A filter device of the present disclosure includes a first port from which a solution containing a substance is to be input, and a first flow passage communicating with the first port. A filter portion made of a plurality of fibrous substances including inorganic oxide is formed in at least one part
A filter device of the present disclosure includes a first port from which a solution containing a substance is to be input, and a first flow passage communicating with the first port. A filter portion made of a plurality of fibrous substances including inorganic oxide is formed in at least one part in the first flow passage. The plurality of fibrous substances has one peak in the diameter distribution.
대표청구항▼
1. A filter device comprising: a capillary; anda filter chip provided inside the capillary such that is brought into contact with a solution containing a substance and flowing in the capillary,wherein the filter chip includes: a thin plate; anda through hole which penetrates a first surface at an up
1. A filter device comprising: a capillary; anda filter chip provided inside the capillary such that is brought into contact with a solution containing a substance and flowing in the capillary,wherein the filter chip includes: a thin plate; anda through hole which penetrates a first surface at an upper part of the thin plate and a second surface provided opposite to the first surface, and through which the solution flowing in the capillary passes from the first surface to the second surface,wherein a filter portion made of a plurality of fibrous substances including inorganic oxide is formed at a portion above the through hole so as to cover an opening portion of the through hole opened in the first surface, and the plurality of fibrous substances have one peak in diameter distribution,wherein the plurality of fibrous substances are entangled with each other, andwherein the filter portion includes gaps made by the entangled plurality of fibrous substances, and the gaps become narrower toward a downstream of the capillary. 2. The filter device of claim 1, wherein the plurality of fibrous substances are formed also on an inner wall of the through hole. 3. The filter device of claim 1, wherein a holding portion is formed on the first surface of the thin plate. 4. The filter device of claim 3, wherein the holding portion is provided with a taper such that a region surrounded by the holding portion becomes narrower from an upper surface toward the thin plate. 5. The filter device of claim 3, wherein the plurality of fibrous substances are formed in a region surrounded by the holding portion. 6. The filter device of claim 3, wherein at least one or more protruding portions are provided on an inner wall of the holding portion. 7. The filter device of claim 3, wherein at least one or more acute-angled recess portions are provided on an inner wall of the holding portion. 8. The filter device of claim 1, wherein the thin plate includes a boron-doped silicon layer. 9. The filter device of claim 1, wherein an outer wall surface of the filter chip includes concave and convex shapes. 10. The filter device of claim 1, wherein the capillary includes a plurality of the filter chips inside thereof. 11. The filter device of claim 1, wherein: a silicon-on-insulator (SOI) substrate is used as a base material for forming the filter chip, andthe plurality of fibrous substances and a silicon layer of the SOI substrate are directly joined to each other. 12. The filter device of claim 1, wherein the plurality of fibrous substances are entangled with each other, and a size of gaps made by the entangled plurality of fibrous substances is 3 μm to 6 μm. 13. The filter device of claim 1, wherein gaps lade by the plurality of fibrous substances have an aspect ratio of not less than 2. 14. The filter device of claim 1, wherein a diameter distribution of the plurality of fibrous substances is continuous normal distribution when the range of the diameter of the plurality of fibrous substances is less than twice standard deviation of the diameter of the plurality of fibrous substances. 15. The filter device of claim 1, wherein a diameter distribution of the plurality of fibrous substances is continuous normal distribution when the diameter distribution is drawn with an interval of the diameter of the plurality of fibrous substances which is less than standard deviation of the diameter of the plurality of fibrous substances. 16. The filter device of claim 1, wherein a concavity or a convexity is formed on the first surface. 17. The filter device of claim 1, wherein: the thin plate includes a plurality of through holes, andan interval between the plurality of through holes is not smaller than 10 μm. 18. The filter device of claim 16, wherein: the thin plate includes a plurality of through holes, andthe plurality of through holes are arranged in such a manner that they are not along a cleavage plane. 19. The filter device of claim 1, wherein: the thin plate includes a plurality of through holes, anda concave portion is formed at the opening portion of each of the plurality of through holes on the first surface. 20. The filter device of claim 19, wherein the through hole is provided with a taper such that a diameter of through hole becomes smaller from the first surface to the second surface. 21. The filter device of claim 1, wherein a protective film is formed on an inner wall of the through hole. 22. The filter device of claim 1, wherein a protective film is formed on a rear surface of the thin plate. 23. The filter device of claim 21, wherein a square mean roughness of a surface of the protective film is not more than 5.0 nm. 24. The filter device of claim 21, wherein: the protective film is further formed on a rear surface of the thin plate, anda square mean roughness of a surface of the protective film is not more than 5.0 nm.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (3)
Muller Hans (Im Allmendli 8703 Erlenbach CHX), Filtering method and apparatus.
Clavaguera, Simon; Decolin, Eric; Guiot, Arnaud; Hebert, Guillaume; Jacquinot, Sebastien; Motellier, Sylvie, Filtration assembly comprising a filter and a filter support and associated method for the collection and analysis of nanoparticles.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.