Method of manufacturing a light emitting device
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B05D-005/06
C23C-016/04
H01L-051/00
C23C-014/04
C23C-014/24
C23C-014/56
H01L-027/32
H01L-051/50
출원번호
US-0467497
(2009-05-18)
등록번호
US-8968823
(2015-03-03)
우선권정보
JP-11-371349 (1999-12-27)
발명자
/ 주소
Yamazaki, Shunpei
Fukunaga, Takeshi
출원인 / 주소
Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
Husch Blackwell LLP
인용정보
피인용 횟수 :
2인용 특허 :
83
초록▼
Disclosed is an evaporation method to form a thin film over a substrate, which is characterized in the use of an evaporation source equipped with a plurality of evaporation cells. The evaporation source has a rectangular shape with a long side and a short side wherein the long side is longer than th
Disclosed is an evaporation method to form a thin film over a substrate, which is characterized in the use of an evaporation source equipped with a plurality of evaporation cells. The evaporation source has a rectangular shape with a long side and a short side wherein the long side is longer than the short side. At least one of the evaporation source and the substrate is relatively moved during the evaporation, which allows the formation of a thin film having a highly uniform thickness in a short time.
대표청구항▼
1. A method of manufacturing a light emitting device comprising a step of: depositing an organic material over a substrate by evaporating the organic material from an evaporation source,wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,where
1. A method of manufacturing a light emitting device comprising a step of: depositing an organic material over a substrate by evaporating the organic material from an evaporation source,wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,wherein each of the plurality of discrete evaporation cells contains the organic material,wherein the evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width,wherein, when the organic material is evaporated, the evaporation source is moved along the second direction, andwherein the evaporation of the organic material is initiated by heating the plurality of evaporation cells. 2. The method according to claim 1, wherein the light emitting device is a display device. 3. The method according to claim 1, wherein, when the organic material is evaporated, the substrate is stationary. 4. The method according to claim 1, wherein the length of the evaporation source is from 300 mm to 1200 mm. 5. The method according to claim 1, wherein the evaporation of the organic material from the plurality of evaporation cells is performed at the same time. 6. A method of manufacturing a light emitting device comprising a step of: depositing an organic material over a substrate by evaporating the organic material from an evaporation source,wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,wherein each of the plurality of discrete evaporation cells contains the organic material,wherein the evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width,wherein, when the organic material is evaporated, the evaporation source is moved along the second direction,wherein the plurality of discrete evaporation cells is arranged along the first direction, andwherein the evaporation of the organic material is initiated by heating the plurality of evaporation cells. 7. The method according to claim 6, wherein the light emitting device is a display device. 8. The method according to claim 6, wherein, when the organic material is evaporated, the substrate is stationary. 9. The method according to claim 6, wherein the length of the evaporation source is from 300 mm to 1200 mm. 10. The method according to claim 6, wherein the evaporation of the organic material from the plurality of evaporation cells is performed at the same time. 11. A method of manufacturing a light emitting device comprising a step of: depositing an organic material over a substrate by evaporating the organic material from an evaporation source,wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,wherein each of the plurality of discrete evaporation cells contains the organic material,wherein the evaporation source is provided in one of a plurality of evaporation chambers,wherein the plurality of evaporation chambers each are connected to a conveyer chamber,wherein the evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width,wherein, when the organic material is evaporated, the evaporation source is moved along the second direction, andwherein the evaporation of the organic material is initiated by heating the plurality of evaporation cells. 12. The method according to claim 11, wherein the light emitting device is a display device. 13. The method according to claim 11, wherein, when the organic material is evaporated, the substrate is stationary. 14. The method according to claim 11, wherein the length of the evaporation source is from 300 mm to 1200 mm. 15. The method according to claim 11, wherein the evaporation of the organic material from the plurality of evaporation cells is performed at the same time. 16. A method of manufacturing a light emitting device comprising a step of: depositing an organic material over a substrate by evaporating the organic material from an evaporation source,wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,wherein each of the plurality of discrete evaporation cells contains the organic material,wherein the evaporation source is provided in one of a plurality of evaporation chambers,wherein the plurality of evaporation chambers each are connected to a conveyer chamber,wherein the evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width,wherein, when the organic material is evaporated, the evaporation source is moved along the second direction,wherein the plurality of discrete evaporation cells is arranged along the first direction, andwherein the evaporation of the organic material is initiated by heating the plurality of evaporation cells. 17. The method according to claim 16, wherein the light emitting device is a display device. 18. The method according to claim 16, wherein, when the organic material is evaporated, the substrate is stationary. 19. The method according to claim 16, wherein the length of the evaporation source is from 300 mm to 1200 mm.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (83)
Takemura Yasuhiko,JPX, Active matrix device with two TFT's per pixel driven by a third TFT with a crystalline silicon channel.
Tsubaki, Kenji; Kido, Junji; Kishigami, Yasuhisa; Kondo, Yukihiro, Apparatus for and method of vacuum vapor deposition and organic electroluminescent device.
McKee Rodney Allen ; Walker Frederick Joseph, Apparatus, system and method for controlling emission parameters attending vaporized in a HV environment.
William C. Shakespeare ; Michael G. Yang ; Rajeswari Sundaramoorthi ; Regine Bohacek ; Charles Joseph Eyermann ; Tomi K. Sawyer, Bicyclic signal transduction inhibitors, compositions containing them & uses thereof.
Harrah Larry A. (Albuquerque NM) Mead Keith E. (Peralta NM) Smith Henry M. (Overland Park KS granted to U.S. Department of Energy under the provisions of 42 U.S.C. 2182), Combination moisture and hydrogen getter.
Feuerstein Albert (Neuberg DEX) Thorn Gernot (Hanau am Main DEX) Ranke Horst (Filderstadt DEX), Method and system for a vacuum evaporative deposition process.
Spitzer Mark B. (Sharon MA) Salerno Jack P. (Waban MA) Jacobsen Jeffrey (Hollister CA) Dingle Brenda (Mansfield MA) Vu Duy-Phach (Taunton MA) Zavracky Paul M. (Norwood MA), Method for manufacturing a semiconductor device using a circuit transfer film.
Begin Robert G. (Montecito CA) Clarke Peter J. (Santa Barbara CA), Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus.
Maydan Dan (Los Altos Hills CA) Somekh Sasson (Redwood City CA) Wang David N. (Cupertino CA) Cheng David (San Jose CA) Toshima Masato (San Jose CA) Harari Isaac (Mountain View CA) Hoppe Peter D. (Sun, Multi-chamber integrated process system.
Onitsuka Osamu,JPX ; Ebisawa Akira,JPX ; Suzuki Mitsunari,JPX ; Yamamoto Hiroshi,JPX ; Arai Michio,JPX, Organic electroluminescent display device, and method and system for making the same.
Tanabe Hiroshi,JPX ; Yamamoto Hiroshi,JPX ; Fukuyu Kengo,JPX ; Onitsuka Osamu,JPX, System and process for fabricating an organic electroluminescent display device.
Edwards Richard C. (Ringwood NJ) Kolesa Michael S. (Suffern NY) Ishikawa Hiroichi (Mahwah NJ), Wafer processing cluster tool batch preheating and degassing apparatus.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.