Method for assembling and hermetically sealing an encapsulating package
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-021/56
H01L-027/146
G01J-005/04
H01L-023/10
H01L-023/26
G01J-005/20
출원번호
US-0336501
(2011-12-23)
등록번호
US-8890071
(2014-11-18)
우선권정보
FR-11 50815 (2011-02-02)
발명자
/ 주소
Perratone, Frédéric
Simon, Didier
출원인 / 주소
Ulis
대리인 / 주소
Burr & Brown, PLLC
인용정보
피인용 횟수 :
0인용 특허 :
7
초록▼
A method of assembling and hermetically sealing a package including a side wall mounted on a substrate, with the space thus defined accommodating a component that operates in a controlled atmosphere, the space being closed off by a hermetic sealing cover mounted on said side wall. This method involv
A method of assembling and hermetically sealing a package including a side wall mounted on a substrate, with the space thus defined accommodating a component that operates in a controlled atmosphere, the space being closed off by a hermetic sealing cover mounted on said side wall. This method involves depositing a metallic connector element, also referred to as a brazing preform, on the upper face of the side wall; depositing the upper cover on, and in contact with, the brazing preform; subjecting the assembly thus obtained to the desired environment in terms of the kind of gas and operating pressure of the component; increasing the temperature to a value that is at least in excess of the melting temperature of the material that constitutes the brazing preform; then lowering said temperature in order to cause solidification of said brazing material and, consequently, sealing of the cover on the side wall.
대표청구항▼
1. A method for assembling and hermetically sealing a package consisting of a side wall mounted on, or integral with, a substrate, with the space thus defined accommodating at least one component that operates in an environment of one of a vacuum, reduced pressure and a controlled atmosphere, said s
1. A method for assembling and hermetically sealing a package consisting of a side wall mounted on, or integral with, a substrate, with the space thus defined accommodating at least one component that operates in an environment of one of a vacuum, reduced pressure and a controlled atmosphere, said space being closed off by a hermetic sealing cover sealed on said side wall, with this method comprising: depositing a metallic connector element, also referred to as a brazing preform, onto the upper face of side wall;depositing the upper cover on, and in contact with, said brazing preform;subjecting the assembly thus obtained to the desired environment in terms of a kind of gas and operating pressure of the component;increasing the temperature to a value that is at least in excess of the melting temperature of the material that constitutes the brazing preform;then lowering said temperature in order to cause solidification of said brazing material and, consequently, sealing of the cover on the side wall,wherein at least one recess is provided in the side wall capable of accommodating a functional element mounted so that said functional element overhangs said at least one recess, said functional element being shaped accordingly;and then, after fitting said functional element, the brazing preform is deposited and then the cover is also deposited in said recess, thereby causing cooperation of said functional element with the preform and, consequently, positioning said functional element in accordance with its operating mode. 2. The method for assembling and hermetically sealing a package as claimed in claim 1, wherein, when the temperature is increased, the brazing material of brazing preform migrates and ensures, after melting and then solidifying, attachment of said functional element to the package. 3. The method for assembling and hermetically sealing a package as claimed in claim 2, wherein said functional element has at least one through-hole in its areas which cooperates with the at least one recess and wherein the brazing material of preform partially migrates through the at least one through-hole in order to obtain attachment of said functional element with said at least one recess. 4. The method for assembly and sealing a package as claimed in claim wherein said functional element is fitted into the at least one recess provided in the side wall and said functional element protrudes above an upper surface of the side wall, wherein said functional element contacts and is fixed by the preform to the package during the sealing of the upper cover. 5. A method for assembling and hermetically sealing a package for an infrared detector, said package consisting of a side wall mounted on, or integral with, a substrate, the space thus defined accommodating at least one bolometric detector which operates in an environment of one of a vacuum and reduced pressure, said space being closed off by a hermetic closing cover which includes a window that is transparent to the wavelength range that is of interest, with this method comprising: depositing a metallic connector element, also referred to as a brazing preform on the upper face of the side wall;depositing a upper cover on, and in contact with said preform;subjecting the assembly thus obtained to the desired environment in terms of a kind of gas and operating pressure of the bolometric detector;increasing the temperature to a value that is at least in excess of the melting temperature of the material that constitutes the brazing preform;then lowering said temperature in order to cause solidification of said brazing material and, consequently, sealing of the cover on the side wall,wherein a plurality of recesses are provided in the side wall, each capable of accommodating a getter element mounted so that said getter element overhangs said recesses, said getter element being shaped accordingly;and then, after fitting said getter element in said recesses, the brazing preform is deposited and then the cover is deposited, thereby causing cooperation of said getter element with the preform and, consequently, positioning said getter element in accordance with its operating mode. 6. The method for assembling and hermetically sealing a package as claimed in claim 5, wherein, when the temperature is increased, the brazing material of brazing preform migrates and ensures, after melting and then solidifying, attachment of said getter element to the package. 7. The method for assembling and hermetically sealing a package as claimed in claim 6, wherein said getter element has at least one through-hole in its areas which cooperates with recesses in side wall, and the brazing material of preform partially migrates through the at least one through-hole in order to obtain attachment of said getter element with said recesses. 8. The method for assembling and sealing a package as claimed in claim 5, wherein said getter element is fitted into the plurality of recesses provided in the side wall and said getter element protrudes above an upper surface of the side wall, wherein said getter element contacts and is fixed by the preform to the package during the sealing of the upper cover. 9. A device comprising a component fitted in a hermetically sealed package inside which it is possible for there to be one of a vacuum, reduced pressure and a controlled atmosphere, with the package consisting of a side wall mounted on, or integral with a substrate, with the space thus defined being closed off by sealing an upper cover, wherein the side wall has at least one of an opening and a recess in the vicinity of its upper edge;and wherein the package also includes a functional element shaped so that said functional element has at least one of a protrusion and a protuberance capable of being accommodated in the at least one of said opening and recess provided in the side wall, and said functional element center of gravity is offset outside the support perimeter defined by area of the at least one of said protrusion and protuberance which cooperates with the at least one of said recess and opening, so that the functional element is capable of swiveling from a non-operational position to an operational position through cooperation with a preform during the sealing of the upper cover to the side wall that defines the package. 10. The device comprising a component contained in a hermetically sealed package as claimed in claim 9, wherein the side wall has one of two openings and recesses in the vicinity of its upper edge, said openings and recesses being made substantially opposite each other and, consequently, said functional element has one of two protrusions and protuberances capable of being accommodated in said openings and recesses, with the center of gravity of said functional element being outside the support perimeter of said functional element which is itself formed by the envelope of the cooperation perimeters between said protrusions and protuberances and said openings and recesses, with cooperation of said protrusions and protuberances with said openings and recesses constituting an articulation axis around which said functional element is capable of swiveling from a non-operational position to an operational position after sealing the cover on the side wall that defines the package. 11. The method for assembling and sealing a package as claimed in claim 9, wherein the at least one of said protrusion and protuberance of said functional element is fitted into the at least one of said recess and opening provided in the side wall and said functional element protrudes above an upper surface of the side wall, wherein said functional element contracts and is fixed by the preform to the package during the sealing of the upper cover. 12. A device for infrared imaging comprising at least one bolometer fitted in a hermetically sealed package inside which it is possible for there to be one of a vacuum, reduced pressure and a controlled atmosphere, with said package consisting of a side wall mounted on, or integral with a substrate, with the space thus defined being closed off by sealing an upper cover equipped with a window that is transparent to the wavelength range that is of interest, wherein the side wall of the package has one of two openings and recesses in the vicinity of its upper edge that are made substantially opposite each other;and wherein the package also includes a getter element shaped so that said getter element has at least one of two protrusions and protuberances capable of being accommodated in said openings and recesses provided in the side wall, with said protrusions and protuberances not being in alignment with the center of gravity of said getter element and said protrusions and protuberances cooperation with said openings and recesses constituting an articulation axis around which said getter element is capable of swiveling from a non-operational position to an operational position through cooperation with a preform during the sealing of the cover to the side wall that defines the package. 13. The method for assembling and sealing a package as claimed in claim 12, wherein the at least one of said protrusion and protuberance of said getter element is fitted into the at least one of said recess and opening provided in the side wall and said getter element protrudes above an upper surface of the side wall, wherein said getter element contacts and is fixed by the preform to the package during the sealing of the upper cover.
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이 특허에 인용된 특허 (7)
Kevin Kwong-Tai Chung, Cover for an optical device and method for making same.
Baker Geoffrey (Southampton GB2) Pearce Roger (Southampton GB2) Williamson Paul L. (Shepperton GB2), Pyroelectric infra-red detectors and their method of manufacture.
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