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A fluid delivery system includes a manifold plate having an upper surface, four vertical sides, and a lower surface opposite the upper surface, where the manifold plate includes a gas inlet, a gas outlet, and a plurality of component receiving stations, one or more component receiving stations locat

A fluid delivery system includes a manifold plate having an upper surface, four vertical sides, and a lower surface opposite the upper surface, where the manifold plate includes a gas inlet, a gas outlet, and a plurality of component receiving stations, one or more component receiving stations located on the upper surface and two or more component receiving stations located on the lower surface. The manifold plate also includes a plurality of internal fluid passageways interconnecting the gas inlet, the plurality of component receiving stations, and the gas outlet. The system also includes a plurality of active fluid components, one active fluid component coupled to a corresponding one component receiving station on the manifold plate. The fluid delivery system can be configured having a single channel or a dual channel.

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1. A modular gas delivery system comprising: a. a manifold having an upper surface, four vertical sides and a lower surface thereon located three or more component receiving stations located on the upper and lower surfaces, each of the component receiving stations having a gas inlet and a gas outlet

1. A modular gas delivery system comprising: a. a manifold having an upper surface, four vertical sides and a lower surface thereon located three or more component receiving stations located on the upper and lower surfaces, each of the component receiving stations having a gas inlet and a gas outlet;b. a first fluid delivery channel formed by a first and second component receiving station located on opposite sides of the manifold, the gas inlet from the first component receiving station is connected in fluid communication by an internal fluid passageway with the gas inlet of the second component receiving station;c. a second fluid delivery channel formed by remaining component receiving stations, the gas outlets from the component receiving stations located on the upper surface of the gas delivery manifold being connected in fluid communication by an internal fluid passageway with the gas inlets of the component receiving stations located on the lower surface of the manifold; andd. a plurality of fluid components, one fluid component connected to a corresponding one component receiving station. 2. A modular gas delivery system comprising: a. a manifold having an upper surface, four vertical sides and a lower surface thereon located three component receiving stations on the upper surface and two component receiving stations on the lower surface, each component receiving stations having a gas inlet and a gas a outlet;b. a first fluid delivery channel formed by a first and second component receiving station located on opposite sides of the gas delivery manifold, the gas inlet from the first component receiving station is connected in fluid communication by a first internal fluid passageway with the gas inlet of the second component receiving station, wherein the first fluid delivery channel includes an inlet port located on one of the four vertical sides with a second internal passageway in fluid communication with the first internal fluid passageway, a first outlet port located on one of the four vertical sides with a third internal passageway at 90 degrees in fluid communication with the outlet port from the first component receiving station, and a second outlet port located on one of the opposite vertical side from that which is located the first outlet port with a fourth internal passageway at 90 degrees in fluid communication with the outlet port from the second component receiving station;c. a second fluid delivery channel formed by remaining three component receiving stations, the gas inlet from a third component receiving station located on the upper surface of the manifold is connected in fluid communication by a fifth internal fluid passageway with the gas inlet of a fourth component receiving station located on the lower surface of the manifold, wherein the second fluid delivery channel includes an inlet port located on one of the four vertical sides with a sixth internal passageway in fluid communication with the fifth internal fluid passageway, a first outlet port located on one of the four vertical sides with a seventh internal passageway at 90 degrees in fluid communication with the outlet port from the third component receiving station, the gas outlet from the fourth component receiving station being connected in fluid communication by an eight internal fluid passageway with the gas inlet of a fifth component receiving station located on the upper surface of the manifold, wherein the second fluid delivery channel further comprises a second outlet port located on one of the four vertical sides with a ninth internal passageway at 90 degrees in fluid communication with the outlet port from the fifth component receiving station; andd. a plurality of fluid components, one fluid component connected to a corresponding one component receiving station, whereas a single operative fluid control device is formed when the plurality of fluid components are connected to corresponding component receiving stations thus completing a sealed interconnection of the respective internal fluid passageways and the plurality of fluid components. 3. A modular gas delivery system comprising: a. a manifold having an upper surface, four vertical sides and a lower surface thereon located three component receiving stations on the upper surface and two component receiving stations on the lower surface, each component receiving stations having a gas inlet and a gas a outlet;b. a first fluid delivery channel formed by a first and second component receiving station located on opposite sides of the gas delivery manifold, the gas inlet from the first component receiving station is connected in fluid communication by a first internal fluid passageway with the gas inlet of the second component receiving station, wherein the first fluid delivery channel includes an inlet port located on one of the four vertical sides with a second internal passageway in fluid communication with the first internal fluid passageway, a first outlet port located on one of the four vertical sides with a third internal passageway at 90 degrees in fluid communication with the outlet port from the first component receiving station, and a second outlet port located on one of the opposite vertical side from that which is located the first outlet port with a fourth internal passageway at 90 degrees in fluid communication with the outlet port from the second component receiving station;c. a second fluid delivery channel formed by remaining five component receiving stations, the gas inlet from a third component receiving station located on the upper surface of the manifold is connected in fluid communication by a fifth internal fluid passageway with the gas inlet of a fourth component receiving station located on the lower surface of the manifold, wherein the second fluid delivery channel includes an inlet port located on one of the four vertical sides with a sixth internal passageway in fluid communication with the fifth internal fluid passageway, a first outlet port located on one of the four vertical sides with a seventh internal passageway at 90 degrees in fluid communication with the outlet port from the third component receiving station, the gas outlet from the fourth component receiving station being connected in fluid communication by an eight internal fluid passageway with the gas inlet of a fifth component receiving station located on the upper surface of the manifold, the gas outlet from the fifth component receiving station being connected in fluid communication by a ninth internal fluid passageway with the gas inlet of a sixth component receiving station located on the lower surface of the manifold, the gas outlet from the sixth component receiving station being connected in fluid communication by a tenth internal fluid passageway with the gas inlet of a seventh component receiving station located on the lower surface of the manifold, wherein the second fluid delivery channel further comprises a second outlet port located on one of the four vertical sides with an eleventh internal passageway at 90 degrees in fluid communication with the outlet port from the seventh component receiving station; andd. a plurality of fluid components, one fluid component connected to a corresponding one component receiving station, whereas a single operative fluid control device is formed when the plurality of fluid components are connected to corresponding component receiving stations thus completing a sealed interconnection of the respective internal fluid passageways and the plurality of fluid components.