Described are methods for multi-wavelength cavity ring-down spectroscopy; comprising simultaneously and continuously irradiating an optical cavity with light at two or more different wavelengths, each light being intensity-modulated at a different modulation frequency, detecting the light of two or
Described are methods for multi-wavelength cavity ring-down spectroscopy; comprising simultaneously and continuously irradiating an optical cavity with light at two or more different wavelengths, each light being intensity-modulated at a different modulation frequency, detecting the light of two or more wavelengths after the light has traveled through the optical cavity; measuring an optical loss of each detected light; and determining a characteristic of the optical cavity from the optical loss of each detected light. Also described are apparatus and systems for multi-wavelength cavity ring-down spectroscopy.
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1. A method for multi-wavelength cavity ring-down spectroscopy; comprising: simultaneously and continuously irradiating an optical cavity with light at two or more different wavelengths, each light being intensity-modulated at a different modulation frequency;detecting the light of two or more wavel
1. A method for multi-wavelength cavity ring-down spectroscopy; comprising: simultaneously and continuously irradiating an optical cavity with light at two or more different wavelengths, each light being intensity-modulated at a different modulation frequency;detecting the light of two or more wavelengths after the light has traveled through the optical cavity;measuring an optical loss of each detected light; anddetermining a characteristic of the optical cavity from the optical loss of each detected light;wherein measuring optical loss comprises measuring phase shift between light entering and exiting the optical cavity for each of the two or more wavelengths at their respective modulation frequencies. 2. The method of claim 1, wherein the optical cavity comprises an optical fiber loop, a fiber Fabry-Perot cavity, a mirror cavity, a micro-photonic resonator, or a prism cavity. 3. The method of claim 1, comprising frequency-division multiplexing of the light at two or more different wavelengths. 4. The method of claim 1, wherein the optical cavity includes at least one sensor element. 5. The method of claim 4, wherein optical transmission of the at least one sensor element changes as a function of an external stimulus. 6. The method of claim 5, wherein the change in optical transmission is a change in refractive index or optical absorption or optical scattering. 7. The method of claim 5, wherein the external stimulus is physical or chemical. 8. The method of claim 4, including using at least one sensor element selected from an absorption cell, a long period grating, an evanescent field block, an interferometer, and a gap in an optical fiber. 9. The method of claim 8, wherein the absorption cell comprises a gap in an optical path of the light at two or more different wavelengths, the method including disposing a sample in the gap; wherein the sample has an optical absorption spectrum in a spectral region of the light at two or more different wavelengths. 10. The method of claim 9, comprising measuring absorption of the sample at the two or more wavelengths, wherein absorption is indicative of presence and/or concentration of at least one analyte in the sample. 11. The method of claim 9, wherein the sample is a gas, liquid, solid, or solid suspension. 12. The method of claim 1, wherein the optical cavity comprises an optical fiber loop. 13. Apparatus for multi-wavelength cavity ring-down spectroscopy; comprising: an optical cavity;two or more light sources of different wavelengths, each light being intensity-modulated at a different modulation frequency;a detector that detects the light of two or more wavelengths after the light has traveled through the optical cavity; anda processor that measures an optical loss of each detected light;wherein measuring optical loss comprises measuring phase shift between light entering and exiting the optical cavity for each of the two or more wavelengths at their respective modulation frequencies. 14. The apparatus of claim 13, wherein the optical cavity comprises an optical fiber loop, a fiber Fabry-Perot cavity, a minor cavity, a micro-photonic resonator, or a prism cavity. 15. The apparatus of claim 13, wherein the optical cavity includes at least one sensor element. 16. The apparatus of claim 15, wherein optical transmission of the at least one sensor element changes as a function of an external stimulus. 17. The apparatus of claim 15, including at least one sensor element selected from an absorption cell, a long period grating, an evanescent field block, an interferometer, and a gap in an optical fiber. 18. The apparatus of claim 17, wherein the absorption cell comprises a gap in an optical path of the light at two or more different wavelengths, the gap accommodating a sample disposed therein; wherein the sample has an optical absorption spectrum in a spectral region of the light at two or more different wavelengths. 19. The apparatus of claim 13, wherein the optical cavity comprises an optical fiber loop.
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이 특허에 인용된 특허 (7)
Cole,Barrett E.; Gu,Yuandong, Cavity ring-down spectrometer for semiconductor processing.
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