Liquid flow controller and precision dispense apparatus and system
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
F16K-031/126
G05D-007/06
G05D-016/20
출원번호
US-0853674
(2013-03-29)
등록번호
US-8939428
(2015-01-27)
발명자
/ 주소
Laverdiere, Marc
McLoughlin, Robert F.
Gonnella, George
Gashgaee, Iraj
Marrs, Jennifer
출원인 / 주소
Entegris, Inc.
대리인 / 주소
Sprinkle IP Law Group
인용정보
피인용 횟수 :
0인용 특허 :
41
초록▼
Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to contr
Apparatus and a control system for monitoring (preferably digitally) and/or controlling pressure to a pneumatic load such as a proportional fluid control valve and using a measurement input from a fluid measurement device that responds to a flow rate, the liquid measurement input being used to control the pressure to the pneumatic load so that pneumatic load may be increased or decreased (to proportionally open or close the pneumatic valve) to change the flow rate of the fluid to a desired rate. The pneumatic load can also be adjusted (to proportionally open or close the pneumatic valve) to accommodate changes in temperature and viscosity of a fluid.
대표청구항▼
1. An assembly, comprising a valve housing having a cavity, a diaphragm in said cavity adapted to deflect upon the application of force, a first valve cavity, a first diaphragm in said first valve cavity, a second valve cavity, a second diaphragm in said second valve cavity, and a spring biasing sai
1. An assembly, comprising a valve housing having a cavity, a diaphragm in said cavity adapted to deflect upon the application of force, a first valve cavity, a first diaphragm in said first valve cavity, a second valve cavity, a second diaphragm in said second valve cavity, and a spring biasing said second diaphragm to prevent fluid communication between said first and second valve cavities, andan actuator in communication with said first diaphragm, wherein application of force by said actuator allows fluid communication between said first and second valve cavities. 2. The assembly of claim 1, wherein said first and second valve cavities are annular, and wherein said first cavity is in fluid communication with a linear fluid inlet path, and said second valve cavity is in fluid communication with a linear fluid outlet path. 3. The assembly of claim 2, further comprising a pressure sensor in said linear fluid outlet path. 4. The assembly of claim 2, wherein fluid enters said first valve cavity from said fluid inlet path and remains therein until the force applied by a motor overcomes the bias of said spring. 5. The assembly of claim 2, wherein said fluid inlet path defines a first horizontal plane, said fluid outlet path defines a second horizontal plane, and wherein said first and second planes do not intersect. 6. A valve with reduced hysteresis, comprising a valve housing having a cavity, a first valve cavity having a fluid inlet, a first diaphragm in said first valve cavity, a second valve cavity having a fluid outlet, a second diaphragm in said second valve cavity, and a spring biasing said second diaphragm to prevent fluid communication between said first and second valve cavities, andan actuator in communication with said first diaphragm, wherein application of force by said actuator allows fluid communication between said first cavity and said second cavity to allow fluid communication between said fluid inlet and said fluid outlet. 7. The valve of claim 6, wherein the valve is substantially linear. 8. The valve of claim 6, further comprising a motor to drive the actuator. 9. The valve of claim 8, wherein the motor comprises a stepper motor. 10. The valve of claim 6, wherein the fluid inlet is in fluid communication with a linear fluid inlet flow path. 11. The valve of claim 10, wherein the fluid outlet is in fluid communication with a linear fluid outlet flow path. 12. The valve of claim 11, wherein in the fluid inlet flow path is located along a tangential of the first valve cavity and the fluid outlet flow path is located along a tangential of the second valve cavity. 13. The valve of claim 11, wherein said fluid inlet path defines a first horizontal plane, said fluid outlet flow path defines a second horizontal plane, and wherein said first and second planes do not intersect. 14. The valve of claim 6, wherein a passageway connects the first valve cavity and the second valve cavity, the passageway partially defined by a valve seat configured to seat a portion of the second diaphragm seats and wherein application of force by the actuator causes the second diaphragm to unseat from the passageway. 15. The valve of claim 14, wherein the first diaphragm is configured to bow away from the second diaphragm when the second diaphragm is seated and the first diaphragm is pulled away from the second diaphragm by the actuator. 16. The valve of claim 6, wherein the first valve cavity and second valve cavity are annular cavities. 17. The valve of claim 6, wherein the actuator and the spring counter each other. 18. The valve of claim 6, further comprising a pneumatic diaphragm, wherein deflection of the pneumatic diaphragm causes deflection of the first diaphragm and second diaphragm.
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