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Sputtering lithium-containing material with multiple targets

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/00
  • C23C-014/32
출원번호 US-0337031 (2011-12-23)
등록번호 US-8864954 (2014-10-21)
발명자 / 주소
  • Nieh, Kai Wei
  • Liang, Jiuh-Ming
  • Krasnov, Victor
출원인 / 주소
  • Front Edge Technology Inc.
대리인 / 주소
    Janah, Ashok K.
인용정보 피인용 횟수 : 4  인용 특허 : 143

초록

A method of depositing lithium-containing films on a battery substrate in a sputtering chamber is provided. At least one pair of sputtering targets that each comprise a lithium-containing sputtering member is provided in the sputtering chamber, the sputtering targets selected to each have a conducti

대표청구항

1. A method of depositing a lithium-containing film on a battery substrate in a sputtering chamber, the method comprising: (a) measuring an electrical conductivity at multiple points across a surface of each sputtering target of a plurality of sputtering targets, the sputtering targets comprising (i

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