselected thickness is about 4 Angstroms. 11. The method of claim 1, further comprising a step of using the conversion time to convert another exposed substrate surface into another continuous monolayer of first dielectric material. 12. The method of claim 1, where the step of forming the second dielectric material is performed without a vacuum break. 13. The method of claim 1, where the step of converting the exposed surface of the substrate into the first dielectric material is performed in a first processing module and the step of forming the second dielectric material is performed is a second processing module. 14. The method of claim 1, where the step of converting the exposed surface of the substrate into the first dielectric material is performed in a first processing module and the step of forming the second dielectric material is performed in the first processing module. 15. The method of claim 1, where the substrate is selected from the group consisting of Si, Ge, SiGe, GaAs, InGaAs, and InP. 16. The method of claim 1, where the first dielectric material comprises material selected from the group consisting of SiOx, SiOxNy, GeOx, SiGeOx, GaAsOx, InGaAsOx, InPOx, GeOxNy, SiGeOxNy, GaAsOxNy, InGaAsOxNy, and InPOxNy. 17. The method of claim 1, where the second dielectric material comprises material selected from the group consisting of HfOX, TiOX, SrOx, ZrOx, LaOx, SrTixOy, AlOx, MgO, BaTixOy, and SrxBa(1-x)TiyOz. 18. The method of claim 1, where the step of forming the second dielectric material comprises using chemical vapor deposition. 19. The method of claim 1, where the step of forming the second dielectric material comprises using plasma chemical vapor deposition. 20. The method of claim 1, where the step of forming the second dielectric material comprises using atomic layer deposition.