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Lid opening and closing device

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/673
  • H01L-021/677
출원번호 US-0420097 (2012-03-14)
등록번호 US-8936050 (2015-01-20)
우선권정보 JP-2011-58098 (2011-03-16)
발명자 / 주소
  • Sugawara, Yudo
출원인 / 주소
  • Tokyo Electron Limited
대리인 / 주소
    Nath, Goldberg & Meyer
인용정보 피인용 횟수 : 7  인용 특허 : 22

초록

A lid opening and closing device for a semiconductor manufacturing apparatus having a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion, includes an exhaust port configured to discharge

대표청구항

1. A lid opening and closing device for a semiconductor manufacturing apparatus which comprises: a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition wall having a conveying gateway with an edge portion;a carrier including a carrier body an

이 특허에 인용된 특허 (22)

  1. Okabe, Tsutomu, Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus.
  2. Nakano,Ryuichi; Hyobu,Yukihiro; Okamoto,Yoshihisa, Apparatus for replacing gas in storage container and method for replacing gas therewith.
  3. Miyajima, Toshihiko; Ishiyama, Shigeki, Clean device with clean box-opening/closing device.
  4. Yamashita, Teppei; Murata, Masanao; Tanaka, Tsuyoshi; Morita, Teruya; Kawano, Hitoshi; Okuno, Atsushi; Tsuda, Masanori; Hayashi, Mitsuhiro, Closed container to be used in a clean room.
  5. Toshio Ishikawa JP, Container.
  6. Bonora Anthony C. (Menlo Park CA) Oen Joshua T. (Newark CA), Direct loadlock interface.
  7. Shiraishi, Naomasa, Exposure apparatus and exposure method, and device manufacturing method.
  8. Toyoda, Noriyoshi; Nakamura, Hirofumi, FOUP opener and operating method thereof.
  9. Ping-Yu Hu TW; Kuan-Chou Chen TW; Tzong-Ming Wu TW; Wu-Lang Lin TW, Front-opening unified pod closing/opening control structure.
  10. Okabe, Tsutomu, Lid opening/closing system of an airtight container.
  11. Lee,Jong Haw, Method and device for controlling position of cassette in semiconductor manufacturing equipment.
  12. Miyajima, Toshihiko; Emoto, Jun; Horibe, Hidetoshi, Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port.
  13. Nagata,Tatsuhiko, Pod cover removing-installing apparatus.
  14. Liu, Chung-Shi; Lin, Cheng-Chung; Ho, Ming-Che; Lin, Kuo Cheng; Chou, Meng-Wei, Preventing UBM oxidation in bump formation processes.
  15. Miyajima, Toshihiko; Igarashi, Hiroshi; Suzuki, Hitoshi, Purging apparatus and purging method.
  16. Ozawa Makoto,JPX ; Hirano Mitsuhiro,JPX, Semiconductor manufacturing equipment and method for carrying wafers in said equipment.
  17. Davis, Jeffry A.; Dolechek, Kert L.; Curtis, Gary L., Semiconductor wafer processing apparatus.
  18. Yang Tung-Fang,TWX ; Wu Tzong-Ming,TWX, Standard mechanical interface wafer pod gas filling system.
  19. Yu, Chen-Hua; Hsiao, Yi-Li, Substrate carrier and facility interface and apparatus including same.
  20. Okabe, Tsutomu; Miyajima, Toshihiko, Substrate storage pod with replacement function of clean gas.
  21. Issei Ueda JP; Masami Akimoto JP; Kazuhiko Ito JP; Mitiaki Matsushita JP; Masatoshi Kaneda JP; Yuji Matsuyama JP, Substrate treatment system, substrate transfer system, and substrate transfer method.
  22. Tokunaga,Kenji, Wafer carrier, wafer conveying system, stocker, and method of replacing gas.

이 특허를 인용한 특허 (7)

  1. Fosnight, William; Banner, Isaac Sarek; Miner, Stephen Bradley, Automated mechanical handling systems for integrated circuit fabrication, system computers programmed for use therein, and methods of handling a wafer carrier having an inlet port and an outlet port.
  2. Kondoh, Keisuke; Tsuji, Norihiko, Connecting mechanism and connecting method of substrate container.
  3. Oyama, Katsuhiko; Takeuchi, Yasushi, Cover opening/closing apparatus, thermal processing apparatus using the same, and cover opening/closing method.
  4. Iwamoto, Tadamasa; Emoto, Jun; Miyajima, Toshihiko; Tsutsui, Hidenori, Load port unit and EFEM system.
  5. Bonecutter, Luke W.; Blahnik, David T.; Reuter, Paul B., Systems, apparatus, and methods for an improved load port.
  6. Fosnight, William J.; Waite, Stephanie; Miner, Stephen B.; Robinson, John, Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication.
  7. Fosnight, William J.; Waite, Stephanie; Miner, Stephen B.; Robinson, John, Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication.
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