Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23F-001/00
H01L-021/306
B08B-007/00
H01J-037/32
C23G-005/00
출원번호
US-0631193
(2009-12-04)
등록번호
US-8877003
(2014-11-04)
우선권정보
FR-02 02057 (2002-02-19)
발명자
/ 주소
Silberberg, Eric
Michel, Eric
Reniers, Francois
Buess-Herman, Claudine
출원인 / 주소
Usinor
대리인 / 주소
Sughrue Mion, PLLC
인용정보
피인용 횟수 :
1인용 특허 :
10
초록▼
The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and
The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode in order to break down the organic substance under the action of the free radicals O thus produces. The invention also relates to an installation that is used to carry out said method.
대표청구항▼
1. An installation for carrying out a process for cleaning the surface of a material coated with an organic substance, the process comprises introducing said material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at l
1. An installation for carrying out a process for cleaning the surface of a material coated with an organic substance, the process comprises introducing said material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90% oxygen by volume and generating a plasma by passing an electric discharge between the surface of said material and a dielectric-covered electrode, breaking down said organic substance through the action of the free radicals O. thus produced, where the material is in the form of a running strip and said introducing and generating operations are carried out continuously using installations placed in succession along the path of the running strip, the installation comprising: at least one module comprising a treatment chamber,means for setting the pressure inside said chamber to a value between 10 mbar and 1 bar,means for making said strip run through said chamber,a series of dielectric-covered electrodes placed so as to face that surface of said strip to be treated, where the electrodes are connected to a single sinusoidal high-voltage generator,a gas supplying unit that supplies said chamber with gas and a gas extraction unit that extracts, from said chamber, the gases resulting from the decomposition of the organic substance coating the strip, andUV emission lamps placed in an alternating order directly adjacent with said electrodes,wherein the UV emission lamps are configured to irradiate the strip at substantially the same time. 2. The installation as claimed in claim 1, wherein the oxygen and/or ozone molecules that are formed by recombination of the free radicals O. produced in said plasma are re-dissociated. 3. The installation as claimed in claim 2, wherein said re-dissociation is carried out using UV radiation of a suitable wavelength. 4. The installation as claimed in claim 3, wherein the suitable wavelength is approximately 253 nm. 5. The installation as claimed in claim 3, wherein the electrodes are covered with approximately 0.7 mm layer of alumina and of a ground metal and wherein the electrodes are spaced at approximately one to three tens of millimeters from each other. 6. The installation as claimed in claim 3, further comprising a cooling system that holds the electrodes at a temperature close to ambient temperature during operation of the plasma and wherein inter-electrode distance is varied. 7. The installation as claimed in claim 1, wherein the voltage applied to initiate the discharge is sinusoidal and has a frequency of between 10 and 100 kHz. 8. The installation as claimed in claim 1, wherein the energy dissipation in the discharge is less than 40 W/cm2 and the voltage applied in order to initiate the discharge is less than 4.4 W. 9. The installation as claimed in claim 1, wherein one of the faces of said strip is treated followed in succession by the other. 10. The installation as claimed in claim 1, wherein said material to be treated is a metallic material. 11. The installation as claimed in claim 10, wherein said metallic material is a carbon steel. 12. The installation as claimed in claim 10, wherein said metallic material is steel. 13. The installation as claimed in 10, wherein the process degreases the surface of metallic materials, and further comprises depositing a coating after said degreasing. 14. The installation as claimed in claim 1, which comprises a succession of an even number of said modules, through which said strip runs in succession, exposing in turn one of its faces to the electrodes of said modules. 15. The installation as claimed in claim 1, wherein the process further comprises removing oil from the surface of metallic materials using the generated plasma. 16. The installation as claimed in claim 1, wherein: the electrodes comprise a first electrode, a second electrode, and a third electrode,the UV emission lamps comprise a first UV emission lamp, a second UV emission lamp, and a third UV emission lamp, andthe alternating order comprises the first electrode, the first UV emission lamp, the second electrode, the second UV emission lamp, the third electrode, and the third UV emission lamp. 17. The installation as claimed in claim 16, wherein the alternating order is provided with no elements in between and wherein the electrodes treat the strip together.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (10)
Shaw David G. ; Dawson Eric ; Cline Daniel ; Langlois Marc, Acrylate composite barrier coating process.
Yasuda Hirotsugu (Columbia MO) Lin Tyau-Jeen (Columbia MO) Yang Duck J. (Wilmington DE) Antonelli Joseph A. (Riverton NJ), Method of coating steel substrate using low temperature plasma processes and priming.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.