Methods and systems for producing silane that use electrolysis to regenerate reactive components therein are disclosed. The methods and systems may be substantially closed-loop with respect to halogen, an alkali or alkaline earth metal and/or hydrogen.
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1. A closed-loop process for producing polycrystalline silicon, the process comprising: contacting a halogenated silicon feed gas comprising at least one halosilane selected from the group consisting of silicon tetrahalide, trihalosilane, dihalosilane and monohalosilane with an alkali or alkaline ea
1. A closed-loop process for producing polycrystalline silicon, the process comprising: contacting a halogenated silicon feed gas comprising at least one halosilane selected from the group consisting of silicon tetrahalide, trihalosilane, dihalosilane and monohalosilane with an alkali or alkaline earth metal hydride to produce silane and an alkali or alkaline earth-metal halide salt;thermally decomposing silane to produce polycrystalline silicon and hydrogen;electrolyzing the halide salt to produce metallic alkali or alkaline earth metal and halogen gas; andproducing a halogenated silicon feed gas comprising at least one halosilane selected from the group consisting of silicon tetrahalide, trihalosilane, dihalosilane and monohalosilane by contacting the halogen gas produced by electrolyzing the alkali or alkaline earth metal halide with at least one of: (1) silicon to produce silicon tetrahalide; and(2) hydrogen to produce hydrogen halide, wherein the hydrogen halide is further contacted with silicon to produce a mixture comprising silicon tetrahalide and trihalosilane;contacting the metallic alkali or alkaline earth-metal with hydrogen produced from the thermal decompositions of silane to produce an alkali or alkaline earth metal hydride;contacting the halogenated silicon feed gas produced by contacting halogen gas or hydrogen halide with silicon with the alkali or alkaline earth-metal hydride produced by contacting the metallic alkali or alkaline earth metal with hydrogen to produce silane and an alkali or alkaline earth-metal halide salt. 2. The process as set forth in claim 1 wherein silane is introduced into a fluidized bed reactor to deposit silicon on silicon seed particles fluidized therein. 3. The process as set forth in claim 1 comprising introducing the halogenated silicon feed gas into a disproportionation system prior to contacting the halogenated silicon feed gas with the alkali or alkaline earth metal hydride. 4. The process as set forth in claim 1 wherein the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent selected from the group consisting of toluene, dimethyl ether, diglyme, NaAlCl4 and mixtures thereof, the metallic alkali or alkaline earth-metal being added to a reaction vessel containing the solvent to form a reaction mixture, wherein hydrogen gas is bubbled through the reaction mixture. 5. The process as set forth in claim 1 wherein the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent selected from the group consisting of toluene, dimethyl ether, diglyme, NaAlCl4 and mixtures thereof. 6. The process as set forth in claim 5 wherein the solvent contains a catalyst. 7. The process as set forth in claim 4 wherein spent solvent comprising the halide salt and the solvent is produced upon contacting the alkali or alkaline earth-metal hydride with the halogenated silicon feed gas, the method comprising regenerating the solvent by separating the halide salt and the solvent. 8. The process as set forth in claim 4 wherein the halide salt and solvent are separated by evaporating the solvent from the salt and condensing the solvent after evaporation. 9. The process as set forth in claim 1 wherein the halogenated silicon feed gas comprises one or more metal halide impurities, the method comprising cooling the halogenated silicon feed gas to precipitate the metal halide impurities. 10. The process as set forth in claim 1 wherein halide salt is electrolyzed by: introducing the salt to a vessel containing a cathode, an anode, and a separator disposed between the cathode and anode;applying current to the cathode and anode to produce halogen gas and metallic alkali or alkaline earth metal; anddischarging halogen gas and metallic alkali or alkaline earth metal from the vessel. 11. The process as set forth in claim 1 wherein granular silicon and at least one of halogen gas and hydrogen halide are introduced into a fluidized bed reactor wherein the halogen gas or hydrogen halide fluidize the granular silicon in the reactor. 12. The process as set forth in claim 1 wherein the alkali or alkaline earth metal is selected from the group consisting of lithium, sodium, potassium, magnesium, barium, calcium and mixtures thereof. 13. The process as set forth in claim 1 wherein the alkali or alkaline earth metal is sodium. 14. The process as set forth in claim 1 wherein the alkali or alkaline earth metal halide salt comprises a halogen selected from the group consisting of fluorine, chlorine, bromine, iodine and mixtures thereof. 15. The process as set forth in claim 1 wherein the alkali or alkaline earth metal halide salt comprises chlorine. 16. A process for producing silane from a source of alkali or alkaline earth metal halide salt, the process comprising: electrolyzing an alkali or alkaline earth metal halide salt to produce metallic alkali or alkaline earth metal and halogen gas;contacting the metallic alkali or alkaline earth-metal with hydrogen to produce an alkali or alkaline earth metal hydride;producing a halogenated silicon feed gas comprising at least one halosilane selected from the group consisting of silicon tetrahalide, trihalosilane, dihalosilane and monohalosilane by contacting the halogen gas with at least one of: (1) silicon to produce silicon tetrahalide; and(2) hydrogen to produce a hydrogen halide, wherein the hydrogen halide is further contacted with silicon to produce a mixture comprising silicon tetrahalide and trihalosilane; andcontacting the halogenated silicon feed gas with the alkali or alkaline earth metal hydride to produce silane and an alkali or alkaline earth-metal hydride salt, wherein (1) the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent or (2) the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent. 17. The process as set forth in claim 16 wherein the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent, the metallic alkali or alkaline earth-metal being added to a reaction vessel containing the solvent to form a reaction mixture and wherein hydrogen gas is bubbled through the reaction mixture. 18. The process as set forth in claim 16 wherein the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent. 19. A process for producing silane in a substantially closed-loop system with respect to alkali or alkaline earth metals, the process comprising: contacting a halogenated silicon feed gas with an alkali or alkaline earth metal hydride to produce silane and an alkali or alkaline earth-metal halide salt;electrolyzing the halide salt to produce metallic alkali or alkaline earth metal and halogen gas;contacting the metallic alkali or alkaline earth-metal with hydrogen to produce an alkali or alkaline earth metal hydride; andcontacting the alkali or alkaline earth-metal hydride produced by contacting the metallic alkali or alkaline earth metal and hydrogen with the halogenated silicon feed gas to produce silane and an alkali or alkaline earth-metal halide salt, wherein (1) the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent or (2) the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent. 20. The process as set forth in claim 19 wherein the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent, the metallic alkali or alkaline earth-metal being added to a reaction vessel containing the solvent to form a reaction mixture, wherein hydrogen gas is bubbled through the reaction mixture. 21. The process as set forth in claim 19 wherein the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent, spent solvent comprising the halide salt and the solvent being produced upon contacting the alkali or alkaline earth-metal hydride with the halogenated silicon feed gas, the method comprising regenerating the solvent by separating the halide salt and the solvent by evaporating the solvent from the salt and condensing the solvent after evaporation. 22. A process for producing silane in a substantially closed-loop system with respect to halogens, the process comprising: contacting a halogenated silicon feed gas comprising at least one halosilane selected from the group consisting of silicon tetrahalide, trihalosilane, dihalosilane and monohalosilane with an alkali or alkaline earth metal hydride to produce silane and an alkali or alkaline earth-metal halide salt;electrolyzing the halide salt to produce metallic alkali or alkaline earth metal and halogen gas;producing a halogenated silicon feed gas comprising at least one halosilane selected from the group consisting of silicon tetrahalide, trihalosilane, dihalosilane and monohalosilane by contacting the halogen gas with at least one of: (1) silicon to produce silicon tetrahalide; and(2) hydrogen to produce hydrogen halide, wherein the hydrogen halide is further contacted with silicon to produce a mixture comprising silicon tetrahalide and trihalosilane; andcontacting the halogenated silicon feed gas with an alkali or alkaline earth metal hydride to produce silane and an alkali or alkaline earth-metal halide salt, wherein (1) the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent or (2) the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent. 23. The process as set forth in claim 22 wherein the metallic alkali or alkaline earth-metal is contacted with hydrogen in a solvent, the metallic alkali or alkaline earth-metal being added to a reaction vessel containing the solvent to form a reaction mixture, wherein hydrogen gas is bubbled through the reaction mixture. 24. The process as set forth in claim 22 wherein the alkali or alkaline earth-metal hydride is contacted with the halogenated silicon feed gas in a solvent, the solvent being produced upon contacting the alkali or alkaline earth-metal hydride with the halogenated silicon feed gas, the method comprising regenerating the solvent by separating the halide salt and the solvent by evaporating the solvent from the salt and condensing the solvent after evaporation.
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이 특허에 인용된 특허 (21)
DeLuca John P., Closed loop process for producing polycrystalline silicon and fumed silica.
Dumousseau Jean-Yves (Paris FRX) Grosbois Jean (L\Isle Adam FRX) Jacubert Serge (Viroflay FRX), Continuous hydrogenation of lithium into lithium hydride.
Lewis Kenrick M. (Queens NY) Cameron Rudolph A. (Bronx NY) Larnerd Jeffrey M. (Dunbar WV) Kanner Bernard (West Nyack NY), Direct synthesis process for organohalohydrosilanes.
Padovani ; Francois A. ; Miller ; Michael Brant ; Moore ; James A. ; Fo wler ; James H. ; June ; Malcolm Neville ; Matthews ; James D. ; Morton ; T. R. ; Stotko ; Norbert A. ; Palmer ; Lewis B., Process of refining impure silicon to produce purified electronic grade silicon.
Ulmer Harry E. (Morristown NJ) Pickens Donald (Mendham NJ) Rahl Forrest J. (Hackettstown NJ) Lefrancois Philip A. (Cranford NJ), Producing silane from silicon tetrafluoride.
Allen Robert H. (Baton Rouge LA) Richards Douglas M. (Houston TX), Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve.
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