Ultrasonic inspection using acoustic modeling
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01R-013/00
G01N-029/04
G01N-029/44
출원번호
US-0031340
(2011-02-21)
등록번호
US-8909492
(2014-12-09)
발명자
/ 주소
McKeon, James C. P.
출원인 / 주소
Sonix, Inc.
인용정보
피인용 횟수 :
0인용 특허 :
91
초록▼
Configuration of an ultrasonic inspection system is facilitated using an ultrasound response predicted by a simulation tool. In one embodiment, estimated material properties of an object to be inspected are input to the simulation tool. Also input to the simulation tool is at least one estimated pro
Configuration of an ultrasonic inspection system is facilitated using an ultrasound response predicted by a simulation tool. In one embodiment, estimated material properties of an object to be inspected are input to the simulation tool. Also input to the simulation tool is at least one estimated property of an ultrasonic transducer of the ultrasonic inspection. The simulation tool predicts the response of the object to ultrasound from the ultrasonic transducer. This response is dependent upon the estimated material properties of the object to be inspected and the at least one estimated property of the ultrasonic transducer. The ultrasonic inspection system is then configured dependent upon a feature of the predicted response. The system may be configured, for example, by setting the position of a time gate, selecting an appropriate ultrasonic transducer, selecting the position of the transducer to achieve good focus, or selecting parameters for signal processing.
대표청구항▼
1. A computerized method for characterizing properties of an object under inspection by an ultrasonic inspection system, the method comprising: executing, by a processor, a software simulation tool to predict an ultrasonic wave scattered by the object under inspection from estimated properties of th
1. A computerized method for characterizing properties of an object under inspection by an ultrasonic inspection system, the method comprising: executing, by a processor, a software simulation tool to predict an ultrasonic wave scattered by the object under inspection from estimated properties of the object under inspection;measuring an ultrasonic wave scattered by the object under inspection by the ultrasonic inspection system;enabling a comparison of the predicted ultrasonic wave with the measured ultrasonic wave by: displaying the predicted ultrasonic wave to a user of the software simulation tool; anddisplaying the measured ultrasonic wave to the user of the software simulation tool;responsive to user input, adjusting the estimated properties to improve the degree of match between the predicted ultrasonic wave and the measured ultrasonic wave; andgenerating an output dependent upon the adjusted estimated properties. 2. A method in accordance with claim 1, wherein the object under inspection comprises a plurality of layers and wherein the properties of the object under inspection comprise the thickness of layers, the sound speed of the layers and the density of the layers. 3. A method in accordance with claim 1, wherein the object under inspection comprises a plurality of layers and wherein the properties of the object under inspection comprise the thickness of layers and the acoustic impedance of the layers. 4. A method in accordance with claim 1, wherein the properties of the object under inspection comprises the attenuation rate of ultrasound in the object under inspection. 5. A method in accordance with claim 1, wherein adjusting the estimated properties to improve the degree of match between the predicted ultrasonic wave and the measured ultrasonic wave comprises adjusting the estimated properties in response to the user of the software simulation tool inputting at least one new estimated property of the object. 6. A method in accordance with claim 1, wherein executing the software simulation tool to predict the ultrasonic wave scattered by the object under inspection from estimated properties of the object under inspection is responsive to the user of the software simulation tool selecting the estimated properties of the object via a user interface. 7. A method in accordance with claim 1, wherein predicting an ultrasonic wave, comparing the predicted ultrasonic wave with the measured ultrasonic wave and adjusting the estimated properties to improve the match between the predicted ultrasonic wave and the measured ultrasonic wave are performed by the software simulation tool. 8. A system for characterizing properties of an object under inspection, the system comprising: a processor operable to execute a software simulation tool to predict an ultrasonic wave scattered by the object under inspection from estimated properties of the object;an ultrasonic inspection system operable to measure an ultrasonic wave scattered by the object under inspection;a display coupled to the processor and operable to display the predicted ultrasonic wave and the measured ultrasonic wave to a user of the software simulation tool; anda user input device operable to receive user input; wherein the system is operable to adjust the estimated properties of the object in response to the user input to improve the degree of match between the predicted ultrasonic wave and the measured ultrasonic wave. 9. The system of claim 8, wherein the software simulation tool of the system is operable to compare the predicted ultrasonic wave with the measured ultrasonic wave. 10. A non-transitory computer readable medium containing program instructions that, when executed on a processor, characterize properties of an object under ultrasonic inspection by: a software simulation tool executed on the processor predicting an ultrasonic wave scattered by the object under inspection from estimated properties of the object:measuring an ultrasonic wave scattered by the object under inspection on an ultrasonic inspection system;enabling a comparison of the predicted ultrasonic wave with the measured ultrasonic wave by: displaying the predicted ultrasonic wave to a user of the software simulation tool; anddisplaying the measured ultrasonic wave to the user of the software simulation tool; andresponsive to user input, adjusting the estimated properties to improve the degree of match between the predicted ultrasonic wave and the measured ultrasonic wave. 11. A method in accordance with claim 1, wherein the object under inspection comprises a plurality of layers, wherein the estimated properties of the object under inspection comprise the thicknesses of the layers and acoustic properties of the layers, and wherein executing the software simulation tool on the processor to predict the ultrasonic wave scattered comprises predicting reflections of the ultrasonic wave at one or more material interface in the object under inspection. 12. A method in accordance with claim 1, wherein generating an output comprises determining configuration properties of the ultrasonic inspection system dependent upon the adjusted estimated properties, the configuration properties comprising one or more of: a position of a time gate;an ultrasonic transducer selection; anda position of an ultrasonic transducer to achieve good focus. 13. A method in accordance with claim 1, further comprising: presenting a first user interface to the user to enable the user to enter the estimated properties of the object to be inspected; andpresenting a second user interface to the user to enable the user to enter at least one property of an ultrasonic transducer, wherein the software simulation tool is responsive to the estimated properties of the object to be inspected and the at least one property of an ultrasonic transducer. 14. A system in accordance with claim 8, wherein the object under inspection comprises a plurality of layers, wherein the estimated properties of the object under inspection comprise the thicknesses of the layers, and acoustic properties of the layers, and wherein the software simulation tool is operable to predict reflections of the ultrasonic wave at one or more material interface in the object under inspection. 15. A system in accordance with claim 8, wherein a configuration of the ultrasonic inspection system is determined dependent upon the adjusted estimated properties of the object under inspection, the configuration comprising one or more of: a position of a time gate;an ultrasonic transducer selection; anda position of an ultrasonic transducer to achieve good focus. 16. A non-transitory medium in accordance with claim 10, wherein the object under inspection comprises a plurality of layers, wherein the estimated properties of the object under inspection comprise the thicknesses of the layers, and acoustic properties of the layers, and wherein the software simulation tool predicting the ultrasonic wave scattered by the object under inspection comprises the software simulation tool predicting reflections of the ultrasonic wave at one or more material interface in the object under inspection.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (91)
Kessler Lawrence W. (418 Warren Road Glenview IL 60025), Acoustic examination methods and apparatus.
Kessler, Lawrence W.; Adams, Thomas E.; Oravecz, Michael G., Acoustic micro imaging method providing improved information derivation and visualization.
Dransfeld Klaus (Ermatingen CHX) Fischer Ulrich (Wetzlar DEX) Guethner Peter (Konstanz DEX) Heitmann Knut (Wetzlar DEX), Acoustic screen scan microscope for the examination of an object in the short-range field of a resonant acoustic oscilla.
Lee Yong J. (2600 E. Renner Rd. ; Apt. 285 Richardson TX 75082) Khuri-Yakub Butrus T. (4151 Donald Dr. Palo Alto CA 94306) Saraswat Krishna C. (12356 Parker Ranch Rd. Saratoga CA 95070), Acoustic temperature and film thickness monitor and method.
Kessler Lawrence W. (Buffalo Grove IL) Erickson Daniel M. (Schiller Park IL) Micek Daniel W. (Norridge IL) Billone John (DesPlaines IL), Controlled-immersion inspection.
Wagner Matthew Lincoln ; Bergman ; Jr. Thomas John, Method and apparatus for direct oxygen injection with a reactant stream into a fluidized bed reactor.
Kessler Lawrence W. (Buffalo Grove IL) Micek Daniel W. (Norridge IL) Billone John (Des Plaines IL), Method and apparatus for ultrasonic inspection of electronic components.
Drescher-Krasicka Ewa (Gaithersburg MD), Method and apparatus for visualization of internal stresses in solid non-transparent materials by ultrasonic techniques.
Isenberg Heinz H. (Braunschweig DEX) Vogt Gran (Burgwedel-Wettmar DEX) Althaus P. Gerhard (Garbsen DEX), Process and device for the ultrasonic testing for welds between plastics packaging and cover foils.
Park, In-Hak; Park, Chul; Han, Sang-Hee; Kim, Tae-Hoon, Semiconductor wafer position detecting system, semiconductor device fabricating facility of using the same, and wafer position detecting method thereof.
Hsiung, Chang-Meng B.; Munoz, Bethsabeth; Roy, Ajoy Kumar; Steinthal, Michael Gregory; Sunshine, Steven A.; Vicic, Michael Allen; Zhang, Shou-Hua, System for providing control to an industrial process using one or more multidimensional variables.
Satya, Akella V. S.; Pinto, Gustavo A.; Adler, David L.; Long, Robert Thomas; Richardson, Neil; Weiner, Kurt H.; Walker, David J.; Mantalas, Lynda C., Test structures and methods for inspection of semiconductor integrated circuits.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.