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Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-035/02
  • H01J-035/16
  • G21K-001/06
출원번호 US-0355725 (2012-01-23)
등록번호 US-8746975 (2014-06-10)
발명자 / 주소
  • Bianucci, Giovanni
  • Zocchi, Fabio
  • Banham, Robert
  • Pedrali, Marco
  • Grek, Boris
  • Ceglio, Natale
  • Shough, Dean
  • Yue, Gordon
  • Stearns, Daniel
  • Levesque, Richard A.
  • Valsecchi, Giuseppe
출원인 / 주소
  • Media Lario S.R.L.
대리인 / 주소
    Opticus IP Law PLLC
인용정보 피인용 횟수 : 1  인용 특허 : 32

초록

Systems, assemblies and methods for thermally managing a grazing incidence collector (GIC) for EUV lithography applications are disclosed. The GIC thermal management assembly includes a GIC mirror shell interfaced with a jacket to form a sealed chamber. An open cell, heat transfer (OCHT) material is

대표청구항

1. A grazing incidence collector (GIC) thermal management assembly that employs the flow of a coolant, comprising: a GIC mirror shell having a reflective inner surface, an opposite outer surface, and first and second mirror ends;a jacket having an inner surface and first and second jacket ends, the

이 특허에 인용된 특허 (32)

  1. Chen, Ga Lane, Backlight module including heat pipe with nano-scaled recesses.
  2. Zocchi, Fabio E.; Binda, Pietro; Benedetti, Enrico, Collector optical system.
  3. Kino,Yoshiki, Cooling apparatus, optical element having the same, and exposure apparatus.
  4. Gerets, Peter; Vandorpe, Krist; Van Rafelgem, Winter, Cooling of reflective spatial light modulating devices.
  5. Hara,Shinichi; Yokota,Hideo, Cooling system, exposure apparatus having the same, and device manufacturing method.
  6. Pedrali, Marco; Ghislanzoni, Riccardo, Cooling systems and methods for grazing incidence EUV lightography collectors.
  7. Jacob,Jonah; Mangano,Joseph A.; Moran,James; Bykanov,Alexander; Petr,Rodney; Rokni,Mordechai, Dense plasma focus radiation source.
  8. Partlo,William N.; Bowering,Norbert; Ershov,Alexander I.; Fomenkov,Igor V.; Myers,David W.; Oliver,Ian Roger; Viatella,John; Jacques,Robert N., EUV light source.
  9. Banham, Robert David; Valenzuela, Arnoldo, Fabrication of cooling and heat transfer systems by electroforming.
  10. Chang, Shu-Kang, Fan self-cooling structure with heat pipe.
  11. Klein, John Frederick, Foam metal heat exchanger system.
  12. Zocchi, Fabio; Binda, Pietro; Benedetti, Enrico, Grazing incidence collector optical systems for EUV and X-ray applications.
  13. Lin, Tai-Wei; Huang, Jia-Bin; Yun, Chi-Chui, Heat dissipation module and projection apparatus using the same.
  14. Queheillalt,Douglas T.; Wadley,Haydn N. G.; Katsumi,Yasushi, Heat exchange foam.
  15. Campagna, Michael Joseph; Callas, James John, Heat exchanger using graphite foam.
  16. Zhang, Hua, Heat pipe for removing thermal energy from exhaust gas.
  17. Ozmat Burhan, High performance heat exchanger and method.
  18. McGinty, Patrick, Lighted helmet with heat pipe assembly.
  19. Williams Brian E. ; Ono Russell M., Lightweight precision optical mirror substrate and method of making.
  20. Hoogendam, Christiaan Alexander; Streefkerk, Bob; Mulkens, Johannes Catharinus Hubertus; Bijlaart, Erik Theodorus Maria; Kolesnychenko, Aleksey Yurievich; Loopstra, Erik Roelof; Mertens, Jeroen Johannes Sophia Maria; Slaghekke, Bernardus Antonius; Tinnemans, Patricius Aloysius Jacobus; Van Santen, Helmar, Lithographic apparatus and device manufacturing method.
  21. Bakker, Levinus Pieter; Jonkers, Jeroen; Schuurmans, Frank Jeroen Pieter; Visser, Hug? Matthieu, Lithographic projection apparatus and reflector assembly for use therein.
  22. Hou, Chuen-Shu, Loop heat pipe.
  23. Kim, Do-Hyung; Shin, Moon-Whan; Hwang, Woong-Joon; Lee, Chung-Hoon, Luminous device with heat pipe and method of manufacturing heat pipe lead for luminous device.
  24. Naumann, Dirk; Walther, Gunnar; Böhm, Alexander, Metal foam body having an open-porous structure as well as a method for the production thereof.
  25. Haack, David P.; Lin, Chi-Li; Speckert, Michael, Method of co-forming metal foam articles and the articles formed by the method thereof.
  26. Masaki, Fumitaro; Miyake, Akira, Mirror device, mirror adjustment method, exposure apparatus, exposure method, and semiconductor device manufacturing method.
  27. Dahm, Jonathan S.; Jongewaard, Mark Paul, Multiple light-emitting element heat pipe assembly.
  28. Mills, Robin Walter; Jandt, Klaus Dieter, Optical irradiation device having LED and heat pipe.
  29. Ahrens,Michael E., Optical transponder with active heat transfer.
  30. Seidenberg Benjamin (Baltimore MD), Polymeric heat pipe wick.
  31. Calon, Georges Marie; Aarts, Ronaldus Maria; Wachters, Peter Alexander; Marinus, Antonius Adrianus Maria; Elferich, Reinhold; Cornelissen, Hugo Johan; Lasance, Clemens Johannes Maria, Remote cooling by combining heat pipe and resonator for synthetic jet cooling.
  32. Ceglio, Natale M.; Nocerino, Giovanni; Zocchi, Fabio, Source-collector module with GIC mirror and LPP EUV light source.

이 특허를 인용한 특허 (1)

  1. Sato, Hiroto, Collector mirror assembly and extreme ultraviolet light source device using said collector mirror assembly.
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