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A microelectronic unit, an interconnection substrate, and a method of fabricating a microelectronic unit are disclosed. A microelectronic unit can include a semiconductor element having a plurality of active semiconductor devices therein, the semiconductor element having a first opening extending fr

A microelectronic unit, an interconnection substrate, and a method of fabricating a microelectronic unit are disclosed. A microelectronic unit can include a semiconductor element having a plurality of active semiconductor devices therein, the semiconductor element having a first opening extending from a rear surface partially through the semiconductor element towards a front surface and at least one second opening, and a dielectric region overlying a surface of the semiconductor element in the first opening. The microelectronic unit can include at least one conductive interconnect electrically connected to a respective conductive via and extending away therefrom within the aperture. In a particular embodiment, at least one conductive interconnect can extend within the first opening and at least one second opening, the conductive interconnect being electrically connected with a conductive pad having a top surface exposed at the front surface of the semiconductor element.

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1. A microelectronic unit, comprising: a semiconductor element having a front surface and a rear surface remote from the front surface, a plurality of active semiconductor devices therein, and a plurality of conductive pads, each conductive pad having a top surface exposed at the front surface and h

1. A microelectronic unit, comprising: a semiconductor element having a front surface and a rear surface remote from the front surface, a plurality of active semiconductor devices therein, and a plurality of conductive pads, each conductive pad having a top surface exposed at the front surface and having a bottom surface remote from the top surface, the semiconductor element having a first opening extending from the rear surface partially through the semiconductor element towards the front surface, and at least one second opening, each second opening extending from the first opening to at least the bottom surface of a respective one of the conductive pads;at least one conductive via extending within a respective one of the at least one second opening and being electrically connected with the respective conductive pad;a dielectric region overlying an inner surface of the semiconductor element in the first opening, the dielectric region having an aperture extending through the dielectric region from the conductive via to an exposed surface of the dielectric region, wherein a contour of the aperture does not conform to a contour of the first opening, wherein the dielectric region is compliant, having a sufficiently low modulus of elasticity and sufficient thickness such that the product of the modulus and the thickness provide compliancy;at least one conductive interconnect electrically connected to a respective conductive via, the at least one conductive interconnect extending within the aperture through the dielectric region from the conductive via to the exposed surface of the dielectric region, the at least one conductive interconnect defining an outer surface having a shape that does not conform to a shape of the inner surface of the semiconductor element in the first opening; andat least one conductive contact exposed for interconnection with an external element, the conductive contact being electrically connected to a respective conductive interconnect, the at least one conductive contact being aligned in a vertical direction with a portion of the semiconductor element within the first opening, the vertical direction being a direction of a thickness of the semiconductor element between the front and rear surfaces, the at least one conductive contact being deposited in direct contact with the exposed surface of the dielectric region and wholly disposed within an area defined by edges of the first opening in a lateral direction along the rear surface, wherein the at least one conductive contact is moveable relative to the front surface of the semiconductor element when an external load is applied to the at least one conductive contact. 2. A microelectronic unit as claimed in claim 1, wherein the aperture has at least one of cylindrical or frusto-conical shape. 3. A microelectronic unit as claimed in claim 1, wherein a single active semiconductor region contains the plurality of active semiconductor devices. 4. A microelectronic unit as claimed in claim 1, wherein each of a plurality of active semiconductor regions contains a subset of the plurality of active semiconductor devices. 5. A microelectronic unit as claimed in claim 1, wherein the first opening has a first width in a lateral direction along the rear surface, and at least one of the conductive contacts has a second width in the lateral direction, the first width being greater than the second width. 6. A microelectronic unit as claimed in claim 1, wherein a plurality of the conductive interconnects extend within a particular first opening and a plurality of the vias extend within respective second openings which meet the particular first opening and electrically connect ones of the conductive interconnects to respective conductive pads exposed at the semiconductor element front surface. 7. A microelectronic unit as claimed in claim 6, wherein the first opening has a width in a first lateral direction along the rear surface, and the first opening has a length in a second lateral direction along the rear surface transverse to the first lateral direction, the length being greater than the width. 8. A microelectronic unit as claimed in claim 7, wherein the first opening defines a channel shape. 9. A microelectronic unit as claimed in claim 6, wherein the first opening is a plurality of first openings, each of at least some of the first openings having a single aperture and a single conductive interconnect extending therein. 10. A microelectronic unit as claimed in claim 1, wherein the conductive contact includes a thin flat member. 11. A microelectronic unit as claimed in claim 1, further comprising a conductive bond material exposed at a surface of the conductive contact. 12. A microelectronic assembly as claimed in claim 11, further comprising a substrate having a substrate contact thereon, the substrate contact being conductively joined with the conductive contact. 13. A microelectronic unit as claimed in claim 11, further comprising a polymeric layer overlying the dielectric region and separating respective areas of the bond material. 14. A microelectronic unit as claimed in claim 1, wherein the at least one conductive contact has a surface exposed above a plane defined by the rear surface. 15. A microelectronic unit as claimed in claim 14, wherein the surface of the dielectric region extends above a plane defined by the rear surface. 16. A microelectronic unit as claimed in claim 1, wherein the second opening has a width at the bottom surface of the conductive pad which exceeds a width of the second opening where the first and second openings meet. 17. A microelectronic unit as claimed in claim 1, wherein a second aperture extending within a dielectric layer within the second opening does not conform to a contour of the second opening and the via does not conform to the contour of the second opening. 18. A microelectronic unit as claimed in claim 1, wherein the conductive interconnect includes a conductive layer overlying an inner surface within the aperture and a dielectric layer overlying the conductive layer within the aperture. 19. A microelectronic unit as claimed in claim 1, wherein the aperture is a first aperture, and the second opening includes a second dielectric region overlying an inner surface thereof, the second dielectric region having a second aperture, and the at least one via extends within the second aperture. 20. A microelectronic unit as claimed in claim 19, wherein the second aperture has at least one of cylindrical or frusto-conical shape. 21. A microelectronic unit as claimed in claim 19, wherein a width of the first aperture defines a step change relative to a width of the second aperture where the first and second apertures meet. 22. A microelectronic unit as claimed in claim 1, wherein each conductive pad at least partially overlies a respective one of the conductive vias. 23. A microelectronic unit as claimed in claim 1, wherein each conductive via is contacting the bottom surface of a respective one of the conductive pads. 24. A microelectronic unit as claimed in claim 1, wherein the second opening has an upper surface opposite the bottom surface of the conductive pad and an inner surface extending between the upper surface of the second opening and the bottom surface of the conductive pad, and the second opening has an upper diameter where the upper surface and the inner surface meet that exceeds a width of the first opening where the first and second openings meet. 25. A microelectronic unit as claimed in claim 1, further comprising a lid member attached to the front surface of the semiconductor element. 26. A microelectronic assembly including at least first and second microelectronic units, each microelectronic unit being as claimed in claim 1, the first microelectronic unit being stacked with the second microelectronic unit, with the semiconductor elements therein being electrically connected to each other. 27. A system comprising a structure according to claim 1 and one or more other electronic components electrically connected to the structure. 28. A system as claimed in claim 27, further comprising a housing, said structure and said other electronic components being mounted to said housing. 29. A microelectronic unit as claimed in claim 1, wherein at least a portion of the bottom surface of the respective conductive pad is exposed within the second opening, and the at least one conductive via is deposited in contact with the bottom surface of the respective conductive pad.