초록 ▼

Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one

Approaches for enhancing web position determination involve phase locking a web movement encoder signal to a sensed web fiducial signal. Fiducials disposed along a longitudinal axis of a substrate are sensed and corresponding sensor signals are generated. An estimated web position is provided by one or more encoder signals. The phase difference between the sensor signals and the encoder signals is calculated and the web position error is determined based on the phase difference. The web position error signal can be fed back to adjust the encoder signals which improves the accuracy of the web position determination.

대표청구항 ▼

1. A method, comprising: sensing one or more substantially continuous fiducials disposed along a longitudinal axis of a substrate;generating one or more continuous, periodic sensor signals based on the sensed fiducials;generating one or more continuous, periodic movement signals based on movement of

1. A method, comprising: sensing one or more substantially continuous fiducials disposed along a longitudinal axis of a substrate;generating one or more continuous, periodic sensor signals based on the sensed fiducials;generating one or more continuous, periodic movement signals based on movement of the substrate, the movement signals representing an estimated position of the substrate;determining a phase difference between the sensor signals and the movement signals;generating an error signal based on the phase difference; anddetermining a substrate position by adjusting the estimated position of the substrate based on the error signal. 2. The method of claim 1, wherein sensing the fiducials comprises sensing one or more substantially continuous, periodic fiducials. 3. The method of claim 1, wherein sensing the fiducials comprises sensing two substantially continuous, periodic fiducials that are out of phase with each other. 4. The method of claim 1, further comprising controlling a fabrication process based on the substrate position. 5. The method of claim 1, further comprising adjusting the movement signals based on the error signal and controlling movement of the substrate based on the adjusted movement sensor signals. 6. The method of claim 1, further comprising: sensing a reference fiducial disposed along the longitudinal axis of the substrate; anddetermining an amplitude of the one or more fiducials based on the reference fiducial. 7. The method of claim 1, further comprising: sensing a reference fiducial disposed along the longitudinal axis of the substrate; anddetermining lateral position of the substrate using the reference fiducial. 8. The method of claim 1, wherein sensing the fiducials comprises sensing one or more substantially continuous, periodic fiducials; and further comprising detecting discrete fiducial marks on the substrate and initiating identification of a nearby zero crossing of the periodic fiducial marks based on detection of the discrete fiducial marks. 9. A method, comprising: sensing one or more fiducials disposed along a longitudinal axis of a substrate;generating one or more continuous, periodic sensor signals based on the sensed fiducials;generating one or more continuous, periodic movement signals based on movement of the substrate;determining a phase difference between the sensor signals and the movement signals; andgenerating an error signal based on the phase difference, wherein:generating the one or more sensor signals comprises generating sine and cosine sensor signals;generating the one or more movement signals comprises generating sine and cosine movement signals;determining the phase difference between the sensor signals and the movement signals comprises: determining a first product of the sine sensor signal and the cosine movement signal;determining a second product of the cosine sensor signal and the sine movement signal; anddetermining a difference between the first product and the second product; andgenerating the error signal comprises taking an arcsin of the difference between the first product and the second product. 10. A method, comprising: sensing one or more fiducials disposed along a longitudinal axis of a substrate;generating one or more continuous, periodic sensor signals based on the sensed fiducials;generating one or more continuous, periodic movement signals based on movement of the substrate;determining a phase difference between the sensor signals and the movement signals;generating an error signal based on the phase difference;adjusting the movement signals based on the error signal; anddetermining a substrate position along the longitudinal axis based on the adjusted movement sensor signals.